JPS6387761A - ガリウム砒素集積回路のｍｉｍ容量 - Google Patents

ガリウム砒素集積回路のｍｉｍ容量

Info

Publication number
JPS6387761A
JPS6387761A JP61233615A JP23361586A JPS6387761A JP S6387761 A JPS6387761 A JP S6387761A JP 61233615 A JP61233615 A JP 61233615A JP 23361586 A JP23361586 A JP 23361586A JP S6387761 A JPS6387761 A JP S6387761A
Authority
JP
Japan
Prior art keywords
gallium arsenide
insulating film
capacitance
mim
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61233615A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573273B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yuji Hara
原　雄二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61233615A priority Critical patent/JPS6387761A/ja
Publication of JPS6387761A publication Critical patent/JPS6387761A/ja
Publication of JPH0573273B2 publication Critical patent/JPH0573273B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP61233615A 1986-09-30 1986-09-30 ガリウム砒素集積回路のｍｉｍ容量 Granted JPS6387761A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61233615A JPS6387761A (ja) 1986-09-30 1986-09-30 ガリウム砒素集積回路のｍｉｍ容量

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61233615A JPS6387761A (ja) 1986-09-30 1986-09-30 ガリウム砒素集積回路のｍｉｍ容量

Publications (2)

Publication Number Publication Date
JPS6387761A true JPS6387761A (ja) 1988-04-19
JPH0573273B2 JPH0573273B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-14

Family

ID=16957820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61233615A Granted JPS6387761A (ja) 1986-09-30 1986-09-30 ガリウム砒素集積回路のｍｉｍ容量

Country Status (1)

Country Link
JP (1) JPS6387761A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6251740B1 (en) 1998-12-23 2001-06-26 Lsi Logic Corporation Method of forming and electrically connecting a vertical interdigitated metal-insulator-metal capacitor extending between interconnect layers in an integrated circuit
US6341056B1 (en) 2000-05-17 2002-01-22 Lsi Logic Corporation Capacitor with multiple-component dielectric and method of fabricating same
US6342734B1 (en) 2000-04-27 2002-01-29 Lsi Logic Corporation Interconnect-integrated metal-insulator-metal capacitor and method of fabricating same
US6417535B1 (en) * 1998-12-23 2002-07-09 Lsi Logic Corporation Vertical interdigitated metal-insulator-metal capacitor for an integrated circuit
US6441419B1 (en) 1998-03-31 2002-08-27 Lsi Logic Corporation Encapsulated-metal vertical-interdigitated capacitor and damascene method of manufacturing same
US6504202B1 (en) 2000-02-02 2003-01-07 Lsi Logic Corporation Interconnect-embedded metal-insulator-metal capacitor
US6566186B1 (en) 2000-05-17 2003-05-20 Lsi Logic Corporation Capacitor with stoichiometrically adjusted dielectric and method of fabricating same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066851A (ja) * 1983-09-22 1985-04-17 Oki Electric Ind Co Ltd 集積回路用コンデンサ及びその製造方法
JPS60178659A (ja) * 1984-02-24 1985-09-12 Toshiba Corp 半導体装置およびその製造方法
JPS6136965A (ja) * 1984-07-30 1986-02-21 Toshiba Corp 半導体メモリ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066851A (ja) * 1983-09-22 1985-04-17 Oki Electric Ind Co Ltd 集積回路用コンデンサ及びその製造方法
JPS60178659A (ja) * 1984-02-24 1985-09-12 Toshiba Corp 半導体装置およびその製造方法
JPS6136965A (ja) * 1984-07-30 1986-02-21 Toshiba Corp 半導体メモリ装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6441419B1 (en) 1998-03-31 2002-08-27 Lsi Logic Corporation Encapsulated-metal vertical-interdigitated capacitor and damascene method of manufacturing same
US6251740B1 (en) 1998-12-23 2001-06-26 Lsi Logic Corporation Method of forming and electrically connecting a vertical interdigitated metal-insulator-metal capacitor extending between interconnect layers in an integrated circuit
US6417535B1 (en) * 1998-12-23 2002-07-09 Lsi Logic Corporation Vertical interdigitated metal-insulator-metal capacitor for an integrated circuit
US6504202B1 (en) 2000-02-02 2003-01-07 Lsi Logic Corporation Interconnect-embedded metal-insulator-metal capacitor
US6342734B1 (en) 2000-04-27 2002-01-29 Lsi Logic Corporation Interconnect-integrated metal-insulator-metal capacitor and method of fabricating same
US6341056B1 (en) 2000-05-17 2002-01-22 Lsi Logic Corporation Capacitor with multiple-component dielectric and method of fabricating same
US6566186B1 (en) 2000-05-17 2003-05-20 Lsi Logic Corporation Capacitor with stoichiometrically adjusted dielectric and method of fabricating same

Also Published As

Publication number Publication date
JPH0573273B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-14

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