JPH0533819B2 - - Google Patents

Info

Publication number
JPH0533819B2
JPH0533819B2 JP63009849A JP984988A JPH0533819B2 JP H0533819 B2 JPH0533819 B2 JP H0533819B2 JP 63009849 A JP63009849 A JP 63009849A JP 984988 A JP984988 A JP 984988A JP H0533819 B2 JPH0533819 B2 JP H0533819B2
Authority
JP
Japan
Prior art keywords
substrate
cleaning
substrates
holes
cleaned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63009849A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01184926A (ja
Inventor
Juichi Hirofuji
Ichiro Nakao
Teruto Oonishi
Yoshitaka Dansui
Motomitsu Suzuki
Yoshuki Shimizu
Mitsuyasu Nagahama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP984988A priority Critical patent/JPH01184926A/ja
Publication of JPH01184926A publication Critical patent/JPH01184926A/ja
Publication of JPH0533819B2 publication Critical patent/JPH0533819B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP984988A 1988-01-20 1988-01-20 洗浄装置および洗浄方法 Granted JPH01184926A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP984988A JPH01184926A (ja) 1988-01-20 1988-01-20 洗浄装置および洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP984988A JPH01184926A (ja) 1988-01-20 1988-01-20 洗浄装置および洗浄方法

Publications (2)

Publication Number Publication Date
JPH01184926A JPH01184926A (ja) 1989-07-24
JPH0533819B2 true JPH0533819B2 (enrdf_load_stackoverflow) 1993-05-20

Family

ID=11731582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP984988A Granted JPH01184926A (ja) 1988-01-20 1988-01-20 洗浄装置および洗浄方法

Country Status (1)

Country Link
JP (1) JPH01184926A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5503171A (en) * 1992-12-26 1996-04-02 Tokyo Electron Limited Substrates-washing apparatus
JP3183123B2 (ja) * 1995-08-30 2001-07-03 信越半導体株式会社 エッチング装置
DE19644253A1 (de) * 1996-10-24 1998-05-07 Steag Micro Tech Gmbh Vorrichtung zum Behandeln von Substraten
JP3320640B2 (ja) * 1997-07-23 2002-09-03 東京エレクトロン株式会社 洗浄装置
JPH1154471A (ja) 1997-08-05 1999-02-26 Tokyo Electron Ltd 処理装置及び処理方法
US6115867A (en) 1997-08-18 2000-09-12 Tokyo Electron Limited Apparatus for cleaning both sides of substrate

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848423A (ja) * 1981-09-17 1983-03-22 Matsushita Electric Ind Co Ltd 洗浄槽
JPS6159838A (ja) * 1984-08-31 1986-03-27 Toshiba Ceramics Co Ltd ウエ−ハ洗浄装置
JPS62213257A (ja) * 1986-03-14 1987-09-19 Mitsubishi Electric Corp 湿式処理槽

Also Published As

Publication number Publication date
JPH01184926A (ja) 1989-07-24

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