JPWO2007043521A1 - エンコーダ及びエンコーダ用受光装置 - Google Patents
エンコーダ及びエンコーダ用受光装置 Download PDFInfo
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- JPWO2007043521A1 JPWO2007043521A1 JP2006553382A JP2006553382A JPWO2007043521A1 JP WO2007043521 A1 JPWO2007043521 A1 JP WO2007043521A1 JP 2006553382 A JP2006553382 A JP 2006553382A JP 2006553382 A JP2006553382 A JP 2006553382A JP WO2007043521 A1 JPWO2007043521 A1 JP WO2007043521A1
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- 238000001514 detection method Methods 0.000 claims abstract description 33
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 230000031700 light absorption Effects 0.000 claims description 11
- 238000012937 correction Methods 0.000 abstract description 17
- 230000003287 optical effect Effects 0.000 description 19
- 239000010408 film Substances 0.000 description 18
- 238000012545 processing Methods 0.000 description 14
- 238000005259 measurement Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
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Abstract
Description
図1は、本発明の第1実施形態に係るエンコーダを示す斜視図である。図1に示すエンコーダ1は、いわゆるアブソリュート型のロータリエンコーダであり、例えば自動車のハンドルといった測定対象物(図示しない)の絶対角度を検出するデバイスである。このエンコーダ1は、測定対象物に連結される回転軸2と、この回転軸2に固定された歯車付き円板3とを備えている。歯車付き円板3は、測定対象物と連動する回転軸2の回転に伴って、矢印A方向に回転する。
続いて、本発明の第2実施形態に係るエンコーダについて説明する。図10に示すように、第2実施形態に係るエンコーダ30は、スケール板11に明部19及び暗部20を形成するにあたり、LED6から出射した被検出光を歯車付き回転板31の光反射部32で反射させる点で、被検出光を歯車付き回転板8の光透過部17から通過させる第1実施形態と異なっている。
続いて、本発明の第3実施形態に係るエンコーダについて説明する。
Claims (11)
- 回転体と、
前記回転体に対して被検出光を出射する光源装置と、
複数の受光素子が配列されたスケール、及び前記回転体を経由して前記受光素子に入射する前記被検出光の光強度に基づく出力信号を出力する出力部を有する受光装置とを備え、
前記受光素子は、環状の配列ラインに沿って前記スケールに配列され、
前記回転体は、前記スケールにおいて、前記配列ラインの互いに離間する一部を含む領域を前記被検出光が照射される明部とし、前記配列ラインの一部を除く他の部分を含む領域を前記被検出光が照射されない暗部とすることを特徴とするエンコーダ。 - 前記回転体には、一直線状の光透過部が形成されており、
前記明部は、前記光透過部を通過した前記被検出光によって形成されていることを特徴とする請求項1記載のエンコーダ。 - 前記光透過部は、一端側の幅と他端側の幅とが異なっていることを特徴とする請求項2記載のエンコーダ。
- 前記光透過部は、スリットであることを特徴とする請求項2記載のエンコーダ。
- 前記回転体には、一直線状の光反射部が形成されており、
前記明部は、前記光反射部で反射した前記被検出光によって形成されていることを特徴とする請求項1記載のエンコーダ。 - 前記光反射部は、一端側の幅と他端側の幅とが異なっていることを特徴とする請求項5記載のエンコーダ。
- 前記受光素子は、前記配列ラインに沿って千鳥状に配列されていることを特徴とする請求項1記載のエンコーダ。
- 前記スケールにおいて、前記受光素子が配列された領域を除く領域には、光吸収膜が形成されていることを特徴とする請求項1記載のエンコーダ。
- 複数の受光素子が配列されたスケールと、
前記受光素子に入射する被検出光の光強度に基づく出力信号を出力する出力部とを備え、
前記受光素子は、環状の配列ラインに沿って前記スケールに配列され、
前記スケールにおいて、前記受光素子が配列された領域を除いた領域には、光吸収膜が形成されていることを特徴とするエンコーダ用受光装置。 - 前記出力部は、前記光強度に基づく出力信号を前記受光素子から順次出力させるシフトレジスタを有し、
前記シフトレジスタは、前記配列ラインの内側に配置されていることを特徴とする請求項9記載のエンコーダ用受光装置。 - 前記受光素子は、前記配列ラインに沿って千鳥状に配列されていることを特徴とする請求項9記載のエンコーダ用受光装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006553382A JP5068542B2 (ja) | 2005-10-13 | 2006-10-10 | エンコーダ |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005299068 | 2005-10-13 | ||
JP2005299068 | 2005-10-13 | ||
PCT/JP2006/320204 WO2007043521A1 (ja) | 2005-10-13 | 2006-10-10 | エンコーダ及びエンコーダ用受光装置 |
JP2006553382A JP5068542B2 (ja) | 2005-10-13 | 2006-10-10 | エンコーダ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012123172A Division JP5335970B2 (ja) | 2005-10-13 | 2012-05-30 | エンコーダ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007043521A1 true JPWO2007043521A1 (ja) | 2009-04-16 |
JP5068542B2 JP5068542B2 (ja) | 2012-11-07 |
Family
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006553382A Active JP5068542B2 (ja) | 2005-10-13 | 2006-10-10 | エンコーダ |
JP2012123172A Active JP5335970B2 (ja) | 2005-10-13 | 2012-05-30 | エンコーダ |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012123172A Active JP5335970B2 (ja) | 2005-10-13 | 2012-05-30 | エンコーダ |
Country Status (6)
Country | Link |
---|---|
US (1) | US8044340B2 (ja) |
EP (1) | EP1936331A4 (ja) |
JP (2) | JP5068542B2 (ja) |
KR (1) | KR101240792B1 (ja) |
CN (1) | CN100578155C (ja) |
WO (1) | WO2007043521A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101240792B1 (ko) | 2005-10-13 | 2013-03-07 | 하마마츠 포토닉스 가부시키가이샤 | 엔코더 및 엔코더용 수광장치 |
JP4839933B2 (ja) * | 2006-04-10 | 2011-12-21 | パナソニック株式会社 | 回転角度検出装置 |
JP2008096205A (ja) * | 2006-10-10 | 2008-04-24 | Hamamatsu Photonics Kk | エンコーダ及びエンコーダ用受光装置 |
JP4945674B2 (ja) * | 2010-11-08 | 2012-06-06 | 株式会社安川電機 | 反射型エンコーダ、サーボモータ及びサーボユニット |
JP5950618B2 (ja) * | 2012-02-24 | 2016-07-13 | キヤノン株式会社 | 光透過部材の形成方法および撮像装置の製造方法 |
KR102043091B1 (ko) * | 2015-03-25 | 2019-12-02 | 쿠앙치 인텔리전트 포토닉 테크놀로지 리미티드 | 광신호 수신장치 |
JP2019158848A (ja) * | 2018-03-16 | 2019-09-19 | 富士電機株式会社 | 絶対位置情報検出装置、及び、絶対位置情報検出装置の制御方法 |
CN110160644B (zh) * | 2018-07-23 | 2024-06-18 | 苏州安必轩微电子技术有限公司 | 一种光电编码器实时光强检测装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60210718A (ja) * | 1984-04-04 | 1985-10-23 | Sumitomo Electric Ind Ltd | 光検出方式 |
JPS61169703A (ja) * | 1985-01-24 | 1986-07-31 | Nissan Motor Co Ltd | 位置検出装置 |
JPS61241621A (ja) * | 1985-04-19 | 1986-10-27 | Japan Aviation Electronics Ind Ltd | 光フアイバロ−タリエンコ−ダ |
JPH09196706A (ja) * | 1996-01-23 | 1997-07-31 | Mitsutoyo Corp | 光学式エンコーダ |
JPH11148844A (ja) * | 1997-11-14 | 1999-06-02 | Yaskawa Electric Corp | 光学式エンコーダおよび光学式エンコーダの固定側素子取り付け方法 |
JP2000146625A (ja) * | 1998-11-04 | 2000-05-26 | Fuji Electric Co Ltd | アブソリュートエンコーダ |
JP2005121612A (ja) * | 2003-10-20 | 2005-05-12 | Hamamatsu Photonics Kk | アブソリュートエンコーダ及び角度検出方法 |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2310549A1 (fr) * | 1975-05-07 | 1976-12-03 | Sagem | Perfectionnements aux dispositifs optiques de determination de la position d'un organe mobile |
US3983391A (en) * | 1975-05-21 | 1976-09-28 | Itek Corporation | Optical encoder of the reflective type |
DE3035012C2 (de) * | 1980-09-17 | 1982-08-12 | Fa. Carl Zeiss, 7920 Heidenheim | Einrichtung zur Winkelmessung |
US4644157A (en) * | 1982-03-08 | 1987-02-17 | Matsushita Electric Industrial Co., Ltd. | Optical rotation detecting apparatus |
JPH06100479B2 (ja) * | 1982-09-01 | 1994-12-12 | ローズマウント エンジニアリング コムパニー リミテッド | 位置測定装置 |
JPS6047917A (ja) | 1983-08-26 | 1985-03-15 | Fuji Electric Corp Res & Dev Ltd | 回転角度検出装置 |
US4587513A (en) * | 1984-06-25 | 1986-05-06 | Energy Innovations, Inc. | Noncontact shaft angle detector |
JPS6288917A (ja) * | 1985-10-16 | 1987-04-23 | Fuji Electric Co Ltd | 回転位置検出装置 |
AT385682B (de) | 1985-11-08 | 1988-05-10 | Voest Alpine Ag | Verfahren zum trennen von gasgemischen, sowie vorrichtung zur durchfuehrung dieses verfahrens |
US4827123A (en) * | 1986-04-11 | 1989-05-02 | Sangamo Weston, Inc. | Direction sensitive optical shaft encoder |
JPS636417A (ja) * | 1986-06-27 | 1988-01-12 | Fuji Electric Co Ltd | 回転位置検出装置 |
JPH01196514A (ja) | 1988-02-01 | 1989-08-08 | Fuji Electric Co Ltd | 光電変換式回転位置検出器 |
US4906992A (en) * | 1988-02-22 | 1990-03-06 | Dynamics Research Corporation | Single track absolute encoder |
US4947166A (en) * | 1988-02-22 | 1990-08-07 | Dynamics Research Corporation | Single track absolute encoder |
JP2586121B2 (ja) * | 1988-09-30 | 1997-02-26 | キヤノン株式会社 | ロータリーエンコーダの原点検出系 |
US5274476A (en) * | 1991-08-14 | 1993-12-28 | Gold Star Electron Co., Ltd. | CCD image sensor with photodiodes in a zig-zag pattern and particular transfer gate electrodes formed over channel stop regions and VCCD regions |
JPH0810145A (ja) | 1994-06-28 | 1996-01-16 | Matsushita Electric Ind Co Ltd | 炊飯器 |
US5642297A (en) * | 1994-12-12 | 1997-06-24 | Gurley Precision Instruments, Inc. | Apparatus and method for measuring the kinematic accuracy in machines and mechanisms using absolute encoders |
US5640007A (en) * | 1995-06-21 | 1997-06-17 | Limitorque Corporation | Optical encoder comprising a plurality of encoder wheels |
JP3684281B2 (ja) * | 1996-10-18 | 2005-08-17 | 日本電産コパル株式会社 | 光学式エンコーダ |
US6127676A (en) * | 1998-02-20 | 2000-10-03 | Tseng; Hsin Te | Photo sensing device with means to eliminate light beam interference |
JP2002139353A (ja) | 2000-11-06 | 2002-05-17 | Olympus Optical Co Ltd | 光学式ロータリエンコーダ |
US6713756B2 (en) * | 2000-05-09 | 2004-03-30 | Olympus Corporation | Optical encoder and optical rotary encoder |
JP4981203B2 (ja) | 2000-08-01 | 2012-07-18 | オリンパス株式会社 | 光学式エンコーダー |
JP3737037B2 (ja) * | 2001-05-31 | 2006-01-18 | ニスカ株式会社 | 印刷装置 |
JP2003315101A (ja) | 2002-04-22 | 2003-11-06 | Olympus Optical Co Ltd | 光学式エンコーダ |
WO2004059346A2 (en) * | 2002-12-16 | 2004-07-15 | Microe Systems Corp. | Rotary position sensor with offset beam generating element and elliptical detector array |
DE10308440A1 (de) * | 2003-02-27 | 2004-09-16 | Stegmann Gmbh & Co. Kg | Vorrichtung zum Messen des Drehwinkels |
JP4307895B2 (ja) | 2003-04-17 | 2009-08-05 | 三洋電機株式会社 | 光エンコーダ |
US7265336B2 (en) * | 2003-12-01 | 2007-09-04 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Encoder utilizing a reflective cylindrical surface |
JP2006119082A (ja) | 2004-10-25 | 2006-05-11 | Hitachi Cable Ltd | 操舵角検出装置 |
KR101240792B1 (ko) | 2005-10-13 | 2013-03-07 | 하마마츠 포토닉스 가부시키가이샤 | 엔코더 및 엔코더용 수광장치 |
US7784694B2 (en) * | 2005-11-21 | 2010-08-31 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Reflective encoder with lens on code strip |
JP4890190B2 (ja) * | 2006-10-10 | 2012-03-07 | 浜松ホトニクス株式会社 | エンコーダ |
JP2008096205A (ja) * | 2006-10-10 | 2008-04-24 | Hamamatsu Photonics Kk | エンコーダ及びエンコーダ用受光装置 |
US7608813B1 (en) * | 2008-11-18 | 2009-10-27 | Mitutoyo Corporation | Scale track configuration for absolute optical encoder including a detector electronics with plurality of track detector portions |
-
2006
- 2006-10-10 KR KR1020077020404A patent/KR101240792B1/ko active IP Right Grant
- 2006-10-10 JP JP2006553382A patent/JP5068542B2/ja active Active
- 2006-10-10 US US11/883,070 patent/US8044340B2/en active Active
- 2006-10-10 CN CN200680015493A patent/CN100578155C/zh active Active
- 2006-10-10 EP EP06811517.9A patent/EP1936331A4/en not_active Withdrawn
- 2006-10-10 WO PCT/JP2006/320204 patent/WO2007043521A1/ja active Application Filing
-
2012
- 2012-05-30 JP JP2012123172A patent/JP5335970B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60210718A (ja) * | 1984-04-04 | 1985-10-23 | Sumitomo Electric Ind Ltd | 光検出方式 |
JPS61169703A (ja) * | 1985-01-24 | 1986-07-31 | Nissan Motor Co Ltd | 位置検出装置 |
JPS61241621A (ja) * | 1985-04-19 | 1986-10-27 | Japan Aviation Electronics Ind Ltd | 光フアイバロ−タリエンコ−ダ |
JPH09196706A (ja) * | 1996-01-23 | 1997-07-31 | Mitsutoyo Corp | 光学式エンコーダ |
JPH11148844A (ja) * | 1997-11-14 | 1999-06-02 | Yaskawa Electric Corp | 光学式エンコーダおよび光学式エンコーダの固定側素子取り付け方法 |
JP2000146625A (ja) * | 1998-11-04 | 2000-05-26 | Fuji Electric Co Ltd | アブソリュートエンコーダ |
JP2005121612A (ja) * | 2003-10-20 | 2005-05-12 | Hamamatsu Photonics Kk | アブソリュートエンコーダ及び角度検出方法 |
Also Published As
Publication number | Publication date |
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KR20080056111A (ko) | 2008-06-20 |
CN101171498A (zh) | 2008-04-30 |
JP5068542B2 (ja) | 2012-11-07 |
EP1936331A1 (en) | 2008-06-25 |
CN100578155C (zh) | 2010-01-06 |
KR101240792B1 (ko) | 2013-03-07 |
US20080185505A1 (en) | 2008-08-07 |
EP1936331A4 (en) | 2015-12-09 |
JP5335970B2 (ja) | 2013-11-06 |
JP2012185175A (ja) | 2012-09-27 |
WO2007043521A1 (ja) | 2007-04-19 |
US8044340B2 (en) | 2011-10-25 |
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