GB1215905A - Improvements in and relating to the evaporation of substances in vacuo - Google Patents

Improvements in and relating to the evaporation of substances in vacuo

Info

Publication number
GB1215905A
GB1215905A GB2881569A GB2881569A GB1215905A GB 1215905 A GB1215905 A GB 1215905A GB 2881569 A GB2881569 A GB 2881569A GB 2881569 A GB2881569 A GB 2881569A GB 1215905 A GB1215905 A GB 1215905A
Authority
GB
United Kingdom
Prior art keywords
evaporation
substances
carbide
boat
vacuo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2881569A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of GB1215905A publication Critical patent/GB1215905A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Abstract

1,215,905. Crucibles. BALZERS PATENTUND BETEILIGUNGS A.G. 6 June, 1969 [29 July, 1968], No. 28815/69. Heading F4B. [Also in Division C7] A base for the evaporation of substances, e.g. an evaporator boat, comprises a body of pyrolytic graphite which has a dense carbide coating on the portion which on subsequent use as an evaporator comes into contact with the substance to be evaporated. A dense coating of Zr carbide or Hf carbide may be applied to an evaporator boat of pyrolytic graphite by fusion of an appropriate amount of Zr or Hf therein, and the boat so formed may be used for the evaporation of Ni or Si.
GB2881569A 1968-07-29 1969-06-06 Improvements in and relating to the evaporation of substances in vacuo Expired GB1215905A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1144468A CH495432A (en) 1968-07-29 1968-07-29 Process for the production of a support for the evaporation of substances

Publications (1)

Publication Number Publication Date
GB1215905A true GB1215905A (en) 1970-12-16

Family

ID=4373551

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2881569A Expired GB1215905A (en) 1968-07-29 1969-06-06 Improvements in and relating to the evaporation of substances in vacuo

Country Status (6)

Country Link
AT (1) AT287429B (en)
CH (1) CH495432A (en)
DE (1) DE1928348A1 (en)
FR (1) FR2016830B1 (en)
GB (1) GB1215905A (en)
NL (1) NL6812072A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118941A (en) * 1974-08-08 1976-02-14 Denki Kagaku Kogyo Kk KINZOKUJOHATSUYOYOKI

Also Published As

Publication number Publication date
FR2016830B1 (en) 1973-03-16
NL6812072A (en) 1970-02-02
CH495432A (en) 1970-08-31
FR2016830A1 (en) 1970-05-15
DE1928348A1 (en) 1970-02-12
AT287429B (en) 1971-01-25

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