JP4760908B2 - 弾性表面波装置 - Google Patents
弾性表面波装置 Download PDFInfo
- Publication number
- JP4760908B2 JP4760908B2 JP2008523630A JP2008523630A JP4760908B2 JP 4760908 B2 JP4760908 B2 JP 4760908B2 JP 2008523630 A JP2008523630 A JP 2008523630A JP 2008523630 A JP2008523630 A JP 2008523630A JP 4760908 B2 JP4760908 B2 JP 4760908B2
- Authority
- JP
- Japan
- Prior art keywords
- normalized
- surface acoustic
- sio
- acoustic wave
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims description 82
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 126
- 239000000758 substrate Substances 0.000 claims description 87
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 84
- 229910052751 metal Inorganic materials 0.000 claims description 67
- 239000002184 metal Substances 0.000 claims description 67
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- 229910052737 gold Inorganic materials 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 11
- 229910016570 AlCu Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 3
- 229910001120 nichrome Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 238000010606 normalization Methods 0.000 claims 4
- 239000010931 gold Substances 0.000 claims 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 230000008878 coupling Effects 0.000 description 120
- 238000010168 coupling process Methods 0.000 description 120
- 238000005859 coupling reaction Methods 0.000 description 120
- 238000010586 diagram Methods 0.000 description 41
- 229910052802 copper Inorganic materials 0.000 description 11
- 229910052715 tantalum Inorganic materials 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 239000007772 electrode material Substances 0.000 description 5
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
Description
(発明の効果)
1a…上面
1b…溝
2…フォトレジスト
2A…フォトレジストパターン
3…IDT電極
4…SiO2層
11…弾性表面波装置
12,13…反射器
Claims (10)
- 前記金属を主体とする金属が、該金属を主体とする合金である、請求項1〜8のいずれか1項に記載の弾性表面波装置。
- 前記金属を主体とする金属が、該金属または該金属を主体とする合金に、Ti、Ni、Cr、NiCr、Al及びAlCuからなる群から選択した1種の金属を主体とする合金が積層されている積層金属膜からなる、請求項1〜8のいずれか1項に記載の弾性表面波装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008523630A JP4760908B2 (ja) | 2006-07-05 | 2007-06-11 | 弾性表面波装置 |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006185246 | 2006-07-05 | ||
JP2006185246 | 2006-07-05 | ||
JP2006341231 | 2006-12-19 | ||
JP2006341231 | 2006-12-19 | ||
JP2008523630A JP4760908B2 (ja) | 2006-07-05 | 2007-06-11 | 弾性表面波装置 |
PCT/JP2007/061756 WO2008004408A1 (fr) | 2006-07-05 | 2007-06-11 | Dispositif d'onde de surface élastique |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2008004408A1 JPWO2008004408A1 (ja) | 2009-12-03 |
JP4760908B2 true JP4760908B2 (ja) | 2011-08-31 |
Family
ID=38894380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008523630A Active JP4760908B2 (ja) | 2006-07-05 | 2007-06-11 | 弾性表面波装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7626313B2 (ja) |
JP (1) | JP4760908B2 (ja) |
CN (1) | CN101485086B (ja) |
DE (1) | DE112007001609B4 (ja) |
WO (1) | WO2008004408A1 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4968334B2 (ja) * | 2007-06-06 | 2012-07-04 | 株式会社村田製作所 | 弾性表面波装置 |
JP5110091B2 (ja) * | 2007-12-20 | 2012-12-26 | 株式会社村田製作所 | 弾性表面波装置 |
JP5458300B2 (ja) * | 2009-02-09 | 2014-04-02 | 公立大学法人横浜市立大学 | 微細構造物の蒸着装置及び方法 |
CN102725959B (zh) * | 2010-01-28 | 2016-05-25 | 株式会社村田制作所 | 可调谐滤波器 |
DE102010014919B4 (de) | 2010-04-14 | 2015-07-02 | Epcos Ag | Verfahren zur Herstellung einer dielektrischen Schicht auf einem Bauelement |
DE102010034121A1 (de) * | 2010-08-12 | 2012-02-16 | Epcos Ag | Mit akustischen Wellen arbeitendes Bauelement mit reduziertem Temperaturgang der Frequenzlage und Verfahren zur Herstellung |
JP2012049817A (ja) * | 2010-08-26 | 2012-03-08 | Seiko Epson Corp | 弾性表面波デバイス、および弾性表面波発振器、ならびに電子機器 |
US9391589B2 (en) | 2011-01-24 | 2016-07-12 | Epcos Ag | Surface acoustic wave filter on a lithium niobate substrate |
JP2013102418A (ja) | 2011-10-18 | 2013-05-23 | Nippon Dempa Kogyo Co Ltd | 弾性表面波素子及び電子部品 |
WO2015137090A1 (ja) * | 2014-03-13 | 2015-09-17 | 株式会社村田製作所 | 弾性波装置 |
CN104451545B (zh) * | 2014-11-19 | 2017-09-01 | 中国电子科技集团公司第二十六研究所 | 一种ZnO薄膜材料、声表面波滤波器复合薄膜材料及制备方法 |
DE102015120654A1 (de) * | 2015-11-27 | 2017-06-01 | Snaptrack, Inc. | Elektroakustischer Wandler mit verringerten Nichtlinearitäten zweiter Ordnung |
CN108123696A (zh) * | 2018-03-07 | 2018-06-05 | 海宁市瑞宏科技有限公司 | 一种高机电耦合系数的抗功率温补型声表面波滤波器结构 |
CN111085281B (zh) * | 2020-01-08 | 2021-05-14 | 西安交通大学 | 一种声表面波调控的高通量微液滴生成装置及方法 |
CN112436815B (zh) * | 2020-11-19 | 2024-03-15 | 广东广纳芯科技有限公司 | 温度补偿型声表面波器件及其制造方法 |
CN112436816B (zh) * | 2020-12-03 | 2024-04-09 | 广东广纳芯科技有限公司 | 温度补偿型声表面波器件及其制造方法 |
CN112653409B (zh) * | 2020-12-17 | 2024-04-12 | 广东广纳芯科技有限公司 | 一种用于制造金属电极的制造方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5248375U (ja) * | 1975-10-02 | 1977-04-06 | ||
JPH0983030A (ja) * | 1995-09-11 | 1997-03-28 | Matsushita Electric Ind Co Ltd | 弾性表面波素子及びその製造方法 |
JPH10178331A (ja) * | 1996-12-19 | 1998-06-30 | Matsushita Electric Ind Co Ltd | 弾性表面波素子 |
JP2002026685A (ja) * | 2000-07-07 | 2002-01-25 | Murata Mfg Co Ltd | 弾性表面波素子 |
WO2006011417A1 (ja) * | 2004-07-26 | 2006-02-02 | Murata Manufacturing Co., Ltd. | 弾性表面波装置 |
WO2008044411A1 (fr) * | 2006-10-12 | 2008-04-17 | Murata Manufacturing Co., Ltd. | Dispositif à ondes limites élastiques |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5664509A (en) | 1979-12-20 | 1981-06-01 | Kinseki Kk | Surface elastic wave element |
GB2206257B (en) * | 1987-05-26 | 1991-08-14 | Clarion Co Ltd | Surface acoustic wave device |
JPH10270974A (ja) * | 1997-03-25 | 1998-10-09 | Kenwood Corp | 表面弾性波素子 |
JP3379383B2 (ja) | 1997-05-29 | 2003-02-24 | セイコーエプソン株式会社 | 弾性表面波装置 |
DE19758198A1 (de) * | 1997-12-30 | 1999-08-19 | Siemens Ag | Oberflächenwellen-(SAW-)Bauelement auf auch pyroelektrischem Einkristall-Substrat |
JP3841053B2 (ja) * | 2002-07-24 | 2006-11-01 | 株式会社村田製作所 | 弾性表面波装置及びその製造方法 |
JP2005176152A (ja) * | 2003-12-15 | 2005-06-30 | Alps Electric Co Ltd | 弾性表面波素子及びその製造方法 |
CN1902817B (zh) * | 2004-01-13 | 2010-12-15 | 株式会社村田制作所 | 边界声波装置 |
JP4697232B2 (ja) * | 2006-01-11 | 2011-06-08 | 株式会社村田製作所 | 弾性表面波装置の製造方法及び弾性表面波装置 |
JPWO2007099742A1 (ja) * | 2006-03-02 | 2009-07-16 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
JP5104031B2 (ja) * | 2007-05-22 | 2012-12-19 | 株式会社村田製作所 | 弾性境界波装置及びその製造方法 |
-
2007
- 2007-06-11 CN CN2007800255193A patent/CN101485086B/zh active Active
- 2007-06-11 WO PCT/JP2007/061756 patent/WO2008004408A1/ja active Application Filing
- 2007-06-11 JP JP2008523630A patent/JP4760908B2/ja active Active
- 2007-06-11 DE DE200711001609 patent/DE112007001609B4/de active Active
-
2008
- 2008-12-22 US US12/341,259 patent/US7626313B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5248375U (ja) * | 1975-10-02 | 1977-04-06 | ||
JPH0983030A (ja) * | 1995-09-11 | 1997-03-28 | Matsushita Electric Ind Co Ltd | 弾性表面波素子及びその製造方法 |
JPH10178331A (ja) * | 1996-12-19 | 1998-06-30 | Matsushita Electric Ind Co Ltd | 弾性表面波素子 |
JP2002026685A (ja) * | 2000-07-07 | 2002-01-25 | Murata Mfg Co Ltd | 弾性表面波素子 |
WO2006011417A1 (ja) * | 2004-07-26 | 2006-02-02 | Murata Manufacturing Co., Ltd. | 弾性表面波装置 |
WO2008044411A1 (fr) * | 2006-10-12 | 2008-04-17 | Murata Manufacturing Co., Ltd. | Dispositif à ondes limites élastiques |
Also Published As
Publication number | Publication date |
---|---|
US7626313B2 (en) | 2009-12-01 |
WO2008004408A1 (fr) | 2008-01-10 |
JPWO2008004408A1 (ja) | 2009-12-03 |
DE112007001609B4 (de) | 2013-08-22 |
DE112007001609T5 (de) | 2009-04-30 |
US20090096320A1 (en) | 2009-04-16 |
CN101485086B (zh) | 2012-06-13 |
CN101485086A (zh) | 2009-07-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4760908B2 (ja) | 弾性表面波装置 | |
JP4793448B2 (ja) | 弾性境界波装置 | |
JP4483865B2 (ja) | 弾性表面波装置 | |
JP5089907B2 (ja) | 充填された凹部領域を用いた音響共振器の性能向上 | |
US8680744B2 (en) | Surface acoustic wave device | |
US8677582B2 (en) | Method for fabricating acoustic wave device | |
JP5187444B2 (ja) | 弾性表面波装置 | |
JP5137828B2 (ja) | 弾性表面波装置 | |
WO2009139108A1 (ja) | 弾性境界波装置 | |
CN107925396B (zh) | 弹性波装置 | |
JP5110091B2 (ja) | 弾性表面波装置 | |
JP5817928B2 (ja) | 弾性波装置 | |
JP2007235711A (ja) | 弾性表面波装置 | |
JP3780947B2 (ja) | 弾性表面波装置 | |
JPWO2009090715A1 (ja) | 弾性表面波装置 | |
JP2009194895A (ja) | 弾性表面波装置 | |
KR100839789B1 (ko) | 탄성 표면파 장치 | |
JPWO2018003657A1 (ja) | 弾性波装置 | |
JP2006094567A (ja) | 弾性表面波装置 | |
JPWO2009090713A1 (ja) | 弾性表面波装置 | |
JP2005039867A (ja) | 弾性表面波装置の製造方法 | |
JP2012065036A (ja) | 弾性境界波装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110125 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110323 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110510 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110523 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140617 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 4760908 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |