JPS6323331A - 蓋体の開閉機構 - Google Patents

蓋体の開閉機構

Info

Publication number
JPS6323331A
JPS6323331A JP61250343A JP25034386A JPS6323331A JP S6323331 A JPS6323331 A JP S6323331A JP 61250343 A JP61250343 A JP 61250343A JP 25034386 A JP25034386 A JP 25034386A JP S6323331 A JPS6323331 A JP S6323331A
Authority
JP
Japan
Prior art keywords
opening
lid
chamber
support
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61250343A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6323653B2 (enExample
Inventor
Akira Uehara
植原　晃
Isamu Hijikata
土方　勇
Juichi Miyazaki
宮崎　重一
Hiroyuki Kiyota
清田　浩之
Hisashi Nakane
中根　久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP61250343A priority Critical patent/JPS6323331A/ja
Publication of JPS6323331A publication Critical patent/JPS6323331A/ja
Publication of JPS6323653B2 publication Critical patent/JPS6323653B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
JP61250343A 1986-10-21 1986-10-21 蓋体の開閉機構 Granted JPS6323331A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61250343A JPS6323331A (ja) 1986-10-21 1986-10-21 蓋体の開閉機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61250343A JPS6323331A (ja) 1986-10-21 1986-10-21 蓋体の開閉機構

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56147559A Division JPS5848935A (ja) 1981-09-18 1981-09-18 自動プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6323331A true JPS6323331A (ja) 1988-01-30
JPS6323653B2 JPS6323653B2 (enExample) 1988-05-17

Family

ID=17206506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61250343A Granted JPS6323331A (ja) 1986-10-21 1986-10-21 蓋体の開閉機構

Country Status (1)

Country Link
JP (1) JPS6323331A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001509640A (ja) * 1997-07-11 2001-07-24 ブルックス オートメーション インコーポレイテッド 正圧力による自動封止アクセス扉

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143661A (ja) * 1990-10-04 1992-05-18 Daikin Ind Ltd 風速測定器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5239210U (enExample) * 1975-09-10 1977-03-19
JPS53153219U (enExample) * 1977-05-09 1978-12-02
JPS559940U (enExample) * 1978-07-07 1980-01-22
JPS5689680A (en) * 1979-12-21 1981-07-21 Tokyo Shibaura Electric Co Switchgear for double door
JPS5730320A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Substrate holder for molecular beam epitaxy

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5239210U (enExample) * 1975-09-10 1977-03-19
JPS53153219U (enExample) * 1977-05-09 1978-12-02
JPS559940U (enExample) * 1978-07-07 1980-01-22
JPS5689680A (en) * 1979-12-21 1981-07-21 Tokyo Shibaura Electric Co Switchgear for double door
JPS5730320A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Substrate holder for molecular beam epitaxy

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001509640A (ja) * 1997-07-11 2001-07-24 ブルックス オートメーション インコーポレイテッド 正圧力による自動封止アクセス扉

Also Published As

Publication number Publication date
JPS6323653B2 (enExample) 1988-05-17

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