JPS6323653B2 - - Google Patents

Info

Publication number
JPS6323653B2
JPS6323653B2 JP61250343A JP25034386A JPS6323653B2 JP S6323653 B2 JPS6323653 B2 JP S6323653B2 JP 61250343 A JP61250343 A JP 61250343A JP 25034386 A JP25034386 A JP 25034386A JP S6323653 B2 JPS6323653 B2 JP S6323653B2
Authority
JP
Japan
Prior art keywords
opening
lid
chamber
support
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61250343A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6323331A (ja
Inventor
Akira Uehara
Isamu Hijikata
Juichi Myazaki
Hiroyuki Kyota
Hisashi Nakane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP61250343A priority Critical patent/JPS6323331A/ja
Publication of JPS6323331A publication Critical patent/JPS6323331A/ja
Publication of JPS6323653B2 publication Critical patent/JPS6323653B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
JP61250343A 1986-10-21 1986-10-21 蓋体の開閉機構 Granted JPS6323331A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61250343A JPS6323331A (ja) 1986-10-21 1986-10-21 蓋体の開閉機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61250343A JPS6323331A (ja) 1986-10-21 1986-10-21 蓋体の開閉機構

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56147559A Division JPS5848935A (ja) 1981-09-18 1981-09-18 自動プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6323331A JPS6323331A (ja) 1988-01-30
JPS6323653B2 true JPS6323653B2 (enExample) 1988-05-17

Family

ID=17206506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61250343A Granted JPS6323331A (ja) 1986-10-21 1986-10-21 蓋体の開閉機構

Country Status (1)

Country Link
JP (1) JPS6323331A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143661A (ja) * 1990-10-04 1992-05-18 Daikin Ind Ltd 風速測定器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5837059A (en) * 1997-07-11 1998-11-17 Brooks Automation, Inc. Automatic positive pressure seal access door

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5239210U (enExample) * 1975-09-10 1977-03-19
JPS53153219U (enExample) * 1977-05-09 1978-12-02
JPS559940U (enExample) * 1978-07-07 1980-01-22
JPS5689680A (en) * 1979-12-21 1981-07-21 Tokyo Shibaura Electric Co Switchgear for double door
JPS5730320A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Substrate holder for molecular beam epitaxy

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143661A (ja) * 1990-10-04 1992-05-18 Daikin Ind Ltd 風速測定器

Also Published As

Publication number Publication date
JPS6323331A (ja) 1988-01-30

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