JPS63268244A - 有機金属気相成長装置 - Google Patents
有機金属気相成長装置Info
- Publication number
- JPS63268244A JPS63268244A JP10277087A JP10277087A JPS63268244A JP S63268244 A JPS63268244 A JP S63268244A JP 10277087 A JP10277087 A JP 10277087A JP 10277087 A JP10277087 A JP 10277087A JP S63268244 A JPS63268244 A JP S63268244A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- material gas
- raw material
- reactor
- switching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title description 5
- 239000002184 metal Substances 0.000 title description 5
- 239000007789 gas Substances 0.000 claims abstract description 66
- 239000012159 carrier gas Substances 0.000 claims abstract description 10
- 150000001875 compounds Chemical class 0.000 claims abstract description 9
- 239000004065 semiconductor Substances 0.000 claims abstract description 9
- 239000002994 raw material Substances 0.000 claims description 34
- 238000001947 vapour-phase growth Methods 0.000 claims description 16
- 125000002524 organometallic group Chemical group 0.000 claims description 13
- 238000010926 purge Methods 0.000 claims description 6
- 238000000927 vapour-phase epitaxy Methods 0.000 claims description 6
- 238000002156 mixing Methods 0.000 claims description 3
- 150000002902 organometallic compounds Chemical class 0.000 claims description 3
- 238000007865 diluting Methods 0.000 claims description 2
- 238000000407 epitaxy Methods 0.000 claims 1
- 150000004678 hydrides Chemical class 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 7
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 230000006698 induction Effects 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract 5
- 238000000197 pyrolysis Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 description 8
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical group C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 7
- 229910052739 hydrogen Inorganic materials 0.000 description 7
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 7
- 150000002431 hydrogen Chemical class 0.000 description 6
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 4
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000014759 maintenance of location Effects 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910000070 arsenic hydride Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- AXAZMDOAUQTMOW-UHFFFAOYSA-N dimethylzinc Chemical compound C[Zn]C AXAZMDOAUQTMOW-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- -1 hydrogen compound Chemical class 0.000 description 1
- 150000002483 hydrogen compounds Chemical class 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10277087A JPS63268244A (ja) | 1987-04-25 | 1987-04-25 | 有機金属気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10277087A JPS63268244A (ja) | 1987-04-25 | 1987-04-25 | 有機金属気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63268244A true JPS63268244A (ja) | 1988-11-04 |
| JPH0573322B2 JPH0573322B2 (enrdf_load_stackoverflow) | 1993-10-14 |
Family
ID=14336400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10277087A Granted JPS63268244A (ja) | 1987-04-25 | 1987-04-25 | 有機金属気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63268244A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005051205A (ja) * | 2003-06-11 | 2005-02-24 | Asm Internatl Nv | ガス供給システム、弁アセンブリ、および弁アセンブリを操作することによる反応物質パルス形成方法 |
| US20130029496A1 (en) * | 2011-07-29 | 2013-01-31 | Asm America, Inc. | Methods and Apparatus for a Gas Panel with Constant Gas Flow |
-
1987
- 1987-04-25 JP JP10277087A patent/JPS63268244A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005051205A (ja) * | 2003-06-11 | 2005-02-24 | Asm Internatl Nv | ガス供給システム、弁アセンブリ、および弁アセンブリを操作することによる反応物質パルス形成方法 |
| US20130029496A1 (en) * | 2011-07-29 | 2013-01-31 | Asm America, Inc. | Methods and Apparatus for a Gas Panel with Constant Gas Flow |
| US8728239B2 (en) * | 2011-07-29 | 2014-05-20 | Asm America, Inc. | Methods and apparatus for a gas panel with constant gas flow |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0573322B2 (enrdf_load_stackoverflow) | 1993-10-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |