JPS62120474A - 薄膜製造装置 - Google Patents

薄膜製造装置

Info

Publication number
JPS62120474A
JPS62120474A JP25985685A JP25985685A JPS62120474A JP S62120474 A JPS62120474 A JP S62120474A JP 25985685 A JP25985685 A JP 25985685A JP 25985685 A JP25985685 A JP 25985685A JP S62120474 A JPS62120474 A JP S62120474A
Authority
JP
Japan
Prior art keywords
film
temperature
thin film
polymer film
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25985685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435555B2 (enExample
Inventor
Toshihiko Toda
敏彦 戸田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP25985685A priority Critical patent/JPS62120474A/ja
Publication of JPS62120474A publication Critical patent/JPS62120474A/ja
Publication of JPH0435555B2 publication Critical patent/JPH0435555B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
JP25985685A 1985-11-21 1985-11-21 薄膜製造装置 Granted JPS62120474A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25985685A JPS62120474A (ja) 1985-11-21 1985-11-21 薄膜製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25985685A JPS62120474A (ja) 1985-11-21 1985-11-21 薄膜製造装置

Publications (2)

Publication Number Publication Date
JPS62120474A true JPS62120474A (ja) 1987-06-01
JPH0435555B2 JPH0435555B2 (enExample) 1992-06-11

Family

ID=17339922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25985685A Granted JPS62120474A (ja) 1985-11-21 1985-11-21 薄膜製造装置

Country Status (1)

Country Link
JP (1) JPS62120474A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02166280A (ja) * 1988-12-21 1990-06-26 Matsushita Electric Ind Co Ltd フイルムの温度処理方法
JP2016204727A (ja) * 2015-04-28 2016-12-08 東レ株式会社 成膜装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162274A (ja) * 1983-03-07 1984-09-13 Anelva Corp 連続薄膜製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162274A (ja) * 1983-03-07 1984-09-13 Anelva Corp 連続薄膜製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02166280A (ja) * 1988-12-21 1990-06-26 Matsushita Electric Ind Co Ltd フイルムの温度処理方法
JP2016204727A (ja) * 2015-04-28 2016-12-08 東レ株式会社 成膜装置

Also Published As

Publication number Publication date
JPH0435555B2 (enExample) 1992-06-11

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