JPS5315273A - Forming method for transparent thin film of oxide - Google Patents
Forming method for transparent thin film of oxideInfo
- Publication number
- JPS5315273A JPS5315273A JP8966576A JP8966576A JPS5315273A JP S5315273 A JPS5315273 A JP S5315273A JP 8966576 A JP8966576 A JP 8966576A JP 8966576 A JP8966576 A JP 8966576A JP S5315273 A JPS5315273 A JP S5315273A
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- thin film
- forming method
- transparent thin
- evaporated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To form the film of thickness above 500Angstrom without exposing the object to be evaporated to a high temperature and also without receiving the impact of electrons and ions, by holding the pressure of O2 in the vacuum tank within the specified range and evaporating Al, Mg, In or rare earth metals on the object to be evaporated while controlling the vaporization rate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8966576A JPS5315273A (en) | 1976-07-29 | 1976-07-29 | Forming method for transparent thin film of oxide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8966576A JPS5315273A (en) | 1976-07-29 | 1976-07-29 | Forming method for transparent thin film of oxide |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5315273A true JPS5315273A (en) | 1978-02-10 |
Family
ID=13977030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8966576A Pending JPS5315273A (en) | 1976-07-29 | 1976-07-29 | Forming method for transparent thin film of oxide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5315273A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4408563A (en) * | 1978-08-09 | 1983-10-11 | Leybold-Heraeus Gmbh | Apparatus for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition |
US4438701A (en) * | 1981-02-20 | 1984-03-27 | Tsubakimoto Chain Company | Truck conveyor |
US4440090A (en) * | 1981-02-20 | 1984-04-03 | Tsubakimoto Chain Company | Storage arrangement for truck conveyor trolleys |
JPS62103359A (en) * | 1985-10-29 | 1987-05-13 | Toyo Metaraijingu Kk | Manufacture of transparent film of interrupting gas |
US5264394A (en) * | 1991-05-22 | 1993-11-23 | Associated Universities, Inc. | Method for producing high quality oxide films on substrates |
JPH0645933U (en) * | 1992-11-25 | 1994-06-24 | 三菱重工業株式会社 | Transport line |
-
1976
- 1976-07-29 JP JP8966576A patent/JPS5315273A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4408563A (en) * | 1978-08-09 | 1983-10-11 | Leybold-Heraeus Gmbh | Apparatus for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition |
US4438701A (en) * | 1981-02-20 | 1984-03-27 | Tsubakimoto Chain Company | Truck conveyor |
US4440090A (en) * | 1981-02-20 | 1984-04-03 | Tsubakimoto Chain Company | Storage arrangement for truck conveyor trolleys |
JPS62103359A (en) * | 1985-10-29 | 1987-05-13 | Toyo Metaraijingu Kk | Manufacture of transparent film of interrupting gas |
US5264394A (en) * | 1991-05-22 | 1993-11-23 | Associated Universities, Inc. | Method for producing high quality oxide films on substrates |
US5282903A (en) * | 1991-05-22 | 1994-02-01 | Associated Universities, Inc. | High quality oxide films on substrates |
JPH0645933U (en) * | 1992-11-25 | 1994-06-24 | 三菱重工業株式会社 | Transport line |
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