JPS53129180A - Vacuum evaporating method - Google Patents

Vacuum evaporating method

Info

Publication number
JPS53129180A
JPS53129180A JP4414377A JP4414377A JPS53129180A JP S53129180 A JPS53129180 A JP S53129180A JP 4414377 A JP4414377 A JP 4414377A JP 4414377 A JP4414377 A JP 4414377A JP S53129180 A JPS53129180 A JP S53129180A
Authority
JP
Japan
Prior art keywords
heating
vacuum evaporating
evaporating method
vaporized
vacuo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4414377A
Other languages
Japanese (ja)
Other versions
JPS6013063B2 (en
Inventor
Masato Sugiyama
Yuji Mitani
Hitoshi Mikoshiba
Kunihiko Teranishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>
Teijin Ltd
Original Assignee
JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>, Teijin Ltd filed Critical JAPAN ELECTRONIC IND DEV ASSOC<JEIDA>
Priority to JP4414377A priority Critical patent/JPS6013063B2/en
Publication of JPS53129180A publication Critical patent/JPS53129180A/en
Publication of JPS6013063B2 publication Critical patent/JPS6013063B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides

Abstract

PURPOSE:To carry out the evaporation by heating each of the particles of the substance to be vaporized to a sufficiently high temperature and making the vaporizing rate sufficiently large, by heating the crucible filled with the metal compound of high melting point having the grain size existing mainly in the range of 1-10 mm in vacuo.
JP4414377A 1977-04-19 1977-04-19 Vacuum deposition method Expired JPS6013063B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4414377A JPS6013063B2 (en) 1977-04-19 1977-04-19 Vacuum deposition method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4414377A JPS6013063B2 (en) 1977-04-19 1977-04-19 Vacuum deposition method

Publications (2)

Publication Number Publication Date
JPS53129180A true JPS53129180A (en) 1978-11-10
JPS6013063B2 JPS6013063B2 (en) 1985-04-04

Family

ID=12683407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4414377A Expired JPS6013063B2 (en) 1977-04-19 1977-04-19 Vacuum deposition method

Country Status (1)

Country Link
JP (1) JPS6013063B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242771A (en) * 1988-03-23 1989-09-27 Ishikawajima Harima Heavy Ind Co Ltd Vapor deposition material

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0448563U (en) * 1990-08-31 1992-04-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242771A (en) * 1988-03-23 1989-09-27 Ishikawajima Harima Heavy Ind Co Ltd Vapor deposition material

Also Published As

Publication number Publication date
JPS6013063B2 (en) 1985-04-04

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