JPWO2007145057A1 - 弾性表面波装置 - Google Patents
弾性表面波装置 Download PDFInfo
- Publication number
- JPWO2007145057A1 JPWO2007145057A1 JP2008521129A JP2008521129A JPWO2007145057A1 JP WO2007145057 A1 JPWO2007145057 A1 JP WO2007145057A1 JP 2008521129 A JP2008521129 A JP 2008521129A JP 2008521129 A JP2008521129 A JP 2008521129A JP WO2007145057 A1 JPWO2007145057 A1 JP WO2007145057A1
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- acoustic wave
- electrode
- silicon oxide
- idt electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 52
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 51
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 50
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 34
- 229910003327 LiNbO3 Inorganic materials 0.000 abstract 2
- 230000008878 coupling Effects 0.000 description 23
- 238000010168 coupling process Methods 0.000 description 23
- 238000005859 coupling reaction Methods 0.000 description 23
- 229910004298 SiO 2 Inorganic materials 0.000 description 15
- 238000010586 diagram Methods 0.000 description 10
- 230000015556 catabolic process Effects 0.000 description 5
- 239000010410 layer Substances 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14538—Formation
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
(発明の効果)
2…LiNbO3基板
3…IDT電極
4,5…反射器
6…第1の酸化ケイ素膜
7…第2の酸化ケイ素膜
Claims (2)
- 前記第2の酸化ケイ素膜の膜厚Hが、0.16λ〜0.30λの範囲とされている、請求項1に記載の弾性表面波装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008521129A JP5137828B2 (ja) | 2006-06-16 | 2007-05-22 | 弾性表面波装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006167303 | 2006-06-16 | ||
JP2006167303 | 2006-06-16 | ||
PCT/JP2007/060413 WO2007145057A1 (ja) | 2006-06-16 | 2007-05-22 | 弾性表面波装置 |
JP2008521129A JP5137828B2 (ja) | 2006-06-16 | 2007-05-22 | 弾性表面波装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007145057A1 true JPWO2007145057A1 (ja) | 2009-10-29 |
JP5137828B2 JP5137828B2 (ja) | 2013-02-06 |
Family
ID=38831577
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008521129A Active JP5137828B2 (ja) | 2006-06-16 | 2007-05-22 | 弾性表面波装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7804221B2 (ja) |
JP (1) | JP5137828B2 (ja) |
DE (1) | DE112007001426B4 (ja) |
WO (1) | WO2007145057A1 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101682308B (zh) * | 2007-06-06 | 2013-07-17 | 株式会社村田制作所 | 弹性表面波装置 |
JPWO2009090715A1 (ja) * | 2008-01-17 | 2011-05-26 | 株式会社村田製作所 | 弾性表面波装置 |
JP2010193429A (ja) | 2009-01-26 | 2010-09-02 | Murata Mfg Co Ltd | 弾性波装置 |
JP5579429B2 (ja) * | 2009-12-15 | 2014-08-27 | 太陽誘電株式会社 | 弾性波素子、通信モジュール、通信装置 |
DE102010034121A1 (de) | 2010-08-12 | 2012-02-16 | Epcos Ag | Mit akustischen Wellen arbeitendes Bauelement mit reduziertem Temperaturgang der Frequenzlage und Verfahren zur Herstellung |
JP5648695B2 (ja) * | 2010-12-24 | 2015-01-07 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
JP5713025B2 (ja) * | 2010-12-24 | 2015-05-07 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
WO2015198904A1 (ja) * | 2014-06-26 | 2015-12-30 | 株式会社村田製作所 | 縦結合共振子型弾性表面波フィルタ |
KR102306240B1 (ko) * | 2017-04-17 | 2021-09-30 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치 |
JP2019145895A (ja) * | 2018-02-16 | 2019-08-29 | 株式会社村田製作所 | 弾性波装置、マルチプレクサ、高周波フロントエンド回路及び通信装置 |
DE102018113624A1 (de) * | 2018-06-07 | 2019-12-12 | RF360 Europe GmbH | Elektroakustischer Resonator und HF-Filter, das einen elektroakustischen Resonator umfasst |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001036378A (ja) * | 1999-07-16 | 2001-02-09 | Mitsubishi Electric Corp | 弾性波装置 |
JP2003008390A (ja) * | 2001-04-16 | 2003-01-10 | Murata Mfg Co Ltd | 弾性表面波装置、通信装置 |
JP2003249835A (ja) * | 2001-04-16 | 2003-09-05 | Murata Mfg Co Ltd | 弾性表面波装置、通信装置 |
WO2004070946A1 (ja) * | 2003-02-10 | 2004-08-19 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
WO2005034347A1 (ja) * | 2003-10-03 | 2005-04-14 | Murata Manufacturing Co., Ltd. | 弾性表面波装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW241397B (ja) | 1993-01-14 | 1995-02-21 | Murata Manufacturing Co | |
WO2005011117A1 (ja) | 2003-07-29 | 2005-02-03 | Murata Manufacturing Co., Ltd. | 1ポート型弾性表面波共振子及び弾性表面波フィルタ |
WO2005036743A1 (ja) * | 2003-10-10 | 2005-04-21 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
-
2007
- 2007-05-22 WO PCT/JP2007/060413 patent/WO2007145057A1/ja active Application Filing
- 2007-05-22 JP JP2008521129A patent/JP5137828B2/ja active Active
- 2007-05-22 DE DE112007001426.1T patent/DE112007001426B4/de active Active
-
2008
- 2008-12-11 US US12/332,394 patent/US7804221B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001036378A (ja) * | 1999-07-16 | 2001-02-09 | Mitsubishi Electric Corp | 弾性波装置 |
JP2003008390A (ja) * | 2001-04-16 | 2003-01-10 | Murata Mfg Co Ltd | 弾性表面波装置、通信装置 |
JP2003249835A (ja) * | 2001-04-16 | 2003-09-05 | Murata Mfg Co Ltd | 弾性表面波装置、通信装置 |
WO2004070946A1 (ja) * | 2003-02-10 | 2004-08-19 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
WO2005034347A1 (ja) * | 2003-10-03 | 2005-04-14 | Murata Manufacturing Co., Ltd. | 弾性表面波装置 |
Also Published As
Publication number | Publication date |
---|---|
DE112007001426T5 (de) | 2009-04-23 |
DE112007001426B4 (de) | 2014-02-13 |
WO2007145057A1 (ja) | 2007-12-21 |
US7804221B2 (en) | 2010-09-28 |
JP5137828B2 (ja) | 2013-02-06 |
US20090085429A1 (en) | 2009-04-02 |
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