JPS5351186A - Evaporation boat - Google Patents

Evaporation boat

Info

Publication number
JPS5351186A
JPS5351186A JP12603976A JP12603976A JPS5351186A JP S5351186 A JPS5351186 A JP S5351186A JP 12603976 A JP12603976 A JP 12603976A JP 12603976 A JP12603976 A JP 12603976A JP S5351186 A JPS5351186 A JP S5351186A
Authority
JP
Japan
Prior art keywords
evaporation boat
evaporated film
boat
evaporation
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12603976A
Other languages
Japanese (ja)
Inventor
Saburo Adaka
Tadaaki Hirai
Kiyohisa Inao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Denshi KK
Hitachi Ltd
Original Assignee
Hitachi Denshi KK
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Denshi KK, Hitachi Ltd filed Critical Hitachi Denshi KK
Priority to JP12603976A priority Critical patent/JPS5351186A/en
Publication of JPS5351186A publication Critical patent/JPS5351186A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To facilitate the evaporation without the interminglement of Ir in the evaporated film, by forming the surface of the boat for preparing the evaporated film of the high melting point materials such as oxides, sulfides, fluorides, etc. or the highly reactive materials such as Te, S, Se, etc. with Ir.
JP12603976A 1976-10-22 1976-10-22 Evaporation boat Pending JPS5351186A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12603976A JPS5351186A (en) 1976-10-22 1976-10-22 Evaporation boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12603976A JPS5351186A (en) 1976-10-22 1976-10-22 Evaporation boat

Publications (1)

Publication Number Publication Date
JPS5351186A true JPS5351186A (en) 1978-05-10

Family

ID=14925142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12603976A Pending JPS5351186A (en) 1976-10-22 1976-10-22 Evaporation boat

Country Status (1)

Country Link
JP (1) JPS5351186A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59203713A (en) * 1983-04-30 1984-11-17 Matsushita Electric Ind Co Ltd Formation of lead telluride thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59203713A (en) * 1983-04-30 1984-11-17 Matsushita Electric Ind Co Ltd Formation of lead telluride thin film

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