JPS626689Y2 - - Google Patents

Info

Publication number
JPS626689Y2
JPS626689Y2 JP1982033835U JP3383582U JPS626689Y2 JP S626689 Y2 JPS626689 Y2 JP S626689Y2 JP 1982033835 U JP1982033835 U JP 1982033835U JP 3383582 U JP3383582 U JP 3383582U JP S626689 Y2 JPS626689 Y2 JP S626689Y2
Authority
JP
Japan
Prior art keywords
wafer
support jig
wafers
groove portion
wafer support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982033835U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58138337U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3383582U priority Critical patent/JPS58138337U/ja
Publication of JPS58138337U publication Critical patent/JPS58138337U/ja
Application granted granted Critical
Publication of JPS626689Y2 publication Critical patent/JPS626689Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
JP3383582U 1982-03-12 1982-03-12 ウエハ支持治具 Granted JPS58138337U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3383582U JPS58138337U (ja) 1982-03-12 1982-03-12 ウエハ支持治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3383582U JPS58138337U (ja) 1982-03-12 1982-03-12 ウエハ支持治具

Publications (2)

Publication Number Publication Date
JPS58138337U JPS58138337U (ja) 1983-09-17
JPS626689Y2 true JPS626689Y2 (de) 1987-02-16

Family

ID=30045361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3383582U Granted JPS58138337U (ja) 1982-03-12 1982-03-12 ウエハ支持治具

Country Status (1)

Country Link
JP (1) JPS58138337U (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2528108Y2 (ja) * 1991-08-28 1997-03-05 大日本スクリーン製造株式会社 ウエハ保持ホルダ
JP2528111Y2 (ja) * 1991-12-04 1997-03-05 大日本スクリーン製造株式会社 ウエハ保持ホルダ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54124969A (en) * 1978-03-22 1979-09-28 Daicel Ltd Semiconductor wafer container

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139758U (de) * 1976-04-16 1977-10-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54124969A (en) * 1978-03-22 1979-09-28 Daicel Ltd Semiconductor wafer container

Also Published As

Publication number Publication date
JPS58138337U (ja) 1983-09-17

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