JPS6231492B2 - - Google Patents

Info

Publication number
JPS6231492B2
JPS6231492B2 JP55003864A JP386480A JPS6231492B2 JP S6231492 B2 JPS6231492 B2 JP S6231492B2 JP 55003864 A JP55003864 A JP 55003864A JP 386480 A JP386480 A JP 386480A JP S6231492 B2 JPS6231492 B2 JP S6231492B2
Authority
JP
Japan
Prior art keywords
oxide film
film
silicon oxide
oxidation
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55003864A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56100443A (en
Inventor
Kazuhiko Tsuji
Takashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP386480A priority Critical patent/JPS56100443A/ja
Publication of JPS56100443A publication Critical patent/JPS56100443A/ja
Publication of JPS6231492B2 publication Critical patent/JPS6231492B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/012—
    • H10W10/13—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Weting (AREA)
JP386480A 1980-01-16 1980-01-16 Manufacture of semiconductor device Granted JPS56100443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP386480A JPS56100443A (en) 1980-01-16 1980-01-16 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP386480A JPS56100443A (en) 1980-01-16 1980-01-16 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS56100443A JPS56100443A (en) 1981-08-12
JPS6231492B2 true JPS6231492B2 (enExample) 1987-07-08

Family

ID=11569056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP386480A Granted JPS56100443A (en) 1980-01-16 1980-01-16 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56100443A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117866A (ja) * 1983-11-29 1985-06-25 Toshiba Corp 画情報読取装置
JPS60128636A (ja) * 1983-12-16 1985-07-09 Toshiba Corp 半導体装置の製造方法
JP2603238B2 (ja) * 1987-02-17 1997-04-23 キヤノン株式会社 給紙装置
JP2632829B2 (ja) * 1987-02-17 1997-07-23 キヤノン株式会社 給紙装置

Also Published As

Publication number Publication date
JPS56100443A (en) 1981-08-12

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