JPS6255312B2 - - Google Patents

Info

Publication number
JPS6255312B2
JPS6255312B2 JP53165150A JP16515078A JPS6255312B2 JP S6255312 B2 JPS6255312 B2 JP S6255312B2 JP 53165150 A JP53165150 A JP 53165150A JP 16515078 A JP16515078 A JP 16515078A JP S6255312 B2 JPS6255312 B2 JP S6255312B2
Authority
JP
Japan
Prior art keywords
oxide film
molybdenum
gate
phosphorus
polycrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53165150A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5591872A (en
Inventor
Tadatoshi Nozaki
Hidekazu Okabayashi
Fumihiko Yanagawa
Takao Amasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP16515078A priority Critical patent/JPS5591872A/ja
Publication of JPS5591872A publication Critical patent/JPS5591872A/ja
Publication of JPS6255312B2 publication Critical patent/JPS6255312B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP16515078A 1978-12-29 1978-12-29 Manufacture of semiconductor device Granted JPS5591872A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16515078A JPS5591872A (en) 1978-12-29 1978-12-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16515078A JPS5591872A (en) 1978-12-29 1978-12-29 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5591872A JPS5591872A (en) 1980-07-11
JPS6255312B2 true JPS6255312B2 (cs) 1987-11-19

Family

ID=15806823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16515078A Granted JPS5591872A (en) 1978-12-29 1978-12-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5591872A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916346A (ja) * 1982-07-19 1984-01-27 Matsushita Electronics Corp 半導体装置の製造方法
JPS61140177A (ja) * 1984-12-13 1986-06-27 Nippon Precision Saakitsutsu Kk 半導体装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958788A (cs) * 1972-10-04 1974-06-07
JPS523390A (en) * 1975-06-27 1977-01-11 Toshiba Corp Manufacturing method of semiconductor device
JPS5299085A (en) * 1976-02-16 1977-08-19 Mitsubishi Electric Corp Production of semiconductor device

Also Published As

Publication number Publication date
JPS5591872A (en) 1980-07-11

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