JPS6415913A - Epitaxial growth method of substrate for high-brightness led - Google Patents

Epitaxial growth method of substrate for high-brightness led

Info

Publication number
JPS6415913A
JPS6415913A JP17183987A JP17183987A JPS6415913A JP S6415913 A JPS6415913 A JP S6415913A JP 17183987 A JP17183987 A JP 17183987A JP 17183987 A JP17183987 A JP 17183987A JP S6415913 A JPS6415913 A JP S6415913A
Authority
JP
Japan
Prior art keywords
electrode
layer
growth method
auzn
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17183987A
Other languages
English (en)
Inventor
Masahiro Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Polytec Co
Mitsubishi Kasei Corp
Original Assignee
Mitsubishi Kasei Corp
Mitsubishi Monsanto Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp, Mitsubishi Monsanto Chemical Co filed Critical Mitsubishi Kasei Corp
Priority to JP17183987A priority Critical patent/JPS6415913A/ja
Priority to DE3851828T priority patent/DE3851828T2/de
Priority to EP88906070A priority patent/EP0322465B1/en
Priority to US07/353,652 priority patent/US4921817A/en
Priority to PCT/JP1988/000677 priority patent/WO1989000769A1/ja
Publication of JPS6415913A publication Critical patent/JPS6415913A/ja
Priority to KR89700422A priority patent/KR970010570B1/ko
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/40—Materials therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H01L33/0062—Processes for devices with an active region comprising only III-V compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/099—LED, multicolor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/108—Melt back
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/135—Removal of substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Devices (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Recrystallisation Techniques (AREA)
JP17183987A 1987-07-09 1987-07-09 Epitaxial growth method of substrate for high-brightness led Pending JPS6415913A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP17183987A JPS6415913A (en) 1987-07-09 1987-07-09 Epitaxial growth method of substrate for high-brightness led
DE3851828T DE3851828T2 (de) 1987-07-09 1988-07-06 Verfahren zum epitaktischen wachstum eines substrats für hochbrillante led.
EP88906070A EP0322465B1 (en) 1987-07-09 1988-07-06 Method of epitaxially growing a substrate for highly bright led
US07/353,652 US4921817A (en) 1987-07-09 1988-07-06 Substrate for high-intensity led, and method of epitaxially growing same
PCT/JP1988/000677 WO1989000769A1 (en) 1987-07-09 1988-07-06 Substrate for highly bright led and method of epitaxially growing the same
KR89700422A KR970010570B1 (en) 1987-07-09 1989-03-08 Substrate for highly bright led and method of epitaxially growing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17183987A JPS6415913A (en) 1987-07-09 1987-07-09 Epitaxial growth method of substrate for high-brightness led

Publications (1)

Publication Number Publication Date
JPS6415913A true JPS6415913A (en) 1989-01-19

Family

ID=15930713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17183987A Pending JPS6415913A (en) 1987-07-09 1987-07-09 Epitaxial growth method of substrate for high-brightness led

Country Status (6)

Country Link
US (1) US4921817A (ja)
EP (1) EP0322465B1 (ja)
JP (1) JPS6415913A (ja)
KR (1) KR970010570B1 (ja)
DE (1) DE3851828T2 (ja)
WO (1) WO1989000769A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009088160A (ja) * 2007-09-28 2009-04-23 Dowa Electronics Materials Co Ltd 発光ダイオードおよびその製造方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0712094B2 (ja) * 1988-10-19 1995-02-08 信越半導体株式会社 発光半導体素子用エピタキシャルウェーハの製造方法
US5235194A (en) * 1989-09-28 1993-08-10 Kabushiki Kaisha Toshiba Semiconductor light-emitting device with InGaAlP
US5103271A (en) * 1989-09-28 1992-04-07 Kabushiki Kaisha Toshiba Semiconductor light emitting device and method of fabricating the same
US5376580A (en) * 1993-03-19 1994-12-27 Hewlett-Packard Company Wafer bonding of light emitting diode layers
GB2318680B (en) 1996-10-24 2001-11-07 Univ Surrey Optoelectronic semiconductor devices

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153186A (ja) * 1984-01-20 1985-08-12 Fujitsu Ltd 発光ダイオ−ド
JPS61104680A (ja) * 1984-10-27 1986-05-22 Toshiba Corp 発光ダイオ−ドの製造方法
JPS61198789A (ja) * 1985-02-28 1986-09-03 Stanley Electric Co Ltd 光半導体素子の連続製造方法

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3647579A (en) * 1968-03-28 1972-03-07 Rca Corp Liquid phase double epitaxial process for manufacturing light emitting gallium phosphide devices
NL6910274A (ja) * 1969-07-04 1971-01-06
US3636617A (en) * 1970-03-23 1972-01-25 Monsanto Co Method for fabricating monolithic light-emitting semiconductor diodes and arrays thereof
DE2163075C2 (de) * 1970-12-23 1982-03-04 Naamloze Vennootschap Philips' Gloeilampenfabrieken, 5621 Eindhoven Verfahren zur Herstellung von elektrolumineszierenden Halbleiterbauelementen
JPS4894368A (ja) * 1972-03-13 1973-12-05
FR2217068B1 (ja) * 1973-02-13 1978-10-20 Labo Electronique Physique
US4051061A (en) * 1973-08-10 1977-09-27 Philips Corp Gallium phosphide light emitting semiconductive materials
JPS518180A (ja) * 1974-07-10 1976-01-22 Mitsubishi Electric Corp Tagenkagobutsuketsushohakubanno seizohoho
US3993533A (en) * 1975-04-09 1976-11-23 Carnegie-Mellon University Method for making semiconductors for solar cells
JPS5286059A (en) * 1976-01-13 1977-07-16 Nippon Telegr & Teleph Corp <Ntt> Process for production and apparatus used for process of semiconductor device
JPS5423391A (en) * 1977-07-22 1979-02-21 Nec Corp Gallium-arsenic semiconductor element
US4190813A (en) * 1977-12-28 1980-02-26 Bell Telephone Laboratories, Incorporated Strip buried heterostructure laser
GB1602498A (en) * 1978-05-31 1981-11-11 Secr Defence Fet devices and their fabrication
US4168998A (en) * 1978-12-06 1979-09-25 Mitsubishi Monsanto Chemical Co. Process for manufacturing a vapor phase epitaxial wafer of compound semiconductor without causing breaking of wafer by utilizing a pre-coating of carbonaceous powder
JPS55123126A (en) * 1979-03-15 1980-09-22 Nippon Telegr & Teleph Corp <Ntt> Method for semiconductor crystal growth
JPS6038036B2 (ja) * 1979-04-23 1985-08-29 松下電器産業株式会社 電場発光素子
JPS55165688A (en) * 1979-06-11 1980-12-24 Fujitsu Ltd Preparation of light emission semiconductor device
JPS5635410A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Method and device for manufacturing semiconductor device
US4226649A (en) * 1979-09-11 1980-10-07 The United States Of America As Represented By The Secretary Of The Navy Method for epitaxial growth of GaAs films and devices configuration independent of GaAs substrate utilizing molecular beam epitaxy and substrate removal techniques
US4230505A (en) * 1979-10-09 1980-10-28 Rca Corporation Method of making an impatt diode utilizing a combination of epitaxial deposition, ion implantation and substrate removal
US4329189A (en) * 1980-02-04 1982-05-11 Northern Telecom Limited Channelled substrate double heterostructure lasers
JPS5728375A (en) * 1980-07-28 1982-02-16 Fujitsu Ltd Manufacture of semiconductor device
US4477294A (en) * 1981-05-06 1984-10-16 The United States Of America As Represented By The Secretary Of The Army Method of forming GaAs on Aly Ga1-y As transmission mode photocathodehode
US4421576A (en) * 1981-09-14 1983-12-20 Rca Corporation Method for forming an epitaxial compound semiconductor layer on a semi-insulating substrate
JPS5969977A (ja) * 1982-10-15 1984-04-20 Matsushita Electric Ind Co Ltd 半導体発光装置
JPS60198812A (ja) * 1984-03-23 1985-10-08 Nec Corp 半導体発光素子の製造方法
FR2574601B1 (fr) * 1984-12-11 1987-07-17 Menigaux Louis Procede de fabrication d'un laser a semi-conducteur a ruban enterre
JPS61154124A (ja) * 1984-12-27 1986-07-12 Toshiba Corp 半導体装置の製造方法
JPS61281561A (ja) * 1985-06-06 1986-12-11 Oki Electric Ind Co Ltd 半導体面発光素子の製造方法
JPS61281560A (ja) * 1985-06-06 1986-12-11 Oki Electric Ind Co Ltd 半導体面発光素子の製造方法
US4659400A (en) * 1985-06-27 1987-04-21 General Instrument Corp. Method for forming high yield epitaxial wafers
JPS62171167A (ja) * 1986-01-23 1987-07-28 Mitsubishi Electric Corp 太陽電池の製造方法
JPS63304614A (ja) * 1987-06-03 1988-12-12 Matsushita Electric Ind Co Ltd 半導体エピタキシャル成長方法
JPS63312685A (ja) * 1987-06-16 1988-12-21 Fujitsu Ltd 発光ダイオ−ドの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153186A (ja) * 1984-01-20 1985-08-12 Fujitsu Ltd 発光ダイオ−ド
JPS61104680A (ja) * 1984-10-27 1986-05-22 Toshiba Corp 発光ダイオ−ドの製造方法
JPS61198789A (ja) * 1985-02-28 1986-09-03 Stanley Electric Co Ltd 光半導体素子の連続製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009088160A (ja) * 2007-09-28 2009-04-23 Dowa Electronics Materials Co Ltd 発光ダイオードおよびその製造方法

Also Published As

Publication number Publication date
EP0322465A1 (en) 1989-07-05
EP0322465B1 (en) 1994-10-12
KR970010570B1 (en) 1997-06-28
WO1989000769A1 (en) 1989-01-26
EP0322465A4 (en) 1989-10-04
US4921817A (en) 1990-05-01
DE3851828T2 (de) 1995-05-11
DE3851828D1 (de) 1994-11-17

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