JPS6455376A - Crucible for vapor deposition - Google Patents

Crucible for vapor deposition

Info

Publication number
JPS6455376A
JPS6455376A JP21100687A JP21100687A JPS6455376A JP S6455376 A JPS6455376 A JP S6455376A JP 21100687 A JP21100687 A JP 21100687A JP 21100687 A JP21100687 A JP 21100687A JP S6455376 A JPS6455376 A JP S6455376A
Authority
JP
Japan
Prior art keywords
crucible
recess
evaporated
central part
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21100687A
Other languages
Japanese (ja)
Inventor
Akira Nishiwaki
Yasuo Morohoshi
Toshihiko Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP21100687A priority Critical patent/JPS6455376A/en
Publication of JPS6455376A publication Critical patent/JPS6455376A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To attain uniform evaporation and to make the thickness of a formed film uniform by forming the bottom of the recess of a crucible so as to gradually shallow the recess from the central part of the crucible toward both ends. CONSTITUTION:When a material to be evaporated is put in the recess 18 of a crucible 11 for vapor deposition, the bottom of the recess 18 is formed so as to gradually and linearly shallow the recess 18 from the central part of the crucible toward both ends of the crucible in the longitudinal direction. Since the amt. of the material to be evaporated in the crucible 11 is reduced at both ends of the crucible in the longitudinal direction, the material can be sufficiently heated. The amt. of the material evaporated from both ends can be made nearly equal to that evaporated from the central part and the thickness of a formed film can be made uniform over the entire region in the transverse direction.
JP21100687A 1987-08-25 1987-08-25 Crucible for vapor deposition Pending JPS6455376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21100687A JPS6455376A (en) 1987-08-25 1987-08-25 Crucible for vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21100687A JPS6455376A (en) 1987-08-25 1987-08-25 Crucible for vapor deposition

Publications (1)

Publication Number Publication Date
JPS6455376A true JPS6455376A (en) 1989-03-02

Family

ID=16598768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21100687A Pending JPS6455376A (en) 1987-08-25 1987-08-25 Crucible for vapor deposition

Country Status (1)

Country Link
JP (1) JPS6455376A (en)

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