JPS5519875A - Jig diffusing operation - Google Patents
Jig diffusing operationInfo
- Publication number
- JPS5519875A JPS5519875A JP9291378A JP9291378A JPS5519875A JP S5519875 A JPS5519875 A JP S5519875A JP 9291378 A JP9291378 A JP 9291378A JP 9291378 A JP9291378 A JP 9291378A JP S5519875 A JPS5519875 A JP S5519875A
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- supporting
- stand
- elements
- impurity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE: To facilitate handling such as inserting or picking-up wafers and impurities by providing two separate supporting elements one of which is used as a stand for semiconductor wafers to be placed with a given intervals and the other as a stand for impurity source plates to be placed in between the wafers, then assembling these elements and by arranging the wafers and impurity source plates alternately.
CONSTITUTION: A supporting frame 10 is made of holeless silica bars and is constructed into a frame. Each of its longitudinal elements 10a and 10b has equally spaced grooves 111 to 115 at corresponding positions of each element to insert and to stand impurity source plates 5. While a supporting table 12 that stands semiconductor wafers 6, consists of a multicrystal Si plate whose cross-section is an inverted ⊥ shape. The table has supporting grooves 151 to 15 4 along the longitudinal direction to stand the wafers 6 and relief grooves 141 to 145 for the impurity sources 5. The supporting frame 10 that stands the impurity sources 5 and the supporting table 12 that stands the wafers 6, are made individually, then the elements 10a and 10b of the frame 10 is placed on the rim of the table 12, and each impurity source 5 is inserted in between wafers 6.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9291378A JPS5849016B2 (en) | 1978-07-28 | 1978-07-28 | Diffusion holding jig |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9291378A JPS5849016B2 (en) | 1978-07-28 | 1978-07-28 | Diffusion holding jig |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5519875A true JPS5519875A (en) | 1980-02-12 |
JPS5849016B2 JPS5849016B2 (en) | 1983-11-01 |
Family
ID=14067716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9291378A Expired JPS5849016B2 (en) | 1978-07-28 | 1978-07-28 | Diffusion holding jig |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5849016B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0449368Y2 (en) * | 1985-07-25 | 1992-11-20 |
-
1978
- 1978-07-28 JP JP9291378A patent/JPS5849016B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5849016B2 (en) | 1983-11-01 |
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