JPS5238484A - Method of ionplating - Google Patents

Method of ionplating

Info

Publication number
JPS5238484A
JPS5238484A JP11450375A JP11450375A JPS5238484A JP S5238484 A JPS5238484 A JP S5238484A JP 11450375 A JP11450375 A JP 11450375A JP 11450375 A JP11450375 A JP 11450375A JP S5238484 A JPS5238484 A JP S5238484A
Authority
JP
Japan
Prior art keywords
ionplating
evenly
effect
plating material
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11450375A
Other languages
Japanese (ja)
Other versions
JPS587704B2 (en
Inventor
Shozo Matsuda
Kiyoshi Kita
Kazunori Fujie
Hiroyasu Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Heavy Industries Co Ltd
Original Assignee
Kawasaki Heavy Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Heavy Industries Co Ltd filed Critical Kawasaki Heavy Industries Co Ltd
Priority to JP11450375A priority Critical patent/JPS587704B2/ja
Publication of JPS5238484A publication Critical patent/JPS5238484A/en
Publication of JPS587704B2 publication Critical patent/JPS587704B2/ja
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/046Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Abstract

PURPOSE:To effect ionplating evenly on the inner surface of plating material.
JP11450375A 1975-09-22 1975-09-22 Expired JPS587704B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11450375A JPS587704B2 (en) 1975-09-22 1975-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11450375A JPS587704B2 (en) 1975-09-22 1975-09-22

Publications (2)

Publication Number Publication Date
JPS5238484A true JPS5238484A (en) 1977-03-25
JPS587704B2 JPS587704B2 (en) 1983-02-10

Family

ID=14639373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11450375A Expired JPS587704B2 (en) 1975-09-22 1975-09-22

Country Status (1)

Country Link
JP (1) JPS587704B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2545839A1 (en) * 1983-05-13 1984-11-16 Wedtech Corp METHOD AND APPARATUS FOR COATING A SUBSTRATE WITH MATERIAL ELECTRICALLY TRANSFORMED INTO THE GASEOUS PHASE

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH078304U (en) * 1993-06-30 1995-02-07 國 川 李 Continuous stuffing classification type garbage tub

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2545839A1 (en) * 1983-05-13 1984-11-16 Wedtech Corp METHOD AND APPARATUS FOR COATING A SUBSTRATE WITH MATERIAL ELECTRICALLY TRANSFORMED INTO THE GASEOUS PHASE

Also Published As

Publication number Publication date
JPS587704B2 (en) 1983-02-10

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