JPWO2011086650A1 - LiCoO2焼結体の製造方法及びスパッタリングターゲット - Google Patents
LiCoO2焼結体の製造方法及びスパッタリングターゲット Download PDFInfo
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- JPWO2011086650A1 JPWO2011086650A1 JP2011549776A JP2011549776A JPWO2011086650A1 JP WO2011086650 A1 JPWO2011086650 A1 JP WO2011086650A1 JP 2011549776 A JP2011549776 A JP 2011549776A JP 2011549776 A JP2011549776 A JP 2011549776A JP WO2011086650 A1 JPWO2011086650 A1 JP WO2011086650A1
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- licoo
- sintered body
- sintering
- preform
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- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 3
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- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910012305 LiPON Inorganic materials 0.000 description 1
- CHMVGFQYASQDRV-UHFFFAOYSA-M P(=O)(O)(O)[O-].[Li+].P(O)(O)(O)=O Chemical compound P(=O)(O)(O)[O-].[Li+].P(O)(O)(O)=O CHMVGFQYASQDRV-UHFFFAOYSA-M 0.000 description 1
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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Abstract
Description
これにより、比較的大型のLiCoO2焼結体を製造する場合においても、相対密度90%以上という高密度なLiCoO2焼結体を安定して製造することができる。
これにより、バインダに由来するカーボンの残留を防止して高純度なLiCoO2焼結体を製造することができる。
これにより、パーティクルの発生を抑制でき、直流電力と高周波電力との重畳放電による安定したスパッタリングが可能となる。
本実施形態では、均一な結晶組織、高い相対密度、低い比抵抗値を有するLiCoO2(コバルト酸リチウム)焼結体を製造するために、焼結による残留応力が低いと予想される冷間静水圧プレス(CIP:Cold Isostatic Press)&Sintering法を採用する。ここでは先ず、予備成形圧力、焼結温度、焼結時間が、LiCoO2焼結体に及ぼす影響について説明する。
図1は、大気中、600℃、700℃、800℃、900℃及び1000℃で熱処理したLiCoO2粉末のX線回折結果(線源:CuKα)を示す概略図である。測定装置には、理学電気株式会社製粉末X線回折装置「RINT1000」を用いた。LiCoO2粉末のサンプルには、市販の粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)を用いた。熱処理時間は、それぞれ30分とした。そして、各温度でのXRD結果から、(003)面のピークの半値幅(FWHM:full width at half maximum)と、(104)面と(003)面とのピーク強度比(面積比)((104)/(003))を、温度ごとに測定した。併せて、市販の粉末(日本化学工業株式会社製「セルシード(登録商標)C-5H」)を用いた場合の半値幅の変化も同様に測定した。その結果を図2に示す。
図3は、市販(日本化学工業株式会社製「セルシード(登録商標)C-5」)のLiCoO2粉末をAr雰囲気中で加熱したときの状態変化を概略的に示す一実験結果である。測定装置には、アルバック理工社製示差熱分析装置「TGD-9600」を用いた。Ar気流中で一定の昇温速度(20℃/min.)で加熱した際のサンプルの熱重量(TG:thermogravimetry)の変化を調べたところ、図3に示すように、1050℃程度までは僅かな重量減少があり、それより高温になると急激な重量減少が生じることが確認された。1050℃までの緩やかな重量減少は、サンプルからのガス放出と考えられ、また、1100℃程度で吸熱反応が示されていることから、この温度付近で融解が生じることが確認された。
高温保持された大気中に設置したサンプルの結晶性変化と、Ar気流中で昇温しながら測定したサンプルの状態変化とで条件は異なるものの、以下のような知見を得ることができる。すなわち、LiCoO2の顕著な結晶粒の合体(成長)が生じ始める温度は1050℃以上であり、従ってLiCoO2粉末の焼結が進行する温度条件は、1050℃以上の温度領域が適当であると判断される。なお、LiCoO2の融点は、1130℃である。
一方、比較的大型のLiCoO2焼結体を製造する場合、予備成形体自体の自重が大きくなり、成形体の形状を維持する上で成形体強度を高める必要が出てくる。そこで、原料粉末にバインダを添加し、成形と破砕を繰り返すことで、予備成形体の大型化に伴う強度の低下を抑制することができる。また、予備成形体の作製後は、適宜の温度で脱脂処理および必要な場合は脱ガス処理を施すことで、予備成形体から不純物成分を除去することができる。
(実施例1−1)
平均粒径(D50、以下同じ。)5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)を、2000kg/cm2でφ150mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、1050℃で8時間焼結した。ターゲット形状への機械加工時、焼結体の割れは認められなかった。ターゲットの放電テストを行ったところ、安定したRF+DC放電の持続が確認された。得られた焼結体の相対密度、比抵抗値、平均粒径を測定したところ、相対密度は90%、比抵抗値は3kΩ・cm、平均粒径は約20μmであった。
比抵抗値の測定は、4探針法によって行った。測定装置は、ナプソン社製「RT−6」を用いた。
平均粒径の測定は、焼結体の断面SEM写真を用い、「ASTM(American Society for Testing and Materials)E112」(JIS(Japanese Industrial Standards) G0551)の粒度表に基づく目視判断とした。
平均粒径5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)を、2000kg/cm2でφ150mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、1120℃で4時間焼結した。ターゲット形状への機械加工時、焼結体の割れは認められなかった。ターゲットの放電テストを行ったところ、安定したRF+DC放電の持続が確認された。得られた焼結体の相対密度は92%、比抵抗値は2kΩ・cm、平均粒径は約50μmであった。
平均粒径5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)を、1500kg/cm2でφ150mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、1120℃で3時間焼結した。ターゲット形状への機械加工時、焼結体の割れは認められなかった。ターゲットの放電テストを行ったところ、安定したRF+DC放電の持続が確認された。得られた焼結体の相対密度は90.5%、比抵抗値は3kΩ・cm、平均粒径は約40μmであった。
平均粒径6〜7μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5H」)を、1500kg/cm2でφ150mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、1120℃で3時間焼結した。ターゲット形状への機械加工時、焼結体の割れは認められなかった。ターゲットの放電テストを行ったところ、安定したRF+DC放電の持続が確認された。得られた焼結体の相対密度は91%、比抵抗値は3kΩ・cm、平均粒径は約40μmであった。
平均粒径5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)を、2000kg/cm2でφ150mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、950℃で3時間焼結した。焼結後の成形体の割れは認められなかった。得られた焼結体の相対密度は80%、比抵抗値は12kΩ・cm、平均粒径は約7μmであった。
平均粒径5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)を、950kg/cm2でφ150mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、1050℃で1時間焼結した。焼結後の成形体の割れは認められなかった。得られた焼結体の相対密度は88%、比抵抗値は7kΩ・cm、平均粒径は約20μmであった。
平均粒径5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)を、2000kg/cm2でφ150mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、1130℃で3時間焼結した。焼結後の成形体の割れは認められなったが、ターゲット形状への加工時にチッピングが多数発生した。得られた焼結体の相対密度は93%、比抵抗値は2kΩ・cm、平均粒径は約100μmであった。
平均粒径6〜7μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5H」)を、950kg/cm2でφ150mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、1050℃で2時間焼結した。焼結後の成形体の割れは認められなかった。得られた焼結体の相対密度は86%、比抵抗値は8kΩ・cm、平均粒径は約15μmであった。
(実施例2−1)
平均粒径5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)にポリ酢酸ビニル系のバインダを2wt%添加し、エタノールを加えて混合した後、乾燥させた。その後、ロール粉砕、分級、CIP、ロール粉砕、分級を順に実施することで造粒した平均粒径5〜6μmの粉末を、2000kg/cm2でφ360mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、300℃で3時間保持してバインダ成分を除去した後、1050℃で8時間焼結した。ターゲット形状への機械加工時、焼結体の割れは認められなかった。ターゲットの放電テストを行ったところ、安定したRF+DC放電の持続が確認された。得られた焼結体の相対密度は90%、比抵抗値は3kΩ・cm、平均粒径は約20μmであった。残留カーボン量を確認したところ、60ppm以下であった。
平均粒径5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)にポリ酢酸ビニル系のバインダを1wt%添加し、エタノールを加えて混合した後、乾燥させた。その後、粉砕、分級、CIP、粉砕、分級を順に実施することで造粒した粉末を、2000kg/cm2でφ360mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、300℃で1時間保持してバインダ成分を除去した後、1120℃で4時間焼結した。ターゲット形状への機械加工時、焼結体の割れは認められなかった。ターゲットの放電テストを行ったところ、安定したRF+DC放電の持続が確認された。得られた焼結体の相対密度は92%、比抵抗値は2kΩ・cm、平均粒径は約40μmであった。残留カーボン量を確認したところ、60ppm以下であった。
平均粒径5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)にポリ酢酸ビニル系のバインダを2wt%添加し、エタノールを加えて混合した後、乾燥させた。その後、ロール粉砕した後に、粉末をボールミルを用いて粉砕・混合・均一化処理した。この結果、原料粉末の平均粒径は0.6μm程度まで微細化した。この粉末を、2000kg/cm2でφ360mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、300℃で3時間保持してバインダ成分を除去した後、650℃で1時間保持し、その後昇温して1050℃に到達後、同温度で8時間焼結した。ターゲット形状への機械加工時、焼結体の割れは認められなかった。ターゲットの放電テストを行ったところ、安定したRF+DC放電の持続が確認された。得られた焼結体の相対密度は95%、比抵抗値は0.5kΩ・cm、平均粒径は30μmであった。残留カーボン量を確認したところ、60ppmであった。
平均粒径6〜7μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5H」)にポリ酢酸ビニル系のバインダを2wt%添加し、エタノールを加えて混合した後、乾燥させた。その後、ロール粉砕した後に、粉末をボールミルを用いて粉砕・混合・均一化処理した。この結果、原料粉末の平均粒径は0.6μm程度まで微細化した。この粉末を、2000kg/cm2でφ360mmのサイズのゴム型を用いてCIP成形した。得られた予備成形体を大気中、300℃で3時間保持してバインダ成分を除去した後、650℃で1時間保持し、その後昇温して1050℃に到達後、同温度で8時間焼結した。ターゲット形状への機械加工時、焼結体の割れは認められなかった。ターゲットの放電テストを行ったところ、安定したRF+DC放電の持続が確認された。得られた焼結体の相対密度は94%、比抵抗値は0.6kΩ・cm、平均粒径は30μmであった。残留カーボン量を確認したところ、60ppmであった。
平均粒径5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)を、2000kg/cm2でφ360mmのサイズのゴム型を用いてCIP成形した。成形体強度が低く、6枚中3枚が割れた。割れなかった予備成形体を大気中、1120℃で3時間焼結した。焼結後の成形体のうち1枚は割れてしまい、他の1枚は機械加工時に割れが認められた。得られた焼結体の相対密度は92%、比抵抗値は3kΩ・cm、平均粒径は約40μmであった。
平均粒径5〜6μmのLiCoO2原料粉末(日本化学工業株式会社製「セルシード(登録商標)C-5」)を、2000kg/cm2でφ360mmのサイズのゴム型を用いてCIP成形した。成形体強度が低く、ほとんどが割れた。割れなかった予備成形体を大気中、1130℃で3時間焼結した。得られた焼結体の相対密度は93%、比抵抗値は3kΩ・cm、平均粒径は約80μmであった。
TG…熱重量分析
DTG…熱重量の変化率
Claims (6)
- LiCoO2粉末を冷間静水圧プレス法により1000kg/cm2以上の圧力で予備成形し、
前記LiCoO2粉末の予備成形体を1050℃以上1120℃以下の温度で焼結する
LiCoO2焼結体の製造方法。 - 請求項1に記載のLiCoO2焼結体の製造方法であって、
前記予備成形体を焼結する工程は、前記予備成形体を前記温度に2時間以上保持する
LiCoO2焼結体の製造方法。 - 請求項2に記載のLiCoO2焼結体の製造方法であって、
前記予備成形体を焼結する工程は、大気中または酸素雰囲気中で前記予備成形体を焼結する
LiCoO2焼結体の製造方法。 - 請求項1に記載のLiCoO2焼結体の製造方法であって、
前記LiCoO2粉末を予備成形する工程は、
前記LiCoO2粉末にバインダを添加する工程と、
前記バインダを添加した前記LiCoO2粉末を冷間静水圧プレス法により成形する工程と、
前記バインダを添加した前記LiCoO2粉末の成形体を破砕する工程と、
粉砕した前記LiCoO2粉末を冷間静水圧プレス法により成形する工程とを含む
LiCoO2焼結体の製造方法。 - 請求項4に記載のLiCoO2焼結体の製造方法であって、さらに、
前記予備成形体を焼結する工程の前に、前記バインダを含む前記LiCoO2粉末の予備成形体を焼結温度よりも低い温度で脱脂する
LiCoO2焼結体の製造方法。 - LiCoO2焼結体からなり、90%以上の相対密度と、3kΩ・cm以下の比抵抗と、20μm以上50μm以下の平均粒径とを有する
スパッタリングターゲット。
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EP2524904A4 (en) * | 2010-01-15 | 2014-07-02 | Ulvac Inc | MANUFACTURING METHOD FOR LiCoO2 SINTERED BODY AND SPUTTER TARGET MANUFACTURED THEREOF |
CN102412389B (zh) * | 2011-08-04 | 2014-04-30 | 横店集团东磁股份有限公司 | 一种锂离子电池用掺镁镍钴酸锂正极材料的制备方法 |
JP6011838B2 (ja) * | 2011-08-31 | 2016-10-19 | トヨタ自動車株式会社 | リチウム二次電池 |
JP5969786B2 (ja) * | 2012-03-21 | 2016-08-17 | 株式会社コベルコ科研 | LiCoO2焼結体およびスパッタリングターゲット、並びにその製造方法 |
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KR101726117B1 (ko) * | 2013-03-13 | 2017-04-11 | 가부시키가이샤 코베루코 카겐 | LiCoO2 함유 소결체 및 스퍼터링 타깃, 및 LiCoO2 함유 소결체의 제조 방법 |
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JP2017075377A (ja) * | 2015-10-15 | 2017-04-20 | 株式会社コベルコ科研 | LiCoO2含有焼結体およびLiCoO2含有スパッタリングターゲット、並びにLiCoO2含有焼結体の製造方法 |
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CN114057233A (zh) * | 2021-11-17 | 2022-02-18 | 鄂尔多斯市紫荆创新研究院 | 用于制备薄膜锂电池的钴酸锂正极靶材及其制备方法 |
CN114057233B (zh) * | 2021-11-17 | 2023-09-26 | 鄂尔多斯市紫荆创新研究院 | 用于制备薄膜锂电池的钴酸锂正极靶材及其制备方法 |
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