JPS5591872A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5591872A
JPS5591872A JP16515078A JP16515078A JPS5591872A JP S5591872 A JPS5591872 A JP S5591872A JP 16515078 A JP16515078 A JP 16515078A JP 16515078 A JP16515078 A JP 16515078A JP S5591872 A JPS5591872 A JP S5591872A
Authority
JP
Japan
Prior art keywords
oxide film
film
heat treatment
mos transistor
gate oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16515078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255312B2 (cs
Inventor
Tadatoshi Nozaki
Hidekazu Okabayashi
Fumihiko Yanagawa
Takao Amasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP16515078A priority Critical patent/JPS5591872A/ja
Publication of JPS5591872A publication Critical patent/JPS5591872A/ja
Publication of JPS6255312B2 publication Critical patent/JPS6255312B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP16515078A 1978-12-29 1978-12-29 Manufacture of semiconductor device Granted JPS5591872A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16515078A JPS5591872A (en) 1978-12-29 1978-12-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16515078A JPS5591872A (en) 1978-12-29 1978-12-29 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5591872A true JPS5591872A (en) 1980-07-11
JPS6255312B2 JPS6255312B2 (cs) 1987-11-19

Family

ID=15806823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16515078A Granted JPS5591872A (en) 1978-12-29 1978-12-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5591872A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916346A (ja) * 1982-07-19 1984-01-27 Matsushita Electronics Corp 半導体装置の製造方法
JPS61140177A (ja) * 1984-12-13 1986-06-27 Nippon Precision Saakitsutsu Kk 半導体装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958788A (cs) * 1972-10-04 1974-06-07
JPS523390A (en) * 1975-06-27 1977-01-11 Toshiba Corp Manufacturing method of semiconductor device
JPS5299085A (en) * 1976-02-16 1977-08-19 Mitsubishi Electric Corp Production of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958788A (cs) * 1972-10-04 1974-06-07
JPS523390A (en) * 1975-06-27 1977-01-11 Toshiba Corp Manufacturing method of semiconductor device
JPS5299085A (en) * 1976-02-16 1977-08-19 Mitsubishi Electric Corp Production of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916346A (ja) * 1982-07-19 1984-01-27 Matsushita Electronics Corp 半導体装置の製造方法
JPS61140177A (ja) * 1984-12-13 1986-06-27 Nippon Precision Saakitsutsu Kk 半導体装置

Also Published As

Publication number Publication date
JPS6255312B2 (cs) 1987-11-19

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