JPS63271937A - 洗浄装置 - Google Patents

洗浄装置

Info

Publication number
JPS63271937A
JPS63271937A JP62105126A JP10512687A JPS63271937A JP S63271937 A JPS63271937 A JP S63271937A JP 62105126 A JP62105126 A JP 62105126A JP 10512687 A JP10512687 A JP 10512687A JP S63271937 A JPS63271937 A JP S63271937A
Authority
JP
Japan
Prior art keywords
carrier
substrate
cleaning
substrates
pure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62105126A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0552055B2 (enrdf_load_stackoverflow
Inventor
Yuichi Hirofuji
裕一 広藤
Teruto Onishi
照人 大西
Ichiro Nakao
中尾　一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62105126A priority Critical patent/JPS63271937A/ja
Publication of JPS63271937A publication Critical patent/JPS63271937A/ja
Publication of JPH0552055B2 publication Critical patent/JPH0552055B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP62105126A 1987-04-28 1987-04-28 洗浄装置 Granted JPS63271937A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62105126A JPS63271937A (ja) 1987-04-28 1987-04-28 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62105126A JPS63271937A (ja) 1987-04-28 1987-04-28 洗浄装置

Publications (2)

Publication Number Publication Date
JPS63271937A true JPS63271937A (ja) 1988-11-09
JPH0552055B2 JPH0552055B2 (enrdf_load_stackoverflow) 1993-08-04

Family

ID=14399090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62105126A Granted JPS63271937A (ja) 1987-04-28 1987-04-28 洗浄装置

Country Status (1)

Country Link
JP (1) JPS63271937A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0497336U (enrdf_load_stackoverflow) * 1990-09-10 1992-08-24
JP2014166945A (ja) * 2013-02-01 2014-09-11 Mitsubishi Materials Corp シリコン片の洗浄装置及び洗浄方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142834U (ja) * 1984-08-21 1986-03-19 大日本スクリ−ン製造株式会社 ウエハ洗浄装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142834U (ja) * 1984-08-21 1986-03-19 大日本スクリ−ン製造株式会社 ウエハ洗浄装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0497336U (enrdf_load_stackoverflow) * 1990-09-10 1992-08-24
JP2014166945A (ja) * 2013-02-01 2014-09-11 Mitsubishi Materials Corp シリコン片の洗浄装置及び洗浄方法

Also Published As

Publication number Publication date
JPH0552055B2 (enrdf_load_stackoverflow) 1993-08-04

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