JPS6257114B2 - - Google Patents
Info
- Publication number
- JPS6257114B2 JPS6257114B2 JP54164759A JP16475979A JPS6257114B2 JP S6257114 B2 JPS6257114 B2 JP S6257114B2 JP 54164759 A JP54164759 A JP 54164759A JP 16475979 A JP16475979 A JP 16475979A JP S6257114 B2 JPS6257114 B2 JP S6257114B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- photosensitive resin
- lower electrode
- silicon monoxide
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 34
- 239000011347 resin Substances 0.000 claims description 32
- 229920005989 resin Polymers 0.000 claims description 32
- 239000010409 thin film Substances 0.000 claims description 32
- 239000010408 film Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 10
- 238000007740 vapor deposition Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16475979A JPS5688384A (en) | 1979-12-20 | 1979-12-20 | Manufacture of josephson junction element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16475979A JPS5688384A (en) | 1979-12-20 | 1979-12-20 | Manufacture of josephson junction element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5688384A JPS5688384A (en) | 1981-07-17 |
| JPS6257114B2 true JPS6257114B2 (enrdf_load_stackoverflow) | 1987-11-30 |
Family
ID=15799378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16475979A Granted JPS5688384A (en) | 1979-12-20 | 1979-12-20 | Manufacture of josephson junction element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5688384A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220124913A (ko) * | 2021-03-04 | 2022-09-14 | 한양대학교 에리카산학협력단 | 에너지 변환 장치 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4418095A (en) * | 1982-03-26 | 1983-11-29 | Sperry Corporation | Method of making planarized Josephson junction devices |
| JPS58209184A (ja) * | 1982-05-31 | 1983-12-06 | Nec Corp | ジヨセフソン接合素子の製造方法 |
-
1979
- 1979-12-20 JP JP16475979A patent/JPS5688384A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220124913A (ko) * | 2021-03-04 | 2022-09-14 | 한양대학교 에리카산학협력단 | 에너지 변환 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5688384A (en) | 1981-07-17 |
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