JP4793448B2 - 弾性境界波装置 - Google Patents
弾性境界波装置 Download PDFInfo
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- JP4793448B2 JP4793448B2 JP2008538597A JP2008538597A JP4793448B2 JP 4793448 B2 JP4793448 B2 JP 4793448B2 JP 2008538597 A JP2008538597 A JP 2008538597A JP 2008538597 A JP2008538597 A JP 2008538597A JP 4793448 B2 JP4793448 B2 JP 4793448B2
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- 239000000758 substrate Substances 0.000 claims description 64
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 45
- 239000007769 metal material Substances 0.000 claims description 37
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- 229910052802 copper Inorganic materials 0.000 claims description 15
- 229910052737 gold Inorganic materials 0.000 claims description 10
- 229910052804 chromium Inorganic materials 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 229910052709 silver Inorganic materials 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 229910052721 tungsten Inorganic materials 0.000 claims description 8
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 56
- 229920002120 photoresistant polymer Polymers 0.000 description 14
- 230000008878 coupling Effects 0.000 description 12
- 238000010168 coupling process Methods 0.000 description 12
- 238000005859 coupling reaction Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000013016 damping Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02637—Details concerning reflective or coupling arrays
- H03H9/02653—Grooves or arrays buried in the substrate
- H03H9/02661—Grooves or arrays buried in the substrate being located inside the interdigital transducers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
「弾性境界波を用いたRFフィルタ」(Proc.Symp.Ultrason.Electron.,Vol.26,pp.25−26(2005/11))
(発明の効果)
1a…上面
1b…溝
2…フォトレジスト層
2A…フォトレジストパターン
3…電極膜
4…誘電体層
11…弾性境界波装置
12,13…反射器
先ず、図1(a)〜(f)を参照して、本発明の一実施形態に係る弾性境界波装置の製造方法を説明することにより、弾性境界波装置の構造を明らかにする。
第1の実験例では、圧電基板として、LiNbO3基板を用いたが、第2の実験例では、LiTaO3基板を用いた。LiTaO3基板の上面に、図1に示した場合と同様に、複数本の溝1bを形成し、様々な金属材料を充填して電極膜3を形成し、さらに誘電体層としてSiO2膜を積層した。図15〜図19は、このようにして得られた弾性境界波装置におけるLiTaO3基板のオイラー角(0°,θ,0°)のθと電極膜の膜厚と、弾性境界波装置の減衰定数αとの関係を示す図である。
Claims (5)
- 複数本の溝が上面に形成された、オイラー角(0°,θ,−45°〜+45°)のLiNbO3基板と、
前記溝に金属材料が充填されて形成されている電極と、
前記LiNbO3基板及び電極を覆うように形成されている誘電体層とを備え、該誘電体層の上面が平坦とされており、
前記電極を形成する金属材料がAl、Ti、Ni、Cr、Cu、W、Ta、Pt、Ag及びAuから選択された1種の金属材料であり、前記Al及びTiを第1のグループ、Ni及びCrを第2のグループ、Cu、W、Ta、Pt、Ag及びAuを第3のグループとし、各グループに属する金属材料からなる電極の厚みと、前記LiNbO3基板のオイラー角のθと、前記誘電体層の厚みとが、下記の表1に示されているいずれかの範囲にあることを特徴とする、弾性境界波装置。
- 前記誘電体層が酸化ケイ素からなる、請求項1〜4のいずれか1項に記載の弾性境界波装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008538597A JP4793448B2 (ja) | 2006-10-12 | 2007-09-10 | 弾性境界波装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006278970 | 2006-10-12 | ||
JP2006278970 | 2006-10-12 | ||
PCT/JP2007/067583 WO2008044411A1 (fr) | 2006-10-12 | 2007-09-10 | Dispositif à ondes limites élastiques |
JP2008538597A JP4793448B2 (ja) | 2006-10-12 | 2007-09-10 | 弾性境界波装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2008044411A1 JPWO2008044411A1 (ja) | 2010-02-04 |
JP4793448B2 true JP4793448B2 (ja) | 2011-10-12 |
Family
ID=39282620
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008538597A Expired - Fee Related JP4793448B2 (ja) | 2006-10-12 | 2007-09-10 | 弾性境界波装置 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7888841B2 (ja) |
EP (1) | EP2056456B1 (ja) |
JP (1) | JP4793448B2 (ja) |
KR (1) | KR101098692B1 (ja) |
CN (1) | CN101523720B (ja) |
WO (1) | WO2008044411A1 (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007080734A1 (ja) * | 2006-01-11 | 2007-07-19 | Murata Manufacturing Co., Ltd. | 弾性表面波装置の製造方法及び弾性表面波装置 |
JP4760908B2 (ja) * | 2006-07-05 | 2011-08-31 | 株式会社村田製作所 | 弾性表面波装置 |
WO2008149620A1 (ja) * | 2007-06-06 | 2008-12-11 | Murata Manufacturing Co., Ltd. | 弾性表面波装置 |
JPWO2009090715A1 (ja) * | 2008-01-17 | 2011-05-26 | 株式会社村田製作所 | 弾性表面波装置 |
WO2009090714A1 (ja) * | 2008-01-17 | 2009-07-23 | Murata Manufacturing Co., Ltd. | 弾性表面波装置 |
DE112009000963B4 (de) * | 2008-04-30 | 2015-11-12 | Murata Manufacturing Co., Ltd. | Grenzschallwellenvorrichtung |
DE112009001922B4 (de) * | 2008-08-08 | 2015-12-24 | Murata Manufacturing Co., Ltd. | Vorrichtung für elastische Wellen |
WO2010070816A1 (ja) * | 2008-12-17 | 2010-06-24 | 株式会社村田製作所 | 弾性表面波装置 |
JP2010193429A (ja) * | 2009-01-26 | 2010-09-02 | Murata Mfg Co Ltd | 弾性波装置 |
JP5120497B2 (ja) | 2009-04-14 | 2013-01-16 | 株式会社村田製作所 | 弾性境界波装置 |
JP5581739B2 (ja) * | 2009-04-14 | 2014-09-03 | 株式会社村田製作所 | 弾性境界波装置 |
JP5304898B2 (ja) * | 2009-08-10 | 2013-10-02 | 株式会社村田製作所 | 弾性境界波装置 |
DE102010014919B4 (de) | 2010-04-14 | 2015-07-02 | Epcos Ag | Verfahren zur Herstellung einer dielektrischen Schicht auf einem Bauelement |
WO2012073871A1 (ja) * | 2010-11-30 | 2012-06-07 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
JP5648695B2 (ja) * | 2010-12-24 | 2015-01-07 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
JP5605255B2 (ja) * | 2011-02-14 | 2014-10-15 | 株式会社村田製作所 | 電子部品の製造方法 |
US8723392B2 (en) * | 2011-07-15 | 2014-05-13 | International Business Machines Corporation | Saw filter having planar barrier layer and method of making |
JP6536676B2 (ja) * | 2015-07-06 | 2019-07-03 | 株式会社村田製作所 | 弾性波装置 |
US20220116015A1 (en) * | 2018-06-15 | 2022-04-14 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch |
SG10201905013VA (en) | 2018-06-11 | 2020-01-30 | Skyworks Solutions Inc | Acoustic wave device with spinel layer |
US12063027B2 (en) | 2018-11-21 | 2024-08-13 | Skyworks Solutions, Inc. | Acoustic wave device with ceramic substrate |
KR102629355B1 (ko) * | 2018-12-13 | 2024-01-25 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 |
US11677377B2 (en) * | 2018-12-26 | 2023-06-13 | Skyworks Solutions, Inc. | Multi-layer piezoelectric substrate with grounding structure |
US11621690B2 (en) * | 2019-02-26 | 2023-04-04 | Skyworks Solutions, Inc. | Method of manufacturing acoustic wave device with multi-layer substrate including ceramic |
CN112653409B (zh) * | 2020-12-17 | 2024-04-12 | 广东广纳芯科技有限公司 | 一种用于制造金属电极的制造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1084246A (ja) * | 1996-09-09 | 1998-03-31 | Toshiba Corp | 弾性境界波デバイス及びその製造方法 |
JPH10335974A (ja) * | 1997-05-29 | 1998-12-18 | Matsushita Electric Ind Co Ltd | 弾性境界波素子 |
JP2004159262A (ja) * | 2002-11-08 | 2004-06-03 | Murata Mfg Co Ltd | 弾性境界波装置 |
WO2004070946A1 (ja) * | 2003-02-10 | 2004-08-19 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
WO2006011417A1 (ja) * | 2004-07-26 | 2006-02-02 | Murata Manufacturing Co., Ltd. | 弾性表面波装置 |
Family Cites Families (11)
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KR960002328B1 (ko) | 1993-06-30 | 1996-02-16 | 고등기술연구원연구조합 | 표면탄성파 소자의 제조방법 |
JP3702050B2 (ja) | 1996-09-09 | 2005-10-05 | 株式会社東芝 | 弾性境界波デバイス |
WO1998052279A1 (fr) * | 1997-05-12 | 1998-11-19 | Hitachi, Ltd. | Dispositif a onde elastique |
FR2799906B1 (fr) * | 1999-10-15 | 2002-01-25 | Pierre Tournois | Filtre a ondes acoustiques d'interface notamment pour les liaisons sans fil |
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CN1788415B (zh) * | 2004-01-19 | 2012-09-12 | 株式会社村田制作所 | 边界声波装置 |
JP4535067B2 (ja) * | 2004-03-29 | 2010-09-01 | 株式会社村田製作所 | 弾性境界波装置の製造方法及び弾性境界波装置 |
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-
2007
- 2007-09-10 CN CN2007800380437A patent/CN101523720B/zh not_active Expired - Fee Related
- 2007-09-10 KR KR1020097006289A patent/KR101098692B1/ko not_active IP Right Cessation
- 2007-09-10 EP EP07828226A patent/EP2056456B1/en not_active Not-in-force
- 2007-09-10 JP JP2008538597A patent/JP4793448B2/ja not_active Expired - Fee Related
- 2007-09-10 WO PCT/JP2007/067583 patent/WO2008044411A1/ja active Application Filing
-
2009
- 2009-04-09 US US12/420,944 patent/US7888841B2/en not_active Expired - Fee Related
-
2010
- 2010-08-25 US US12/862,843 patent/US7902718B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH1084246A (ja) * | 1996-09-09 | 1998-03-31 | Toshiba Corp | 弾性境界波デバイス及びその製造方法 |
JPH10335974A (ja) * | 1997-05-29 | 1998-12-18 | Matsushita Electric Ind Co Ltd | 弾性境界波素子 |
JP2004159262A (ja) * | 2002-11-08 | 2004-06-03 | Murata Mfg Co Ltd | 弾性境界波装置 |
WO2004070946A1 (ja) * | 2003-02-10 | 2004-08-19 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
WO2006011417A1 (ja) * | 2004-07-26 | 2006-02-02 | Murata Manufacturing Co., Ltd. | 弾性表面波装置 |
Also Published As
Publication number | Publication date |
---|---|
EP2056456A4 (en) | 2010-03-03 |
JPWO2008044411A1 (ja) | 2010-02-04 |
CN101523720B (zh) | 2012-07-04 |
EP2056456A1 (en) | 2009-05-06 |
KR101098692B1 (ko) | 2011-12-23 |
US20090189483A1 (en) | 2009-07-30 |
US7902718B2 (en) | 2011-03-08 |
EP2056456B1 (en) | 2013-03-13 |
US20100320866A1 (en) | 2010-12-23 |
US7888841B2 (en) | 2011-02-15 |
KR20090057061A (ko) | 2009-06-03 |
CN101523720A (zh) | 2009-09-02 |
WO2008044411A1 (fr) | 2008-04-17 |
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