JPS6156875B2 - - Google Patents

Info

Publication number
JPS6156875B2
JPS6156875B2 JP54163121A JP16312179A JPS6156875B2 JP S6156875 B2 JPS6156875 B2 JP S6156875B2 JP 54163121 A JP54163121 A JP 54163121A JP 16312179 A JP16312179 A JP 16312179A JP S6156875 B2 JPS6156875 B2 JP S6156875B2
Authority
JP
Japan
Prior art keywords
film
deposited
substrate
forming
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54163121A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5683087A (en
Inventor
Yaichiro Watakabe
Tadao Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP16312179A priority Critical patent/JPS5683087A/ja
Publication of JPS5683087A publication Critical patent/JPS5683087A/ja
Publication of JPS6156875B2 publication Critical patent/JPS6156875B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP16312179A 1979-12-11 1979-12-11 Manufacture of josephson element Granted JPS5683087A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16312179A JPS5683087A (en) 1979-12-11 1979-12-11 Manufacture of josephson element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16312179A JPS5683087A (en) 1979-12-11 1979-12-11 Manufacture of josephson element

Publications (2)

Publication Number Publication Date
JPS5683087A JPS5683087A (en) 1981-07-07
JPS6156875B2 true JPS6156875B2 (enrdf_load_stackoverflow) 1986-12-04

Family

ID=15767570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16312179A Granted JPS5683087A (en) 1979-12-11 1979-12-11 Manufacture of josephson element

Country Status (1)

Country Link
JP (1) JPS5683087A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146987A (en) * 1979-05-07 1980-11-15 Fujitsu Ltd Manufacture of tunnel junction type josephson element

Also Published As

Publication number Publication date
JPS5683087A (en) 1981-07-07

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