JPS52139758U - - Google Patents
Info
- Publication number
- JPS52139758U JPS52139758U JP4736276U JP4736276U JPS52139758U JP S52139758 U JPS52139758 U JP S52139758U JP 4736276 U JP4736276 U JP 4736276U JP 4736276 U JP4736276 U JP 4736276U JP S52139758 U JPS52139758 U JP S52139758U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4736276U JPS52139758U (de) | 1976-04-16 | 1976-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4736276U JPS52139758U (de) | 1976-04-16 | 1976-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52139758U true JPS52139758U (de) | 1977-10-22 |
Family
ID=28506553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4736276U Pending JPS52139758U (de) | 1976-04-16 | 1976-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52139758U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138337U (ja) * | 1982-03-12 | 1983-09-17 | ソニー株式会社 | ウエハ支持治具 |
| JPH0233428U (de) * | 1988-08-26 | 1990-03-02 |
-
1976
- 1976-04-16 JP JP4736276U patent/JPS52139758U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138337U (ja) * | 1982-03-12 | 1983-09-17 | ソニー株式会社 | ウエハ支持治具 |
| JPH0233428U (de) * | 1988-08-26 | 1990-03-02 |