JPS63303017A - タ−ゲツト及びその製造方法 - Google Patents

タ−ゲツト及びその製造方法

Info

Publication number
JPS63303017A
JPS63303017A JP13771087A JP13771087A JPS63303017A JP S63303017 A JPS63303017 A JP S63303017A JP 13771087 A JP13771087 A JP 13771087A JP 13771087 A JP13771087 A JP 13771087A JP S63303017 A JPS63303017 A JP S63303017A
Authority
JP
Japan
Prior art keywords
powder
oxygen content
alloy target
titanium
high purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13771087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05452B2 (enrdf_load_stackoverflow
Inventor
Susumu Sawada
沢田　進
Yoshitaka Sumiya
角谷　嘉隆
Yoshiharu Kato
義春 加藤
Osamu Kanano
治 叶野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eneos Corp
Original Assignee
Nippon Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mining Co Ltd filed Critical Nippon Mining Co Ltd
Priority to JP13771087A priority Critical patent/JPS63303017A/ja
Publication of JPS63303017A publication Critical patent/JPS63303017A/ja
Publication of JPH05452B2 publication Critical patent/JPH05452B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
JP13771087A 1987-06-02 1987-06-02 タ−ゲツト及びその製造方法 Granted JPS63303017A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13771087A JPS63303017A (ja) 1987-06-02 1987-06-02 タ−ゲツト及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13771087A JPS63303017A (ja) 1987-06-02 1987-06-02 タ−ゲツト及びその製造方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP5317470A Division JP2610575B2 (ja) 1993-11-25 1993-11-25 Ｗ−Ｔｉ合金ターゲット
JP32088093A Division JPH0711434A (ja) 1993-11-29 1993-11-29 Ｗ−Ｔｉ合金ターゲット

Publications (2)

Publication Number Publication Date
JPS63303017A true JPS63303017A (ja) 1988-12-09
JPH05452B2 JPH05452B2 (enrdf_load_stackoverflow) 1993-01-06

Family

ID=15205013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13771087A Granted JPS63303017A (ja) 1987-06-02 1987-06-02 タ−ゲツト及びその製造方法

Country Status (1)

Country Link
JP (1) JPS63303017A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03264640A (ja) * 1990-03-13 1991-11-25 Hitachi Metals Ltd Ｔｉ‐Ｗターゲット材およびその製造方法
JPH04232260A (ja) * 1990-12-28 1992-08-20 Nikko Kyodo Co Ltd Ｗ−Ｔｉ合金ターゲットおよび製造方法
US5160534A (en) * 1990-06-15 1992-11-03 Hitachi Metals Ltd. Titanium-tungsten target material for sputtering and manufacturing method therefor
US5298338A (en) * 1990-06-15 1994-03-29 Hitachi Metals, Ltd. Titanium-tungsten target material and manufacturing method thereof
US5306569A (en) * 1990-06-15 1994-04-26 Hitachi Metals, Ltd. Titanium-tungsten target material and manufacturing method thereof
JP2002339031A (ja) * 2001-05-16 2002-11-27 Allied Material Corp モリブデン板材及びその製造方法
CN102366833A (zh) * 2011-11-21 2012-03-07 宁波江丰电子材料有限公司 钨钛靶材坯料的制作方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49103810A (enrdf_load_stackoverflow) * 1973-02-07 1974-10-01
JPS5027706A (enrdf_load_stackoverflow) * 1973-07-13 1975-03-22
JPS5249915A (en) * 1975-10-20 1977-04-21 Hitachi Metals Ltd Production process of sintered alloy containing titanium
US4331476A (en) * 1980-01-31 1982-05-25 Tektronix, Inc. Sputtering targets with low mobile ion contamination
JPS6066425A (ja) * 1983-09-22 1985-04-16 Nippon Telegr & Teleph Corp <Ntt> Ｌｓｉ電極用の高純度モリブデンタ−ゲツトならびに高純度モリブデンシリサイドタ−ゲツトおよびその製造方法
JPS6158866A (ja) * 1984-08-30 1986-03-26 三菱マテリアル株式会社 高融点金属珪化物基複合材料の製造法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49103810A (enrdf_load_stackoverflow) * 1973-02-07 1974-10-01
JPS5027706A (enrdf_load_stackoverflow) * 1973-07-13 1975-03-22
JPS5249915A (en) * 1975-10-20 1977-04-21 Hitachi Metals Ltd Production process of sintered alloy containing titanium
US4331476A (en) * 1980-01-31 1982-05-25 Tektronix, Inc. Sputtering targets with low mobile ion contamination
JPS6066425A (ja) * 1983-09-22 1985-04-16 Nippon Telegr & Teleph Corp <Ntt> Ｌｓｉ電極用の高純度モリブデンタ−ゲツトならびに高純度モリブデンシリサイドタ−ゲツトおよびその製造方法
JPS6158866A (ja) * 1984-08-30 1986-03-26 三菱マテリアル株式会社 高融点金属珪化物基複合材料の製造法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03264640A (ja) * 1990-03-13 1991-11-25 Hitachi Metals Ltd Ｔｉ‐Ｗターゲット材およびその製造方法
US5160534A (en) * 1990-06-15 1992-11-03 Hitachi Metals Ltd. Titanium-tungsten target material for sputtering and manufacturing method therefor
US5298338A (en) * 1990-06-15 1994-03-29 Hitachi Metals, Ltd. Titanium-tungsten target material and manufacturing method thereof
US5306569A (en) * 1990-06-15 1994-04-26 Hitachi Metals, Ltd. Titanium-tungsten target material and manufacturing method thereof
JPH04232260A (ja) * 1990-12-28 1992-08-20 Nikko Kyodo Co Ltd Ｗ−Ｔｉ合金ターゲットおよび製造方法
JP2002339031A (ja) * 2001-05-16 2002-11-27 Allied Material Corp モリブデン板材及びその製造方法
CN102366833A (zh) * 2011-11-21 2012-03-07 宁波江丰电子材料有限公司 钨钛靶材坯料的制作方法

Also Published As

Publication number Publication date
JPH05452B2 (enrdf_load_stackoverflow) 1993-01-06

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