JPS52102681A - Boat for evaporation by resistance heating - Google Patents

Boat for evaporation by resistance heating

Info

Publication number
JPS52102681A
JPS52102681A JP1895976A JP1895976A JPS52102681A JP S52102681 A JPS52102681 A JP S52102681A JP 1895976 A JP1895976 A JP 1895976A JP 1895976 A JP1895976 A JP 1895976A JP S52102681 A JPS52102681 A JP S52102681A
Authority
JP
Japan
Prior art keywords
boat
evaporation
resistance heating
cavity
evaporating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1895976A
Other languages
Japanese (ja)
Other versions
JPS59590B2 (en
Inventor
Yasumitsu Hori
Takao Nagasaki
Akihiro Tomosawa
Noriyuki Nakamura
Masachika Narushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1895976A priority Critical patent/JPS59590B2/en
Publication of JPS52102681A publication Critical patent/JPS52102681A/en
Publication of JPS59590B2 publication Critical patent/JPS59590B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent creeping of evaporating metal from a cavity of a boat for evaporation by resistance heating, by forming a portion having small cross sectional area at both ends of the cavity containing evaporating material, so as to increase electric resistance.
COPYRIGHT: (C)1977,JPO&Japio
JP1895976A 1976-02-25 1976-02-25 Boat for resistance heating evaporation Expired JPS59590B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1895976A JPS59590B2 (en) 1976-02-25 1976-02-25 Boat for resistance heating evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1895976A JPS59590B2 (en) 1976-02-25 1976-02-25 Boat for resistance heating evaporation

Publications (2)

Publication Number Publication Date
JPS52102681A true JPS52102681A (en) 1977-08-29
JPS59590B2 JPS59590B2 (en) 1984-01-07

Family

ID=11986174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1895976A Expired JPS59590B2 (en) 1976-02-25 1976-02-25 Boat for resistance heating evaporation

Country Status (1)

Country Link
JP (1) JPS59590B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004057052A1 (en) * 2002-12-23 2004-07-08 Research Institute Of Industrial Science & Technology Resistance-heated boat and manufacturing method thereof
CN110629168A (en) * 2019-10-30 2019-12-31 东北大学 Evaporation device of vacuum coating machine

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004057052A1 (en) * 2002-12-23 2004-07-08 Research Institute Of Industrial Science & Technology Resistance-heated boat and manufacturing method thereof
GB2411408A (en) * 2002-12-23 2005-08-31 Res Inst Ind Science & Tech Resistance-heated boat and manufacturing method thereof
GB2411408B (en) * 2002-12-23 2006-03-15 Res Inst Ind Science & Tech Resistance-heated boat and manufacturing method thereof
CN110629168A (en) * 2019-10-30 2019-12-31 东北大学 Evaporation device of vacuum coating machine

Also Published As

Publication number Publication date
JPS59590B2 (en) 1984-01-07

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