JPS53100936A - Vacuum evaporating method - Google Patents

Vacuum evaporating method

Info

Publication number
JPS53100936A
JPS53100936A JP1530177A JP1530177A JPS53100936A JP S53100936 A JPS53100936 A JP S53100936A JP 1530177 A JP1530177 A JP 1530177A JP 1530177 A JP1530177 A JP 1530177A JP S53100936 A JPS53100936 A JP S53100936A
Authority
JP
Japan
Prior art keywords
vacuum evaporating
evaporating method
cooling
evaporating
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1530177A
Other languages
Japanese (ja)
Other versions
JPS5932543B2 (en
Inventor
Daizo Yamazaki
Tetsuyoshi Wada
Shigeo Itano
Heizaburo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP1530177A priority Critical patent/JPS5932543B2/en
Publication of JPS53100936A publication Critical patent/JPS53100936A/en
Publication of JPS5932543B2 publication Critical patent/JPS5932543B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To prevent the reevaporation of evaporated metal, by cooling with cooling body, provided facing against the opposite face of evaporating face, at the time of continuously evaporating low melting point metal under vacuum on a continuous length, such as hoop etc.
JP1530177A 1977-02-15 1977-02-15 Vacuum deposition method Expired JPS5932543B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1530177A JPS5932543B2 (en) 1977-02-15 1977-02-15 Vacuum deposition method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1530177A JPS5932543B2 (en) 1977-02-15 1977-02-15 Vacuum deposition method

Publications (2)

Publication Number Publication Date
JPS53100936A true JPS53100936A (en) 1978-09-02
JPS5932543B2 JPS5932543B2 (en) 1984-08-09

Family

ID=11884980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1530177A Expired JPS5932543B2 (en) 1977-02-15 1977-02-15 Vacuum deposition method

Country Status (1)

Country Link
JP (1) JPS5932543B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100460554C (en) * 2004-09-14 2009-02-11 东芝松下显示技术有限公司 Method and apparatus for manufacturing display
JP2010089413A (en) * 2008-10-09 2010-04-22 Sumitomo Metal Mining Co Ltd Method and device for treating long resin film
JP2011020345A (en) * 2009-07-15 2011-02-03 Sumitomo Metal Mining Co Ltd Device for treating continuous length resin film, roll cooler, roll cooling method and method for cooling continuous length resin film and roll
EP2420588A1 (en) * 2010-08-16 2012-02-22 Applied Materials, Inc. Thermal management of film deposition processes

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100460554C (en) * 2004-09-14 2009-02-11 东芝松下显示技术有限公司 Method and apparatus for manufacturing display
JP2010089413A (en) * 2008-10-09 2010-04-22 Sumitomo Metal Mining Co Ltd Method and device for treating long resin film
JP2011020345A (en) * 2009-07-15 2011-02-03 Sumitomo Metal Mining Co Ltd Device for treating continuous length resin film, roll cooler, roll cooling method and method for cooling continuous length resin film and roll
EP2420588A1 (en) * 2010-08-16 2012-02-22 Applied Materials, Inc. Thermal management of film deposition processes
US8709158B2 (en) 2010-08-16 2014-04-29 Applied Materials, Inc. Thermal management of film deposition processes

Also Published As

Publication number Publication date
JPS5932543B2 (en) 1984-08-09

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