JPS545880A - Electron beam evaporating device - Google Patents

Electron beam evaporating device

Info

Publication number
JPS545880A
JPS545880A JP7109977A JP7109977A JPS545880A JP S545880 A JPS545880 A JP S545880A JP 7109977 A JP7109977 A JP 7109977A JP 7109977 A JP7109977 A JP 7109977A JP S545880 A JPS545880 A JP S545880A
Authority
JP
Japan
Prior art keywords
electron beam
evaporating device
evaporated
beam evaporating
vaporize
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7109977A
Other languages
Japanese (ja)
Inventor
Akihiro Tomosawa
Masachika Narushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7109977A priority Critical patent/JPS545880A/en
Publication of JPS545880A publication Critical patent/JPS545880A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To provide the subject device wherein an electron beam is acted on a material to be evaporated to heat, melt and vaporize the same to evaporate the material on an evaporation base plate, a crucible made of electroconductive composite ceramics is used for improving thermal efficiency and preventing charge up and contamination of the material to be evaporated.
JP7109977A 1977-06-17 1977-06-17 Electron beam evaporating device Pending JPS545880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7109977A JPS545880A (en) 1977-06-17 1977-06-17 Electron beam evaporating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7109977A JPS545880A (en) 1977-06-17 1977-06-17 Electron beam evaporating device

Publications (1)

Publication Number Publication Date
JPS545880A true JPS545880A (en) 1979-01-17

Family

ID=13450745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7109977A Pending JPS545880A (en) 1977-06-17 1977-06-17 Electron beam evaporating device

Country Status (1)

Country Link
JP (1) JPS545880A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586972A (en) * 1981-07-02 1983-01-14 Nec Corp Hearth liner for vacuum deposition by electron beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586972A (en) * 1981-07-02 1983-01-14 Nec Corp Hearth liner for vacuum deposition by electron beam

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