JPS5286062A - Formation of alloy film by vacuum deposition - Google Patents

Formation of alloy film by vacuum deposition

Info

Publication number
JPS5286062A
JPS5286062A JP205876A JP205876A JPS5286062A JP S5286062 A JPS5286062 A JP S5286062A JP 205876 A JP205876 A JP 205876A JP 205876 A JP205876 A JP 205876A JP S5286062 A JPS5286062 A JP S5286062A
Authority
JP
Japan
Prior art keywords
alloy film
formation
vacuum deposition
chemical composition
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP205876A
Other languages
Japanese (ja)
Inventor
Hirobumi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP205876A priority Critical patent/JPS5286062A/en
Publication of JPS5286062A publication Critical patent/JPS5286062A/en
Pending legal-status Critical Current

Links

Landscapes

  • Conductive Materials (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To control chemical composition of vapor phase deposited alloy film.
COPYRIGHT: (C)1977,JPO&Japio
JP205876A 1976-01-12 1976-01-12 Formation of alloy film by vacuum deposition Pending JPS5286062A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP205876A JPS5286062A (en) 1976-01-12 1976-01-12 Formation of alloy film by vacuum deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP205876A JPS5286062A (en) 1976-01-12 1976-01-12 Formation of alloy film by vacuum deposition

Publications (1)

Publication Number Publication Date
JPS5286062A true JPS5286062A (en) 1977-07-16

Family

ID=11518726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP205876A Pending JPS5286062A (en) 1976-01-12 1976-01-12 Formation of alloy film by vacuum deposition

Country Status (1)

Country Link
JP (1) JPS5286062A (en)

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