JPH0552055B2 - - Google Patents

Info

Publication number
JPH0552055B2
JPH0552055B2 JP62105126A JP10512687A JPH0552055B2 JP H0552055 B2 JPH0552055 B2 JP H0552055B2 JP 62105126 A JP62105126 A JP 62105126A JP 10512687 A JP10512687 A JP 10512687A JP H0552055 B2 JPH0552055 B2 JP H0552055B2
Authority
JP
Japan
Prior art keywords
carrier
container
side wall
substrate
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62105126A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63271937A (ja
Inventor
Juichi Hirofuji
Teruto Oonishi
Ichiro Nakao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10512687A priority Critical patent/JPS63271937A/ja
Publication of JPS63271937A publication Critical patent/JPS63271937A/ja
Publication of JPH0552055B2 publication Critical patent/JPH0552055B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP10512687A 1987-04-28 1987-04-28 洗浄装置 Granted JPS63271937A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10512687A JPS63271937A (ja) 1987-04-28 1987-04-28 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10512687A JPS63271937A (ja) 1987-04-28 1987-04-28 洗浄装置

Publications (2)

Publication Number Publication Date
JPS63271937A JPS63271937A (ja) 1988-11-09
JPH0552055B2 true JPH0552055B2 (enrdf_load_stackoverflow) 1993-08-04

Family

ID=14399090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10512687A Granted JPS63271937A (ja) 1987-04-28 1987-04-28 洗浄装置

Country Status (1)

Country Link
JP (1) JPS63271937A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH071795Y2 (ja) * 1990-09-10 1995-01-18 大日本スクリーン製造株式会社 浸漬型基板洗浄装置
JP2014166945A (ja) * 2013-02-01 2014-09-11 Mitsubishi Materials Corp シリコン片の洗浄装置及び洗浄方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142834U (ja) * 1984-08-21 1986-03-19 大日本スクリ−ン製造株式会社 ウエハ洗浄装置

Also Published As

Publication number Publication date
JPS63271937A (ja) 1988-11-09

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