JPS6231487B2 - - Google Patents

Info

Publication number
JPS6231487B2
JPS6231487B2 JP13991776A JP13991776A JPS6231487B2 JP S6231487 B2 JPS6231487 B2 JP S6231487B2 JP 13991776 A JP13991776 A JP 13991776A JP 13991776 A JP13991776 A JP 13991776A JP S6231487 B2 JPS6231487 B2 JP S6231487B2
Authority
JP
Japan
Prior art keywords
layer
weight
total amount
electrode
alloying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13991776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5364467A (en
Inventor
Yoshifumi Mori
Kenji Morisane
Tsuneyoshi Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP13991776A priority Critical patent/JPS5364467A/ja
Publication of JPS5364467A publication Critical patent/JPS5364467A/ja
Publication of JPS6231487B2 publication Critical patent/JPS6231487B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP13991776A 1976-11-20 1976-11-20 Electrode Granted JPS5364467A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13991776A JPS5364467A (en) 1976-11-20 1976-11-20 Electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13991776A JPS5364467A (en) 1976-11-20 1976-11-20 Electrode

Publications (2)

Publication Number Publication Date
JPS5364467A JPS5364467A (en) 1978-06-08
JPS6231487B2 true JPS6231487B2 (cs) 1987-07-08

Family

ID=15256647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13991776A Granted JPS5364467A (en) 1976-11-20 1976-11-20 Electrode

Country Status (1)

Country Link
JP (1) JPS5364467A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4301188A (en) * 1979-10-01 1981-11-17 Bell Telephone Laboratories, Incorporated Process for producing contact to GaAs active region
JPS56116619A (en) * 1980-02-20 1981-09-12 Matsushita Electric Ind Co Ltd Electrode formation to gallium aluminum arsenic crystal
JPS5928376A (ja) * 1982-08-09 1984-02-15 Hitachi Ltd 半導体装置およびその製造方法

Also Published As

Publication number Publication date
JPS5364467A (en) 1978-06-08

Similar Documents

Publication Publication Date Title
US4186410A (en) Nonalloyed ohmic contacts to n-type Group III(a)-V(a) semiconductors
JPH081896B2 (ja) ガリウムヒ素への接触構造及びその製造方法
US5731224A (en) Method for manufacturing ohmic contacts for compound semiconductors
JP2893723B2 (ja) オーミック電極の製造方法
JP2907452B2 (ja) 化合物半導体用電極
US4942451A (en) Semiconductor device having improved antireflection coating
US6313534B1 (en) Ohmic electrode, method and multi-layered structure for making same
JPS6231487B2 (cs)
US4613890A (en) Alloyed contact for n-conducting GaAlAs-semi-conductor material
US20210288159A1 (en) Semiconductor device
JPS6354231B2 (cs)
JP2761735B2 (ja) 耐熱性オーミック電極及び当該耐熱性オーミック電極の製造方法
JP3096133B2 (ja) 化合物半導体装置
JP2599432B2 (ja) オーミック電極の形成方法
JP2599433B2 (ja) オーミック電極の形成方法
JPS60242619A (ja) 半導体オ−ム性電極の形成方法
JPH0283920A (ja) 半導体装置の製造方法
JP2719678B2 (ja) オーミック電極及びその形成方法
JPH0616502B2 (ja) 半導体素子の製造方法
JPH0562928A (ja) 化合物半導体装置及びその製造方法
JP2977378B2 (ja) オーミック電極
JPS58100455A (ja) 化合物半導体のオ−ミツク電極およびその製造方法
JPH0131310B2 (cs)
JPH029170A (ja) オーミック電極
JPH0554269B2 (cs)