JPS546875A - Vacuum deposition method - Google Patents

Vacuum deposition method

Info

Publication number
JPS546875A
JPS546875A JP7244377A JP7244377A JPS546875A JP S546875 A JPS546875 A JP S546875A JP 7244377 A JP7244377 A JP 7244377A JP 7244377 A JP7244377 A JP 7244377A JP S546875 A JPS546875 A JP S546875A
Authority
JP
Japan
Prior art keywords
vacuum deposition
vapor pressure
deposition method
high vapor
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7244377A
Other languages
Japanese (ja)
Inventor
Yoshinari Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7244377A priority Critical patent/JPS546875A/en
Publication of JPS546875A publication Critical patent/JPS546875A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve the controlling property of evaporating speed and quantity against the element having a high vapor pressure, by carrying out vacuum deposition making the alloy as evaporation source, composed of the element having a high vapor pressure and that of having a vapor pressure lower than the above element at evaporation temperature.
JP7244377A 1977-06-17 1977-06-17 Vacuum deposition method Pending JPS546875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7244377A JPS546875A (en) 1977-06-17 1977-06-17 Vacuum deposition method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7244377A JPS546875A (en) 1977-06-17 1977-06-17 Vacuum deposition method

Publications (1)

Publication Number Publication Date
JPS546875A true JPS546875A (en) 1979-01-19

Family

ID=13489426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7244377A Pending JPS546875A (en) 1977-06-17 1977-06-17 Vacuum deposition method

Country Status (1)

Country Link
JP (1) JPS546875A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4621032A (en) * 1985-07-29 1986-11-04 Energy Conversion Devices, Inc. Method of forming a data storage medium and data storage device by congruent sublimation
WO2016171247A1 (en) * 2015-04-22 2016-10-27 東洋炭素株式会社 Carbon evaporation source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4621032A (en) * 1985-07-29 1986-11-04 Energy Conversion Devices, Inc. Method of forming a data storage medium and data storage device by congruent sublimation
WO2016171247A1 (en) * 2015-04-22 2016-10-27 東洋炭素株式会社 Carbon evaporation source

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