JPS5433878A - Resistance heater and method of treating the same - Google Patents

Resistance heater and method of treating the same

Info

Publication number
JPS5433878A
JPS5433878A JP10026077A JP10026077A JPS5433878A JP S5433878 A JPS5433878 A JP S5433878A JP 10026077 A JP10026077 A JP 10026077A JP 10026077 A JP10026077 A JP 10026077A JP S5433878 A JPS5433878 A JP S5433878A
Authority
JP
Japan
Prior art keywords
resistance heater
treating
same
boat
evaporating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10026077A
Other languages
Japanese (ja)
Inventor
Akio Mikogami
Hiroshi Oizumi
Hiroaki Tanji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP10026077A priority Critical patent/JPS5433878A/en
Publication of JPS5433878A publication Critical patent/JPS5433878A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To provide the subject method which uses a vacuum evaporating resistance heater made of electroconductive ceramics whose cavity bottom surface of a boat is made coarse, whereby wetting betwene the material to be evaporated and the boat is improved and the evaporating quantity is increased.
JP10026077A 1977-08-22 1977-08-22 Resistance heater and method of treating the same Pending JPS5433878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10026077A JPS5433878A (en) 1977-08-22 1977-08-22 Resistance heater and method of treating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10026077A JPS5433878A (en) 1977-08-22 1977-08-22 Resistance heater and method of treating the same

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP11226584A Division JPS6086270A (en) 1984-06-01 1984-06-01 Preparation of resistance heater
JP19228284A Division JPS6086268A (en) 1984-09-13 1984-09-13 Continuous vapor deposition of al
JP7340285A Division JPS61575A (en) 1985-04-06 1985-04-06 Continuous vapor deposition method of aluminum

Publications (1)

Publication Number Publication Date
JPS5433878A true JPS5433878A (en) 1979-03-12

Family

ID=14269232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10026077A Pending JPS5433878A (en) 1977-08-22 1977-08-22 Resistance heater and method of treating the same

Country Status (1)

Country Link
JP (1) JPS5433878A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086268A (en) * 1984-09-13 1985-05-15 Denki Kagaku Kogyo Kk Continuous vapor deposition of al
JPS61575A (en) * 1985-04-06 1986-01-06 Denki Kagaku Kogyo Kk Continuous vapor deposition method of aluminum

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086268A (en) * 1984-09-13 1985-05-15 Denki Kagaku Kogyo Kk Continuous vapor deposition of al
JPS61575A (en) * 1985-04-06 1986-01-06 Denki Kagaku Kogyo Kk Continuous vapor deposition method of aluminum

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