JPH0511432B2 - - Google Patents

Info

Publication number
JPH0511432B2
JPH0511432B2 JP60102698A JP10269885A JPH0511432B2 JP H0511432 B2 JPH0511432 B2 JP H0511432B2 JP 60102698 A JP60102698 A JP 60102698A JP 10269885 A JP10269885 A JP 10269885A JP H0511432 B2 JPH0511432 B2 JP H0511432B2
Authority
JP
Japan
Prior art keywords
layer
mask
superconductor
etching
mask layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60102698A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61263179A (ja
Inventor
Takukatsu Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60102698A priority Critical patent/JPS61263179A/ja
Publication of JPS61263179A publication Critical patent/JPS61263179A/ja
Publication of JPH0511432B2 publication Critical patent/JPH0511432B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP60102698A 1985-05-16 1985-05-16 ジヨセフソン接合素子の製造方法 Granted JPS61263179A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60102698A JPS61263179A (ja) 1985-05-16 1985-05-16 ジヨセフソン接合素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60102698A JPS61263179A (ja) 1985-05-16 1985-05-16 ジヨセフソン接合素子の製造方法

Publications (2)

Publication Number Publication Date
JPS61263179A JPS61263179A (ja) 1986-11-21
JPH0511432B2 true JPH0511432B2 (enrdf_load_stackoverflow) 1993-02-15

Family

ID=14334475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60102698A Granted JPS61263179A (ja) 1985-05-16 1985-05-16 ジヨセフソン接合素子の製造方法

Country Status (1)

Country Link
JP (1) JPS61263179A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03233982A (ja) * 1990-02-09 1991-10-17 Hitachi Ltd ジョセフソン接合素子のパターン形成方法
JPH0831628B2 (ja) * 1990-06-22 1996-03-27 工業技術院長 ジョセフソン集積回路の作製方法
JP4736014B2 (ja) * 2004-04-07 2011-07-27 大日本印刷株式会社 発光素子およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175830A (ja) * 1982-04-08 1983-10-15 Matsushita Electric Ind Co Ltd パタ−ン形成方法

Also Published As

Publication number Publication date
JPS61263179A (ja) 1986-11-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term