JPS6315355B2 - - Google Patents

Info

Publication number
JPS6315355B2
JPS6315355B2 JP60012109A JP1210985A JPS6315355B2 JP S6315355 B2 JPS6315355 B2 JP S6315355B2 JP 60012109 A JP60012109 A JP 60012109A JP 1210985 A JP1210985 A JP 1210985A JP S6315355 B2 JPS6315355 B2 JP S6315355B2
Authority
JP
Japan
Prior art keywords
quaternary ammonium
aqueous solution
ammonium hydroxide
reaction
formate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60012109A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61170588A (ja
Inventor
Shunpei Shimizu
Shunren Cho
Osamu Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tama Kagaku Kogyo Co Ltd
Original Assignee
Tama Kagaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tama Kagaku Kogyo Co Ltd filed Critical Tama Kagaku Kogyo Co Ltd
Priority to JP60012109A priority Critical patent/JPS61170588A/ja
Priority to US06/822,073 priority patent/US4634509A/en
Publication of JPS61170588A publication Critical patent/JPS61170588A/ja
Publication of JPS6315355B2 publication Critical patent/JPS6315355B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B3/00—Electrolytic production of organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP60012109A 1985-01-25 1985-01-25 水酸化第四アンモニウム水溶液の製造方法 Granted JPS61170588A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60012109A JPS61170588A (ja) 1985-01-25 1985-01-25 水酸化第四アンモニウム水溶液の製造方法
US06/822,073 US4634509A (en) 1985-01-25 1986-01-24 Method for production of aqueous quaternary ammonium hydroxide solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60012109A JPS61170588A (ja) 1985-01-25 1985-01-25 水酸化第四アンモニウム水溶液の製造方法

Publications (2)

Publication Number Publication Date
JPS61170588A JPS61170588A (ja) 1986-08-01
JPS6315355B2 true JPS6315355B2 (en, 2012) 1988-04-04

Family

ID=11796394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60012109A Granted JPS61170588A (ja) 1985-01-25 1985-01-25 水酸化第四アンモニウム水溶液の製造方法

Country Status (2)

Country Link
US (1) US4634509A (en, 2012)
JP (1) JPS61170588A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006030685A1 (ja) 2004-09-17 2006-03-23 Tama Chemicals Co., Ltd. 電解用電極及びこの電解用電極を用いた水酸化第四アンモニウム水溶液の製造方法

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4776929A (en) * 1986-11-25 1988-10-11 Mitsubishi Gas Chemical Company, Inc. Process for production of quaternary ammonium hydroxides
JPH0819060B2 (ja) * 1987-05-13 1996-02-28 三菱化学株式会社 四級アンモニウム有機酸塩の製造方法
JPH07116113B2 (ja) * 1987-05-14 1995-12-13 三菱化学株式会社 四級アンモニウム無機酸塩の製造方法
US4892944A (en) * 1987-05-13 1990-01-09 Mitsubishi Petrochemical Co., Ltd. Process for producing quaternary salts
DE69307659T2 (de) * 1992-11-10 1997-09-04 Tama Chemicals Co Ltd Methode zur Behandlung von organischem quaternärem Ammonium-hydroxyd enthaltendem Abwasser
US5393386A (en) * 1992-12-28 1995-02-28 Mitsubishi Gas Chemical Company, Inc. Method for preparing aqueous quaternary ammonium hydroxide solution
US5783495A (en) * 1995-11-13 1998-07-21 Micron Technology, Inc. Method of wafer cleaning, and system and cleaning solution regarding same
US5746993A (en) * 1996-10-17 1998-05-05 Advanced Micro Devices, Inc. Process for manufacture of ultra-high purity ammonium hydroxide
US5968338A (en) * 1998-01-20 1999-10-19 Sachem, Inc. Process for recovering onium hydroxides from solutions containing onium compounds
US6288009B1 (en) 1998-04-10 2001-09-11 Basf Corporation Plant growth regulator compositions
US6290863B1 (en) 1999-07-31 2001-09-18 Micron Technology, Inc. Method and apparatus for etch of a specific subarea of a semiconductor work object
FR2803856B1 (fr) * 2000-01-13 2002-07-05 Atofina Synthese de l'hydroxyde de tetramethylammonium
US6508940B1 (en) 2000-10-20 2003-01-21 Sachem, Inc. Process for recovering onium hydroxides from solutions containing onium compounds
UA76478C2 (uk) * 2001-07-09 2006-08-15 Лонза Інк. Способи одержання алкілкарбонатів четвертинного амонію in situ
JP2004161877A (ja) * 2002-11-13 2004-06-10 Shin Etsu Chem Co Ltd 多孔質膜形成用組成物、多孔質膜とその製造方法、層間絶縁膜及び半導体装置
JP2004161876A (ja) * 2002-11-13 2004-06-10 Shin Etsu Chem Co Ltd 多孔質膜形成用組成物、多孔質膜とその製造方法、層間絶縁膜及び半導体装置
JP3884699B2 (ja) * 2002-11-13 2007-02-21 信越化学工業株式会社 多孔質膜形成用組成物、多孔質膜とその製造方法、層間絶縁膜及び半導体装置
JP2004161875A (ja) * 2002-11-13 2004-06-10 Shin Etsu Chem Co Ltd 多孔質膜形成用組成物、多孔質膜とその製造方法、層間絶縁間膜及び半導体装置
JP4139710B2 (ja) * 2003-03-10 2008-08-27 信越化学工業株式会社 多孔質膜形成用組成物、多孔質膜の製造方法、多孔質膜、層間絶縁膜、及び半導体装置
JP2004269693A (ja) * 2003-03-10 2004-09-30 Shin Etsu Chem Co Ltd 多孔質膜形成用組成物及びその製造方法、多孔質膜の製造方法、多孔質膜、層間絶縁膜、及び半導体装置
JP2004292641A (ja) * 2003-03-27 2004-10-21 Shin Etsu Chem Co Ltd 多孔質膜形成用組成物、多孔質膜の製造方法、多孔質膜、層間絶縁膜、及び半導体装置
JP2004307694A (ja) * 2003-04-09 2004-11-04 Shin Etsu Chem Co Ltd 多孔質膜形成用組成物、多孔質膜の製造方法、多孔質膜、層間絶縁膜及び半導体装置。
JP2004307693A (ja) * 2003-04-09 2004-11-04 Shin Etsu Chem Co Ltd 多孔質膜形成用組成物、多孔質膜の製造方法、多孔質膜、層間絶縁膜、及び半導体装置
JP2004307692A (ja) * 2003-04-09 2004-11-04 Shin Etsu Chem Co Ltd 多孔質膜形成用組成物、多孔質膜の製造方法、多孔質膜、層間絶縁膜及び半導体装置
BRPI0509546A (pt) 2004-03-26 2007-12-18 Albemarle Corp um método de produzir um sal quaternário de tetraalquilamÈnio de um segundo ánion e um método de converter um sal quaternário do hidróxido do tetraalquilamÈnio a um sal quaternário do carbonato/bicarbonato do tetraalquilamÈnio
US20070255074A1 (en) * 2004-03-26 2007-11-01 Sauer Joe D Method for Exchanging Anions of Tetraalkylammonium Salts
US20070260089A1 (en) * 2004-03-26 2007-11-08 Albemarle Corporation Method for the Synthesis of Quaternary Ammonium Compounds and Compositions Thereof
US20070167407A1 (en) * 2005-12-20 2007-07-19 Albemarle Corporation Quaternary ammonium borate compositions and substrate preservative solutions containing them
JP5844558B2 (ja) * 2011-06-29 2016-01-20 多摩化学工業株式会社 水酸化テトラアルキルアンモニウム含有廃液の再生処理方法
JP6845222B2 (ja) 2016-03-31 2021-03-17 富士フイルム株式会社 半導体製造用処理液、半導体製造用処理液が収容された収容容器、パターン形成方法及び電子デバイスの製造方法
CN106350831A (zh) * 2016-08-26 2017-01-25 肯特催化材料股份有限公司 分子筛模板剂高纯度金刚烷基三甲基氢氧化铵水溶液的制备方法
CN114570307A (zh) * 2022-03-18 2022-06-03 西安吉利电子新材料股份有限公司 一种从碳酸二甲酯直接生产电子级四甲基氢氧化铵制备系统及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3402115A (en) * 1965-03-12 1968-09-17 Monsanto Co Preparation of quaternary ammonium hydroxides by electrodialysis
US3523068A (en) * 1966-12-19 1970-08-04 Monsanto Co Process for electrolytic preparation of quaternary ammonium compounds
US4394226A (en) * 1981-07-28 1983-07-19 Thiokol Corporation Electrolytic method for producing quaternary ammonium hydroxides
JPS60100690A (ja) * 1983-11-02 1985-06-04 Tama Kagaku Kogyo Kk 水酸化第四アンモニウムの製造方法
JPS60131986A (ja) * 1983-12-19 1985-07-13 Showa Denko Kk 高純度第４級アンモニウム水酸化物の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006030685A1 (ja) 2004-09-17 2006-03-23 Tama Chemicals Co., Ltd. 電解用電極及びこの電解用電極を用いた水酸化第四アンモニウム水溶液の製造方法

Also Published As

Publication number Publication date
JPS61170588A (ja) 1986-08-01
US4634509A (en) 1987-01-06

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