JPH0532915B2 - - Google Patents

Info

Publication number
JPH0532915B2
JPH0532915B2 JP62325530A JP32553087A JPH0532915B2 JP H0532915 B2 JPH0532915 B2 JP H0532915B2 JP 62325530 A JP62325530 A JP 62325530A JP 32553087 A JP32553087 A JP 32553087A JP H0532915 B2 JPH0532915 B2 JP H0532915B2
Authority
JP
Japan
Prior art keywords
film
insulating film
upper electrode
layer
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62325530A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01168080A (ja
Inventor
Koji Yamada
Hiroyuki Mori
Yoshinobu Taruya
Mikio Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62325530A priority Critical patent/JPH01168080A/ja
Publication of JPH01168080A publication Critical patent/JPH01168080A/ja
Publication of JPH0532915B2 publication Critical patent/JPH0532915B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62325530A 1987-12-24 1987-12-24 ジョセフソン接合素子の作製方法 Granted JPH01168080A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62325530A JPH01168080A (ja) 1987-12-24 1987-12-24 ジョセフソン接合素子の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62325530A JPH01168080A (ja) 1987-12-24 1987-12-24 ジョセフソン接合素子の作製方法

Publications (2)

Publication Number Publication Date
JPH01168080A JPH01168080A (ja) 1989-07-03
JPH0532915B2 true JPH0532915B2 (enrdf_load_stackoverflow) 1993-05-18

Family

ID=18177904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62325530A Granted JPH01168080A (ja) 1987-12-24 1987-12-24 ジョセフソン接合素子の作製方法

Country Status (1)

Country Link
JP (1) JPH01168080A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2756443B2 (ja) * 1992-12-01 1998-05-25 工業技術院長 ジョセフソン接合の作製方法
DE10022660A1 (de) * 2000-04-28 2001-11-08 Infineon Technologies Ag Optischer Sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6196783A (ja) * 1984-10-17 1986-05-15 Agency Of Ind Science & Technol ジヨセフソン素子用微細パタ−ンの形成方法
JPS61144892A (ja) * 1984-12-18 1986-07-02 Fujitsu Ltd シヨセフソン集積回路の製造方法
JPS61278179A (ja) * 1985-06-03 1986-12-09 Agency Of Ind Science & Technol 超電導回路形成用エッチング方法

Also Published As

Publication number Publication date
JPH01168080A (ja) 1989-07-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term