JPS5754316A - Handotaisochinokakusanhoho - Google Patents

Handotaisochinokakusanhoho

Info

Publication number
JPS5754316A
JPS5754316A JP13096280A JP13096280A JPS5754316A JP S5754316 A JPS5754316 A JP S5754316A JP 13096280 A JP13096280 A JP 13096280A JP 13096280 A JP13096280 A JP 13096280A JP S5754316 A JPS5754316 A JP S5754316A
Authority
JP
Japan
Prior art keywords
diffusion
bars
boat
constitution
sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13096280A
Other languages
English (en)
Inventor
Keishiro Yonezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHINNIPPON DENKI KK
NEC Home Electronics Ltd
New Nippon Electric Co Ltd
Original Assignee
SHINNIPPON DENKI KK
NEC Home Electronics Ltd
New Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHINNIPPON DENKI KK, NEC Home Electronics Ltd, New Nippon Electric Co Ltd filed Critical SHINNIPPON DENKI KK
Priority to JP13096280A priority Critical patent/JPS5754316A/ja
Publication of JPS5754316A publication Critical patent/JPS5754316A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP13096280A 1980-09-18 1980-09-18 Handotaisochinokakusanhoho Pending JPS5754316A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13096280A JPS5754316A (ja) 1980-09-18 1980-09-18 Handotaisochinokakusanhoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13096280A JPS5754316A (ja) 1980-09-18 1980-09-18 Handotaisochinokakusanhoho

Publications (1)

Publication Number Publication Date
JPS5754316A true JPS5754316A (ja) 1982-03-31

Family

ID=15046692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13096280A Pending JPS5754316A (ja) 1980-09-18 1980-09-18 Handotaisochinokakusanhoho

Country Status (1)

Country Link
JP (1) JPS5754316A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05185740A (ja) * 1992-01-08 1993-07-27 Fuji Photo Film Co Ltd 記録材料
JP2009039174A (ja) * 2007-08-06 2009-02-26 Tokiwa Corp 塗布材押出容器
US11810221B2 (en) 2019-09-20 2023-11-07 Canon Kabushiki Kaisha Device, system, control method, and non-transitory computer-readable storage medium

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05185740A (ja) * 1992-01-08 1993-07-27 Fuji Photo Film Co Ltd 記録材料
JP2009039174A (ja) * 2007-08-06 2009-02-26 Tokiwa Corp 塗布材押出容器
US11810221B2 (en) 2019-09-20 2023-11-07 Canon Kabushiki Kaisha Device, system, control method, and non-transitory computer-readable storage medium

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