JPS63271937A - 洗浄装置 - Google Patents
洗浄装置Info
- Publication number
- JPS63271937A JPS63271937A JP10512687A JP10512687A JPS63271937A JP S63271937 A JPS63271937 A JP S63271937A JP 10512687 A JP10512687 A JP 10512687A JP 10512687 A JP10512687 A JP 10512687A JP S63271937 A JPS63271937 A JP S63271937A
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- substrate
- pure water
- cleaning
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 43
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 7
- 239000000969 carrier Substances 0.000 claims 2
- 230000000694 effects Effects 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 3
- 238000005406 washing Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- SEPPVOUBHWNCAW-FNORWQNLSA-N (E)-4-oxonon-2-enal Chemical compound CCCCCC(=O)\C=C\C=O SEPPVOUBHWNCAW-FNORWQNLSA-N 0.000 description 1
- LLBZPESJRQGYMB-UHFFFAOYSA-N 4-one Natural products O1C(C(=O)CC)CC(C)C11C2(C)CCC(C3(C)C(C(C)(CO)C(OC4C(C(O)C(O)C(COC5C(C(O)C(O)CO5)OC5C(C(OC6C(C(O)C(O)C(CO)O6)O)C(O)C(CO)O5)OC5C(C(O)C(O)C(C)O5)O)O4)O)CC3)CC3)=C3C2(C)CC1 LLBZPESJRQGYMB-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- MPOKJOWFCMDRKP-UHFFFAOYSA-N gold;hydrate Chemical compound O.[Au] MPOKJOWFCMDRKP-UHFFFAOYSA-N 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10512687A JPS63271937A (ja) | 1987-04-28 | 1987-04-28 | 洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10512687A JPS63271937A (ja) | 1987-04-28 | 1987-04-28 | 洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63271937A true JPS63271937A (ja) | 1988-11-09 |
| JPH0552055B2 JPH0552055B2 (enrdf_load_stackoverflow) | 1993-08-04 |
Family
ID=14399090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10512687A Granted JPS63271937A (ja) | 1987-04-28 | 1987-04-28 | 洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63271937A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0497336U (enrdf_load_stackoverflow) * | 1990-09-10 | 1992-08-24 | ||
| JP2014166945A (ja) * | 2013-02-01 | 2014-09-11 | Mitsubishi Materials Corp | シリコン片の洗浄装置及び洗浄方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6142834U (ja) * | 1984-08-21 | 1986-03-19 | 大日本スクリ−ン製造株式会社 | ウエハ洗浄装置 |
-
1987
- 1987-04-28 JP JP10512687A patent/JPS63271937A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6142834U (ja) * | 1984-08-21 | 1986-03-19 | 大日本スクリ−ン製造株式会社 | ウエハ洗浄装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0497336U (enrdf_load_stackoverflow) * | 1990-09-10 | 1992-08-24 | ||
| JP2014166945A (ja) * | 2013-02-01 | 2014-09-11 | Mitsubishi Materials Corp | シリコン片の洗浄装置及び洗浄方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0552055B2 (enrdf_load_stackoverflow) | 1993-08-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20070804 Year of fee payment: 14 |