JPS551130A - Furnace core pipe for manufacturing semiconductor - Google Patents
Furnace core pipe for manufacturing semiconductorInfo
- Publication number
- JPS551130A JPS551130A JP7387878A JP7387878A JPS551130A JP S551130 A JPS551130 A JP S551130A JP 7387878 A JP7387878 A JP 7387878A JP 7387878 A JP7387878 A JP 7387878A JP S551130 A JPS551130 A JP S551130A
- Authority
- JP
- Japan
- Prior art keywords
- furnace core
- core pipe
- pipe
- wafers
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make uniform oxide films on wafersin a furnace core pipe, by laying a gas inlet tube over the furnace core pipe and opening a plurality of gas inlet ports into the central part of the pipe.
CONSTITUTION: A gas is supplied to the inlet tube 14 through a filter 13. The inlet ports 15 are opened at a uniform spacing into the central part of the furnace core pipe 11. A wafer rest is inserted into the central part of the pipe 11 through its opening 17. The gas containing O2 is introduced into the pipe 11 while the wafers are heated by a heater 12. The gas comes into uniform contact with the wafers on the rest. Since heat is radiated to the opengins 16, 17 of the furnace core pipe 11, the wafers are uniformly heated. Therefore, all the wafers are oxidized under the same condition and the uniform oxide films are produced.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7387878A JPS551130A (en) | 1978-06-19 | 1978-06-19 | Furnace core pipe for manufacturing semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7387878A JPS551130A (en) | 1978-06-19 | 1978-06-19 | Furnace core pipe for manufacturing semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS551130A true JPS551130A (en) | 1980-01-07 |
Family
ID=13530890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7387878A Pending JPS551130A (en) | 1978-06-19 | 1978-06-19 | Furnace core pipe for manufacturing semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS551130A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60216912A (en) * | 1984-04-12 | 1985-10-30 | Toshiba Corp | Method for detecting tension of rolling material |
JPS6370143U (en) * | 1986-10-27 | 1988-05-11 | ||
JPH0621000U (en) * | 1992-06-02 | 1994-03-18 | 麗子 伊藤 | Display for gas container |
-
1978
- 1978-06-19 JP JP7387878A patent/JPS551130A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60216912A (en) * | 1984-04-12 | 1985-10-30 | Toshiba Corp | Method for detecting tension of rolling material |
JPS6370143U (en) * | 1986-10-27 | 1988-05-11 | ||
JPH0621000U (en) * | 1992-06-02 | 1994-03-18 | 麗子 伊藤 | Display for gas container |
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