JPS6421917A - Heating furnace processing method - Google Patents

Heating furnace processing method

Info

Publication number
JPS6421917A
JPS6421917A JP17846987A JP17846987A JPS6421917A JP S6421917 A JPS6421917 A JP S6421917A JP 17846987 A JP17846987 A JP 17846987A JP 17846987 A JP17846987 A JP 17846987A JP S6421917 A JPS6421917 A JP S6421917A
Authority
JP
Japan
Prior art keywords
furnace core
core tube
inactive gas
furnace
introducing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17846987A
Other languages
English (en)
Inventor
Shuichi Ohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17846987A priority Critical patent/JPS6421917A/ja
Publication of JPS6421917A publication Critical patent/JPS6421917A/ja
Pending legal-status Critical Current

Links

JP17846987A 1987-07-16 1987-07-16 Heating furnace processing method Pending JPS6421917A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17846987A JPS6421917A (en) 1987-07-16 1987-07-16 Heating furnace processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17846987A JPS6421917A (en) 1987-07-16 1987-07-16 Heating furnace processing method

Publications (1)

Publication Number Publication Date
JPS6421917A true JPS6421917A (en) 1989-01-25

Family

ID=16049052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17846987A Pending JPS6421917A (en) 1987-07-16 1987-07-16 Heating furnace processing method

Country Status (1)

Country Link
JP (1) JPS6421917A (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691418A (en) * 1979-12-25 1981-07-24 Nec Corp Heat treatment device
JPS5754328A (ja) * 1980-09-19 1982-03-31 Hitachi Ltd Genatsukisoseichosochi
JPS60236222A (ja) * 1984-05-10 1985-11-25 Toshiba Corp 半導体装置製造炉
JPS61182218A (ja) * 1985-02-08 1986-08-14 Hitachi Hokkai Semiconductor Kk ウエハ処理方法および処理装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691418A (en) * 1979-12-25 1981-07-24 Nec Corp Heat treatment device
JPS5754328A (ja) * 1980-09-19 1982-03-31 Hitachi Ltd Genatsukisoseichosochi
JPS60236222A (ja) * 1984-05-10 1985-11-25 Toshiba Corp 半導体装置製造炉
JPS61182218A (ja) * 1985-02-08 1986-08-14 Hitachi Hokkai Semiconductor Kk ウエハ処理方法および処理装置

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