JPS5519875A - Jig diffusing operation - Google Patents

Jig diffusing operation

Info

Publication number
JPS5519875A
JPS5519875A JP9291378A JP9291378A JPS5519875A JP S5519875 A JPS5519875 A JP S5519875A JP 9291378 A JP9291378 A JP 9291378A JP 9291378 A JP9291378 A JP 9291378A JP S5519875 A JPS5519875 A JP S5519875A
Authority
JP
Japan
Prior art keywords
wafers
supporting
stand
elements
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9291378A
Other languages
Japanese (ja)
Other versions
JPS5849016B2 (en
Inventor
Masaaki Sadamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9291378A priority Critical patent/JPS5849016B2/en
Publication of JPS5519875A publication Critical patent/JPS5519875A/en
Publication of JPS5849016B2 publication Critical patent/JPS5849016B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: To facilitate handling such as inserting or picking-up wafers and impurities by providing two separate supporting elements one of which is used as a stand for semiconductor wafers to be placed with a given intervals and the other as a stand for impurity source plates to be placed in between the wafers, then assembling these elements and by arranging the wafers and impurity source plates alternately.
CONSTITUTION: A supporting frame 10 is made of holeless silica bars and is constructed into a frame. Each of its longitudinal elements 10a and 10b has equally spaced grooves 111 to 115 at corresponding positions of each element to insert and to stand impurity source plates 5. While a supporting table 12 that stands semiconductor wafers 6, consists of a multicrystal Si plate whose cross-section is an inverted ⊥ shape. The table has supporting grooves 151 to 15 4 along the longitudinal direction to stand the wafers 6 and relief grooves 141 to 145 for the impurity sources 5. The supporting frame 10 that stands the impurity sources 5 and the supporting table 12 that stands the wafers 6, are made individually, then the elements 10a and 10b of the frame 10 is placed on the rim of the table 12, and each impurity source 5 is inserted in between wafers 6.
COPYRIGHT: (C)1980,JPO&Japio
JP9291378A 1978-07-28 1978-07-28 Diffusion holding jig Expired JPS5849016B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9291378A JPS5849016B2 (en) 1978-07-28 1978-07-28 Diffusion holding jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9291378A JPS5849016B2 (en) 1978-07-28 1978-07-28 Diffusion holding jig

Publications (2)

Publication Number Publication Date
JPS5519875A true JPS5519875A (en) 1980-02-12
JPS5849016B2 JPS5849016B2 (en) 1983-11-01

Family

ID=14067716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9291378A Expired JPS5849016B2 (en) 1978-07-28 1978-07-28 Diffusion holding jig

Country Status (1)

Country Link
JP (1) JPS5849016B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0449368Y2 (en) * 1985-07-25 1992-11-20

Also Published As

Publication number Publication date
JPS5849016B2 (en) 1983-11-01

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