JPS6439716A - Vapor growing method - Google Patents
Vapor growing methodInfo
- Publication number
- JPS6439716A JPS6439716A JP19668087A JP19668087A JPS6439716A JP S6439716 A JPS6439716 A JP S6439716A JP 19668087 A JP19668087 A JP 19668087A JP 19668087 A JP19668087 A JP 19668087A JP S6439716 A JPS6439716 A JP S6439716A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- gas
- reaction gas
- preheating
- grown film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To effectively and thermally decompose a reaction gas, to uniformly introduce the gas from diffusing holes and to form a vapor grown film of high quality by providing a gas preheating tube in a furnace in a core tube of a reduced pressure vapor growing furnace, and preheating the introduced reaction gas. CONSTITUTION:A plurality of gas preheating tube 5 in a furnace provided in a rear manifold 3 is arranged in a core tube 1 sealed by a front manifold and a cap 4, reaction gas is introduced, heated to be thermally decomposed by a heater 7, the gas is uniformly diffused from the diffusing holes 5a of the tube 5, and a semiconductor wafer 8 placed in the tube 1 is covered with a vapor grown film. Thus, since sufficiently and thermally decomposed reaction gas is supplied to the periphery of the wafer 8 in the tube 1, the vapor grown film of high quality can be formed on the wafer 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19668087A JPS6439716A (en) | 1987-08-05 | 1987-08-05 | Vapor growing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19668087A JPS6439716A (en) | 1987-08-05 | 1987-08-05 | Vapor growing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6439716A true JPS6439716A (en) | 1989-02-10 |
Family
ID=16361807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19668087A Pending JPS6439716A (en) | 1987-08-05 | 1987-08-05 | Vapor growing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6439716A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58127331A (en) * | 1982-01-25 | 1983-07-29 | Kokusai Electric Co Ltd | Plasma chemical vapor growth apparatus |
-
1987
- 1987-08-05 JP JP19668087A patent/JPS6439716A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58127331A (en) * | 1982-01-25 | 1983-07-29 | Kokusai Electric Co Ltd | Plasma chemical vapor growth apparatus |
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