JPS6215868A - 集積回路用コンタクトの製造方法 - Google Patents

集積回路用コンタクトの製造方法

Info

Publication number
JPS6215868A
JPS6215868A JP60154505A JP15450585A JPS6215868A JP S6215868 A JPS6215868 A JP S6215868A JP 60154505 A JP60154505 A JP 60154505A JP 15450585 A JP15450585 A JP 15450585A JP S6215868 A JPS6215868 A JP S6215868A
Authority
JP
Japan
Prior art keywords
superconducting
resist pattern
layer
insulating layer
wiring layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60154505A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0511433B2 (enrdf_load_stackoverflow
Inventor
Masahiro Aoyanagi
昌宏 青柳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60154505A priority Critical patent/JPS6215868A/ja
Publication of JPS6215868A publication Critical patent/JPS6215868A/ja
Publication of JPH0511433B2 publication Critical patent/JPH0511433B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP60154505A 1985-07-13 1985-07-13 集積回路用コンタクトの製造方法 Granted JPS6215868A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60154505A JPS6215868A (ja) 1985-07-13 1985-07-13 集積回路用コンタクトの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60154505A JPS6215868A (ja) 1985-07-13 1985-07-13 集積回路用コンタクトの製造方法

Publications (2)

Publication Number Publication Date
JPS6215868A true JPS6215868A (ja) 1987-01-24
JPH0511433B2 JPH0511433B2 (enrdf_load_stackoverflow) 1993-02-15

Family

ID=15585707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60154505A Granted JPS6215868A (ja) 1985-07-13 1985-07-13 集積回路用コンタクトの製造方法

Country Status (1)

Country Link
JP (1) JPS6215868A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63205975A (ja) * 1987-02-23 1988-08-25 Agency Of Ind Science & Technol ジヨセフソン接合素子の製造方法
JPH04314370A (ja) * 1991-04-11 1992-11-05 Nec Corp 超伝導積層素子とその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58209181A (ja) * 1982-05-31 1983-12-06 Nec Corp ジヨセフソン接合素子の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58209181A (ja) * 1982-05-31 1983-12-06 Nec Corp ジヨセフソン接合素子の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63205975A (ja) * 1987-02-23 1988-08-25 Agency Of Ind Science & Technol ジヨセフソン接合素子の製造方法
JPH04314370A (ja) * 1991-04-11 1992-11-05 Nec Corp 超伝導積層素子とその製造方法

Also Published As

Publication number Publication date
JPH0511433B2 (enrdf_load_stackoverflow) 1993-02-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term