JPS52102681A - Boat for evaporation by resistance heating - Google Patents
Boat for evaporation by resistance heatingInfo
- Publication number
- JPS52102681A JPS52102681A JP1895976A JP1895976A JPS52102681A JP S52102681 A JPS52102681 A JP S52102681A JP 1895976 A JP1895976 A JP 1895976A JP 1895976 A JP1895976 A JP 1895976A JP S52102681 A JPS52102681 A JP S52102681A
- Authority
- JP
- Japan
- Prior art keywords
- boat
- evaporation
- resistance heating
- cavity
- evaporating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent creeping of evaporating metal from a cavity of a boat for evaporation by resistance heating, by forming a portion having small cross sectional area at both ends of the cavity containing evaporating material, so as to increase electric resistance.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1895976A JPS59590B2 (en) | 1976-02-25 | 1976-02-25 | Boat for resistance heating evaporation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1895976A JPS59590B2 (en) | 1976-02-25 | 1976-02-25 | Boat for resistance heating evaporation |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52102681A true JPS52102681A (en) | 1977-08-29 |
JPS59590B2 JPS59590B2 (en) | 1984-01-07 |
Family
ID=11986174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1895976A Expired JPS59590B2 (en) | 1976-02-25 | 1976-02-25 | Boat for resistance heating evaporation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59590B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004057052A1 (en) * | 2002-12-23 | 2004-07-08 | Research Institute Of Industrial Science & Technology | Resistance-heated boat and manufacturing method thereof |
CN110629168A (en) * | 2019-10-30 | 2019-12-31 | 东北大学 | Evaporation device of vacuum coating machine |
-
1976
- 1976-02-25 JP JP1895976A patent/JPS59590B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004057052A1 (en) * | 2002-12-23 | 2004-07-08 | Research Institute Of Industrial Science & Technology | Resistance-heated boat and manufacturing method thereof |
GB2411408A (en) * | 2002-12-23 | 2005-08-31 | Res Inst Ind Science & Tech | Resistance-heated boat and manufacturing method thereof |
GB2411408B (en) * | 2002-12-23 | 2006-03-15 | Res Inst Ind Science & Tech | Resistance-heated boat and manufacturing method thereof |
CN110629168A (en) * | 2019-10-30 | 2019-12-31 | 东北大学 | Evaporation device of vacuum coating machine |
Also Published As
Publication number | Publication date |
---|---|
JPS59590B2 (en) | 1984-01-07 |
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