JPWO2008149584A1 - 電子部品装置およびその製造方法 - Google Patents
電子部品装置およびその製造方法 Download PDFInfo
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Abstract
Description
12 第2の部材
13 第1の導体膜
14 第2の導体膜
16,18 低融点金属層
17 高融点金属層
19〜24 金属間化合物層
25,44,57,69 接合部
31,51,61 電子部品装置
32 主基板
33 蓋基板
36 電子回路形成部分
37 第1の封止枠
38 第1の接続用電極
39 第2の封止枠
40 第2の接続用電極
45,46 集合基板
(第1の導体膜13の厚み)>4/3×1/2×(第2の低融点金属層18の厚み)
(第2の導体膜14の厚み)>4/3×1/2×(第1の低融点金属層16の厚み)
(高融点金属層17の厚み)>4/3×1/2×(第1の低融点金属層16の厚み+第2の低融点金属層18の厚み)
前述したように、第1の導体膜13の厚みが4μm、第2の導体膜14の厚みが4μm、第1の低融点金属層16の厚みが3μm、高融点金属層17の厚みが6μm、ならびに第2の低融点金属層18の厚みが3μmであるとき、Cuを主成分とする導体膜13および14ならびに高融点金属層17の合計厚みが14μmであり、Snを主成分とする低融点金属層16および18の合計厚みが6μmであり、Cu厚み/Sn厚みの比が「4/3」以上の「7/3」であるので、Cu3Snを生成させるのに十分なCuをSn中に供給することができ、また、第1の導体膜13の厚みは、4/3×1/2×(第2の低融点金属層18の厚み)、すなわち2μmを超え、第2の導体膜14の厚みは、4/3×1/2×(第1の低融点金属層16の厚み)、すなわち2μmを超え、さらに高融点金属層17の厚みは、4/3×1/2×(第1の低融点金属層16の厚み+第2の低融点金属層18の厚み)、すなわち4μmを超えるので、接合後に、第1の導体膜13、第2の導体膜14および高融点金属層17をすべて残存させることができる。
Claims (8)
- 第1の高融点金属からなる第1の導体膜を形成した第1の部材と第2の高融点金属からなる第2の導体膜を形成した第2の部材とをそれぞれ用意する工程と、
前記第1および第2の高融点金属より融点の低い低融点金属からなる低融点金属層を前記第1および第2の導体膜の少なくとも一方上に形成する、低融点金属層形成工程と、
前記低融点金属層を挟んで前記第1の導体膜と前記第2の導体膜とを互いに対向させた状態としながら、前記第1および第2の高融点金属の融点と前記低融点金属の融点との間の温度で加熱して、前記第1および第2の高融点金属と前記低融点金属との金属間化合物を生成させることによって、前記第1の導体膜と前記第2の導体膜とが互いに接合された接合部を形成する、加熱接合工程と
を備える、電子部品装置の製造方法であって、
前記低融点金属層に接するように、前記第1および第2の高融点金属のいずれかと同種の高融点金属からなる高融点金属層を形成する、高融点金属層形成工程をさらに備え、
前記低融点金属層形成工程は、前記加熱接合工程において、前記高融点金属層を前記低融点金属層によって厚み方向に挟む状態となるように、前記低融点金属層を形成する工程を含み、
前記高融点金属層形成工程において形成される前記高融点金属層は、前記金属間化合物の生成のために消費される量より多い量を与え得る厚みを有していて、
前記加熱接合工程は、前記接合部において前記高融点金属層の一部を残しながら前記金属間化合物を生成するように実施される、
電子部品装置の製造方法。 - 前記第1の高融点金属と前記第2の高融点金属とは互いに同種のものである、請求項1に記載の電子部品装置の製造方法。
- 前記高融点金属はCuを主成分とするものであり、前記低融点金属はSnを主成分とするものであり、前記金属間化合物はCu3Snである、請求項2に記載の電子部品装置の製造方法。
- 前記低融点金属層形成工程および前記高融点金属層形成工程を実施することによって、Cuを主成分とする前記第1の導体膜上に、Snを主成分とする前記低融点金属層が形成された状態が得られ、他方、Cuを主成分とする前記第2の導体膜上に、Snを主成分とする前記低融点金属層、その上にCuを主成分とする前記高融点金属層、およびその上にSnを主成分とする前記低融点金属層が順次形成された状態が得られる、請求項3に記載の電子部品装置の製造方法。
- 前記第1の部材は、電子回路形成部分および前記電子回路形成部分を取り囲む第1の封止枠がその一方主面上に形成された主基板であり、前記第2の部材は、前記第1の封止枠に接合されるべき第2の封止枠がその一方主面上に形成された蓋基板であり、
前記第1の封止枠は前記第1の導体膜によって与えられ、前記第2の封止枠は前記第2の導体膜によって与えられ、
前記第1の封止枠と前記第2の封止枠とを互いに接合するために適用される、
請求項1に記載の電子部品装置の製造方法。 - 前記主基板の前記一方主面上であって、前記第1の封止枠に取り囲まれた位置に、第1の接続用電極が形成され、前記蓋基板の前記一方主面上であって、前記第2の封止枠に取り囲まれた位置に、第2の接続用電極が形成され、前記加熱接合工程と同時に、前記第1の接続用電極と前記第2の接続用電極とを互いに電気的に接続する工程が実施される、請求項5に記載の電子部品装置の製造方法。
- 前記第1および第2の部材をそれぞれ用意する工程は、複数の前記第1および第2の部材をそれぞれ与える第1および第2の集合基板を用意する工程を含み、前記低融点金属層形成工程、前記高融点金属層形成工程および前記加熱接合工程は、前記第1および第2の集合基板の状態で実施され、前記加熱接合工程の後、複数の前記第1および第2の部材を取り出すために前記第1および第2の集合基板を分割する工程をさらに備える、請求項1ないし6のいずれかに記載の電子部品装置の製造方法。
- 第1の高融点金属からなる第1の導体膜を形成した第1の部材と、
第2の高融点金属からなる第2の導体膜を形成した第2の部材と、
前記第1の導体膜と前記第2の導体膜とを互いに接合する接合部と
を備え、
前記接合部は、前記第1の高融点金属と前記第1および第2の高融点金属より融点の低い低融点金属との金属間化合物を含む第1の金属間化合物層と、前記第2の高融点金属と前記低融点金属との金属間化合物を含む第2の金属間化合物層と、前記第1および第2の金属間化合物層間に位置しかつ前記第1および第2の高融点金属のいずれか一方からなる高融点金属層とを備える、
電子部品装置。
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