JPS6230512B2 - - Google Patents
Info
- Publication number
- JPS6230512B2 JPS6230512B2 JP53125682A JP12568278A JPS6230512B2 JP S6230512 B2 JPS6230512 B2 JP S6230512B2 JP 53125682 A JP53125682 A JP 53125682A JP 12568278 A JP12568278 A JP 12568278A JP S6230512 B2 JPS6230512 B2 JP S6230512B2
- Authority
- JP
- Japan
- Prior art keywords
- amorphous
- amorphous semiconductor
- host matrix
- semiconductor material
- matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 167
- 239000000463 material Substances 0.000 claims description 154
- 239000011159 matrix material Substances 0.000 claims description 107
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 22
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 21
- 229910052796 boron Inorganic materials 0.000 claims description 21
- 230000008859 change Effects 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000007787 solid Substances 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 19
- 239000000126 substance Substances 0.000 claims description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 229910052799 carbon Inorganic materials 0.000 claims description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 229910052721 tungsten Inorganic materials 0.000 claims description 12
- 230000004913 activation Effects 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 11
- 239000010937 tungsten Substances 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052714 tellurium Inorganic materials 0.000 claims description 3
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims description 3
- 239000003607 modifier Substances 0.000 description 23
- 229910021417 amorphous silicon Inorganic materials 0.000 description 17
- 239000000758 substrate Substances 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 239000013078 crystal Substances 0.000 description 14
- 229910052732 germanium Inorganic materials 0.000 description 14
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 14
- 230000003993 interaction Effects 0.000 description 12
- 239000002178 crystalline material Substances 0.000 description 11
- 238000000151 deposition Methods 0.000 description 11
- 239000002019 doping agent Substances 0.000 description 11
- 230000009477 glass transition Effects 0.000 description 10
- 230000008021 deposition Effects 0.000 description 9
- 230000008018 melting Effects 0.000 description 9
- 238000002844 melting Methods 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 230000002950 deficient Effects 0.000 description 8
- 229910021419 crystalline silicon Inorganic materials 0.000 description 7
- 230000007423 decrease Effects 0.000 description 7
- 125000004429 atom Chemical group 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 230000000737 periodic effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052723 transition metal Inorganic materials 0.000 description 4
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000007792 addition Methods 0.000 description 3
- 238000003491 array Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 150000003624 transition metals Chemical class 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000000370 acceptor Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 241000347389 Serranus cabrilla Species 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000002547 anomalous effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000536 complexating effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- -1 gatlinium or erbium Chemical compound 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009396 hybridization Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 150000003017 phosphorus Chemical class 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 230000037081 physical activity Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052990 silicon hydride Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/855—Thermoelectric active materials comprising inorganic compositions comprising compounds containing boron, carbon, oxygen or nitrogen
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/40—Crystalline structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/18—Photovoltaic cells having only Schottky potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
- H10F77/162—Non-monocrystalline materials, e.g. semiconductor particles embedded in insulating materials
- H10F77/166—Amorphous semiconductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/8556—Thermoelectric active materials comprising inorganic compositions comprising compounds containing germanium or silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Bipolar Transistors (AREA)
- Photovoltaic Devices (AREA)
- Light Receiving Elements (AREA)
- Physical Vapour Deposition (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Silicon Compounds (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/841,369 US4177474A (en) | 1977-05-18 | 1977-10-12 | High temperature amorphous semiconductor member and method of making the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5464981A JPS5464981A (en) | 1979-05-25 |
JPS6230512B2 true JPS6230512B2 (enrdf_load_stackoverflow) | 1987-07-02 |
Family
ID=25284694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12568278A Granted JPS5464981A (en) | 1977-10-12 | 1978-10-12 | High temperature amorphous semiconductor member and method of producing same |
Country Status (7)
Country | Link |
---|---|
JP (1) | JPS5464981A (enrdf_load_stackoverflow) |
AU (1) | AU523107B2 (enrdf_load_stackoverflow) |
CA (1) | CA1123525A (enrdf_load_stackoverflow) |
DE (1) | DE2844070A1 (enrdf_load_stackoverflow) |
ES (1) | ES474153A1 (enrdf_load_stackoverflow) |
FR (1) | FR2454186A1 (enrdf_load_stackoverflow) |
GB (1) | GB2007021B (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010531062A (ja) * | 2007-06-22 | 2010-09-16 | オヴォニクス,インコーポレイテッド | 改善動作特性を有する多層カルコゲナイド及び関連デバイス |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57136377A (en) * | 1981-02-17 | 1982-08-23 | Kanegafuchi Chem Ind Co Ltd | Amorphous silicon nitride/amorphous silicon heterojunction photoelectric element |
SE455554B (sv) * | 1980-09-09 | 1988-07-18 | Energy Conversion Devices Inc | Fotospenningsdon |
CA1176740A (en) * | 1980-12-03 | 1984-10-23 | Yoshihisa Tawada | High-voltage photovoltaic cell having a hetero junction of amorphous semiconductor and amorphous silicon |
IE53485B1 (en) * | 1981-02-12 | 1988-11-23 | Energy Conversion Devices Inc | Improved photoresponsive amorphous alloys |
JPH03188682A (ja) * | 1981-04-30 | 1991-08-16 | Kanegafuchi Chem Ind Co Ltd | 高電圧アモルファス半導体/アモルファスシリコン・ヘテロ接合光起電力素子 |
JPS5814583A (ja) * | 1981-07-17 | 1983-01-27 | Kanegafuchi Chem Ind Co Ltd | アモルフアス半導体およびアモルフアス半導体/アモルフアスシリコン・ヘテロ接合光起電力素子 |
EP0070509B2 (en) * | 1981-07-17 | 1993-05-19 | Kanegafuchi Kagaku Kogyo Kabushiki Kaisha | Amorphous semiconductor and amorphous silicon photovoltaic device |
DE3277665D1 (en) * | 1981-08-07 | 1987-12-17 | British Petroleum Co Plc | Non-volatile electrically programmable memory device |
JPS62162366A (ja) * | 1981-09-17 | 1987-07-18 | Semiconductor Energy Lab Co Ltd | 炭素被膜を有する複合体 |
JPH07105507B2 (ja) * | 1982-02-25 | 1995-11-13 | プラズマ・フィジクス・コ−ポレ−ション | 光起電力装置 |
DE3314197A1 (de) * | 1982-04-28 | 1983-11-03 | Energy Conversion Devices, Inc., 48084 Troy, Mich. | P-leitende amorphe siliziumlegierung mit grossem bandabstand und herstellungsverfahren dafuer |
JPS5957407A (ja) * | 1982-09-27 | 1984-04-03 | Sanyo Electric Co Ltd | 光起電力装置 |
JPS59108370A (ja) * | 1982-12-14 | 1984-06-22 | Kanegafuchi Chem Ind Co Ltd | 光起電力装置 |
JPS58180074A (ja) * | 1983-03-28 | 1983-10-21 | Shunpei Yamazaki | 光電変換半導体装置 |
EP0135294A3 (en) * | 1983-07-18 | 1986-08-20 | Energy Conversion Devices, Inc. | Enhanced narrow band gap alloys for photovoltaic applications |
US4569697A (en) * | 1983-08-26 | 1986-02-11 | Energy Conversion Devices, Inc. | Method of forming photovoltaic quality amorphous alloys by passivating defect states |
JPS62162367A (ja) * | 1986-11-19 | 1987-07-18 | Semiconductor Energy Lab Co Ltd | 炭素被膜を有する複合体 |
JPS6316678A (ja) * | 1986-12-26 | 1988-01-23 | Shunpei Yamazaki | 光電変換装置 |
JP2648733B2 (ja) * | 1993-11-18 | 1997-09-03 | プラズマ・フィジクス・コーポレーション | 半導体装置 |
JPH077168A (ja) * | 1994-04-15 | 1995-01-10 | Semiconductor Energy Lab Co Ltd | 光電変換半導体装置 |
TWI245288B (en) * | 2003-03-20 | 2005-12-11 | Sony Corp | Semiconductor memory element and semiconductor memory device using the same |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51128268A (en) * | 1975-04-30 | 1976-11-09 | Sony Corp | Semiconductor unit |
CA1078078A (en) * | 1976-03-22 | 1980-05-20 | David E. Carlson | Schottky barrier semiconductor device and method of making same |
-
1978
- 1978-09-20 CA CA311,648A patent/CA1123525A/en not_active Expired
- 1978-09-27 AU AU40237/78A patent/AU523107B2/en not_active Expired
- 1978-10-03 GB GB7839177A patent/GB2007021B/en not_active Expired
- 1978-10-10 DE DE19782844070 patent/DE2844070A1/de active Granted
- 1978-10-10 FR FR7828855A patent/FR2454186A1/fr active Granted
- 1978-10-11 ES ES474153A patent/ES474153A1/es not_active Expired
- 1978-10-12 JP JP12568278A patent/JPS5464981A/ja active Granted
Non-Patent Citations (2)
Title |
---|
PHILOSMAG=1977 * |
SOLIDSTATECOMMUN=1975 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010531062A (ja) * | 2007-06-22 | 2010-09-16 | オヴォニクス,インコーポレイテッド | 改善動作特性を有する多層カルコゲナイド及び関連デバイス |
Also Published As
Publication number | Publication date |
---|---|
DE2844070C2 (enrdf_load_stackoverflow) | 1990-02-01 |
AU523107B2 (en) | 1982-07-15 |
DE2844070A1 (de) | 1979-04-26 |
AU4023778A (en) | 1980-04-03 |
FR2454186B1 (enrdf_load_stackoverflow) | 1984-08-24 |
GB2007021A (en) | 1979-05-10 |
JPS5464981A (en) | 1979-05-25 |
GB2007021B (en) | 1982-05-06 |
FR2454186A1 (fr) | 1980-11-07 |
ES474153A1 (es) | 1979-10-16 |
CA1123525A (en) | 1982-05-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4177474A (en) | High temperature amorphous semiconductor member and method of making the same | |
JPS6230512B2 (enrdf_load_stackoverflow) | ||
US4177473A (en) | Amorphous semiconductor member and method of making the same | |
US4077818A (en) | Process for utilizing low-cost graphite substrates for polycrystalline solar cells | |
US6838308B2 (en) | Semiconductor polysilicon component and method of manufacture thereof | |
US6896731B1 (en) | P-type single crystal zinc-oxide having low resistivity and method for preparation thereof | |
US4520380A (en) | Amorphous semiconductors equivalent to crystalline semiconductors | |
US4710786A (en) | Wide band gap semiconductor alloy material | |
JPH0513342A (ja) | 半導体ダイヤモンド | |
US4839312A (en) | Fluorinated precursors from which to fabricate amorphous semiconductor material | |
US20150263201A1 (en) | Methods of growing heteroepitaxial single crystal or large grained semiconductor films and devices thereon | |
JPS6248390B2 (enrdf_load_stackoverflow) | ||
JP2854038B2 (ja) | 半導体素子 | |
US6677515B2 (en) | High performance thermoelectric material and method of fabrication | |
TW201110831A (en) | Plasma apparatus and method of fabricating nano-crystalline silicon thin film | |
JP3181074B2 (ja) | Cu系カルコパイライト膜の製造方法 | |
JPH0476217B2 (enrdf_load_stackoverflow) | ||
JP3234403B2 (ja) | 半導体薄膜の製造方法 | |
JP2675174B2 (ja) | 太陽電池の製造方法 | |
JPH0284773A (ja) | 薄膜トランジスタ及びその製造方法 | |
US20230066135A1 (en) | Semiconductor device | |
JPH10214790A (ja) | シリコン系半導体薄膜の製造方法 | |
WO2013133060A1 (ja) | 半導体コンタクト構造及びその形成方法 | |
JP2649221B2 (ja) | 堆積膜形成法 | |
JPS58212178A (ja) | 薄膜電界効果トランジスタおよびその製造方法 |