JPS6190405A - 垂直磁化膜の製造方法 - Google Patents
垂直磁化膜の製造方法Info
- Publication number
- JPS6190405A JPS6190405A JP21223484A JP21223484A JPS6190405A JP S6190405 A JPS6190405 A JP S6190405A JP 21223484 A JP21223484 A JP 21223484A JP 21223484 A JP21223484 A JP 21223484A JP S6190405 A JPS6190405 A JP S6190405A
- Authority
- JP
- Japan
- Prior art keywords
- chromium
- cobalt
- film
- substrate
- magnetized film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 230000005291 magnetic effect Effects 0.000 claims abstract description 32
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 30
- 230000005415 magnetization Effects 0.000 claims abstract description 29
- 239000011651 chromium Substances 0.000 claims abstract description 28
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 27
- 239000010941 cobalt Substances 0.000 claims abstract description 26
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000001301 oxygen Substances 0.000 claims abstract description 13
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims abstract description 7
- WAIPAZQMEIHHTJ-UHFFFAOYSA-N [Cr].[Co] Chemical class [Cr].[Co] WAIPAZQMEIHHTJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 6
- 238000005260 corrosion Methods 0.000 abstract description 11
- 230000007797 corrosion Effects 0.000 abstract description 11
- 238000001704 evaporation Methods 0.000 abstract description 3
- 229910000531 Co alloy Inorganic materials 0.000 abstract description 2
- 229910000599 Cr alloy Inorganic materials 0.000 abstract description 2
- 229920006395 saturated elastomer Polymers 0.000 abstract 2
- 150000002739 metals Chemical class 0.000 abstract 1
- 229920003002 synthetic resin Polymers 0.000 abstract 1
- 239000000057 synthetic resin Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 35
- 230000003647 oxidation Effects 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 3
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910000428 cobalt oxide Inorganic materials 0.000 description 3
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 3
- 239000010952 cobalt-chrome Substances 0.000 description 3
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000001420 photoelectron spectroscopy Methods 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21223484A JPS6190405A (ja) | 1984-10-09 | 1984-10-09 | 垂直磁化膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21223484A JPS6190405A (ja) | 1984-10-09 | 1984-10-09 | 垂直磁化膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6190405A true JPS6190405A (ja) | 1986-05-08 |
| JPH0582724B2 JPH0582724B2 (enExample) | 1993-11-22 |
Family
ID=16619178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21223484A Granted JPS6190405A (ja) | 1984-10-09 | 1984-10-09 | 垂直磁化膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190405A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005109406A1 (en) * | 2004-05-03 | 2005-11-17 | Imation Corp. | Environmentally stable metal-evaporated recording media |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57197813A (en) * | 1981-05-29 | 1982-12-04 | Nippon Gakki Seizo Kk | Magnetic recording tape |
| JPS5917216A (ja) * | 1982-07-20 | 1984-01-28 | Ulvac Corp | 磁気記録体並にその製造法 |
| JPS59140629A (ja) * | 1983-01-31 | 1984-08-13 | Hitachi Ltd | 垂直磁気記録媒体の製造方法 |
-
1984
- 1984-10-09 JP JP21223484A patent/JPS6190405A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57197813A (en) * | 1981-05-29 | 1982-12-04 | Nippon Gakki Seizo Kk | Magnetic recording tape |
| JPS5917216A (ja) * | 1982-07-20 | 1984-01-28 | Ulvac Corp | 磁気記録体並にその製造法 |
| JPS59140629A (ja) * | 1983-01-31 | 1984-08-13 | Hitachi Ltd | 垂直磁気記録媒体の製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005109406A1 (en) * | 2004-05-03 | 2005-11-17 | Imation Corp. | Environmentally stable metal-evaporated recording media |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0582724B2 (enExample) | 1993-11-22 |
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