JPS5386686A - Vacuum evaporating apparatus - Google Patents

Vacuum evaporating apparatus

Info

Publication number
JPS5386686A
JPS5386686A JP166377A JP166377A JPS5386686A JP S5386686 A JPS5386686 A JP S5386686A JP 166377 A JP166377 A JP 166377A JP 166377 A JP166377 A JP 166377A JP S5386686 A JPS5386686 A JP S5386686A
Authority
JP
Japan
Prior art keywords
vacuum evaporating
evaporating apparatus
metal
vaporized
interminglement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP166377A
Other languages
Japanese (ja)
Inventor
Takashi Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP166377A priority Critical patent/JPS5386686A/en
Publication of JPS5386686A publication Critical patent/JPS5386686A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To achieve the rise of the evaporation effect and the prevention of the interminglement of impurities into the evaporated metal, by constituting the surface of the hearth for arranging the metal to be vaporized and for vaporizing it by heating with the same material as the metal to be vaporized.
JP166377A 1977-01-10 1977-01-10 Vacuum evaporating apparatus Pending JPS5386686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP166377A JPS5386686A (en) 1977-01-10 1977-01-10 Vacuum evaporating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP166377A JPS5386686A (en) 1977-01-10 1977-01-10 Vacuum evaporating apparatus

Publications (1)

Publication Number Publication Date
JPS5386686A true JPS5386686A (en) 1978-07-31

Family

ID=11507751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP166377A Pending JPS5386686A (en) 1977-01-10 1977-01-10 Vacuum evaporating apparatus

Country Status (1)

Country Link
JP (1) JPS5386686A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033349A (en) * 1983-08-04 1985-02-20 Fujitsu Ltd Vacuum vapor deposition apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033349A (en) * 1983-08-04 1985-02-20 Fujitsu Ltd Vacuum vapor deposition apparatus

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