JPS62223054A - 感湿素子並びにその製造方法 - Google Patents

感湿素子並びにその製造方法

Info

Publication number
JPS62223054A
JPS62223054A JP61066715A JP6671586A JPS62223054A JP S62223054 A JPS62223054 A JP S62223054A JP 61066715 A JP61066715 A JP 61066715A JP 6671586 A JP6671586 A JP 6671586A JP S62223054 A JPS62223054 A JP S62223054A
Authority
JP
Japan
Prior art keywords
moisture
manufacturing
composite oxide
paste
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61066715A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541589B2 (enrdf_load_stackoverflow
Inventor
木下　実
康仁 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koatsu Gas Kogyo Co Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Koatsu Gas Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Koatsu Gas Kogyo Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP61066715A priority Critical patent/JPS62223054A/ja
Publication of JPS62223054A publication Critical patent/JPS62223054A/ja
Publication of JPH0541589B2 publication Critical patent/JPH0541589B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Non-Adjustable Resistors (AREA)
JP61066715A 1986-03-24 1986-03-24 感湿素子並びにその製造方法 Granted JPS62223054A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61066715A JPS62223054A (ja) 1986-03-24 1986-03-24 感湿素子並びにその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61066715A JPS62223054A (ja) 1986-03-24 1986-03-24 感湿素子並びにその製造方法

Publications (2)

Publication Number Publication Date
JPS62223054A true JPS62223054A (ja) 1987-10-01
JPH0541589B2 JPH0541589B2 (enrdf_load_stackoverflow) 1993-06-23

Family

ID=13323882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61066715A Granted JPS62223054A (ja) 1986-03-24 1986-03-24 感湿素子並びにその製造方法

Country Status (1)

Country Link
JP (1) JPS62223054A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0194256A (ja) * 1987-10-06 1989-04-12 Murata Mfg Co Ltd 湿度センサー
JP2005017285A (ja) * 2003-05-30 2005-01-20 Ngk Spark Plug Co Ltd 湿度センサ及び湿度センサの使用方法
JP2007101477A (ja) * 2005-10-07 2007-04-19 Fuji Electric Fa Components & Systems Co Ltd 薄膜ガスセンサ
JP2007322184A (ja) * 2006-05-31 2007-12-13 Ngk Spark Plug Co Ltd アンモニアガスセンサ
WO2012099088A1 (ja) * 2011-01-21 2012-07-26 株式会社村田製作所 感湿セラミック材料および感湿セラミック素子

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363409A (en) * 1976-11-17 1978-06-06 Matsushita Electric Ind Co Ltd Method of manufacturing sintered sheets with high porosity
JPS57106568A (en) * 1980-12-22 1982-07-02 Murata Manufacturing Co Moisture sensitive ceramic
JPS5835901A (ja) * 1981-08-28 1983-03-02 株式会社東芝 感湿素子
JPS6166714A (ja) * 1984-09-10 1986-04-05 Toyo Electric Mfg Co Ltd エポキシ樹脂組成物

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363409A (en) * 1976-11-17 1978-06-06 Matsushita Electric Ind Co Ltd Method of manufacturing sintered sheets with high porosity
JPS57106568A (en) * 1980-12-22 1982-07-02 Murata Manufacturing Co Moisture sensitive ceramic
JPS5835901A (ja) * 1981-08-28 1983-03-02 株式会社東芝 感湿素子
JPS6166714A (ja) * 1984-09-10 1986-04-05 Toyo Electric Mfg Co Ltd エポキシ樹脂組成物

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0194256A (ja) * 1987-10-06 1989-04-12 Murata Mfg Co Ltd 湿度センサー
JP2005017285A (ja) * 2003-05-30 2005-01-20 Ngk Spark Plug Co Ltd 湿度センサ及び湿度センサの使用方法
JP2007101477A (ja) * 2005-10-07 2007-04-19 Fuji Electric Fa Components & Systems Co Ltd 薄膜ガスセンサ
JP2007322184A (ja) * 2006-05-31 2007-12-13 Ngk Spark Plug Co Ltd アンモニアガスセンサ
WO2012099088A1 (ja) * 2011-01-21 2012-07-26 株式会社村田製作所 感湿セラミック材料および感湿セラミック素子
CN103328961A (zh) * 2011-01-21 2013-09-25 株式会社村田制作所 湿敏陶瓷材料及湿敏陶瓷元件
JPWO2012099088A1 (ja) * 2011-01-21 2014-06-30 株式会社村田製作所 感湿セラミック材料および感湿セラミック素子

Also Published As

Publication number Publication date
JPH0541589B2 (enrdf_load_stackoverflow) 1993-06-23

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