JPS6149674B2 - - Google Patents
Info
- Publication number
- JPS6149674B2 JPS6149674B2 JP53061329A JP6132978A JPS6149674B2 JP S6149674 B2 JPS6149674 B2 JP S6149674B2 JP 53061329 A JP53061329 A JP 53061329A JP 6132978 A JP6132978 A JP 6132978A JP S6149674 B2 JPS6149674 B2 JP S6149674B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- electrode
- substrate
- crystal display
- display device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004973 liquid crystal related substance Substances 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 26
- 239000004065 semiconductor Substances 0.000 claims description 11
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 12
- 239000011521 glass Substances 0.000 description 12
- 239000003990 capacitor Substances 0.000 description 9
- 239000012212 insulator Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000001259 photo etching Methods 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6132978A JPS54152894A (en) | 1978-05-23 | 1978-05-23 | Liquid crystal display unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6132978A JPS54152894A (en) | 1978-05-23 | 1978-05-23 | Liquid crystal display unit |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62158877A Division JPH0666017B2 (ja) | 1987-06-26 | 1987-06-26 | 液晶表示装置 |
JP62158876A Division JPS6326632A (ja) | 1987-06-26 | 1987-06-26 | 液晶表示装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54152894A JPS54152894A (en) | 1979-12-01 |
JPS6149674B2 true JPS6149674B2 (de) | 1986-10-30 |
Family
ID=13167981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6132978A Granted JPS54152894A (en) | 1978-05-23 | 1978-05-23 | Liquid crystal display unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54152894A (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5691276A (en) * | 1979-12-25 | 1981-07-24 | Citizen Watch Co Ltd | Display panel |
JPS5692573A (en) * | 1979-12-26 | 1981-07-27 | Citizen Watch Co Ltd | Display panel |
JPS5713777A (en) | 1980-06-30 | 1982-01-23 | Shunpei Yamazaki | Semiconductor device and manufacture thereof |
JP2714570B2 (ja) * | 1980-03-27 | 1998-02-16 | キヤノン 株式会社 | アクティブマトリクス回路 |
US5859443A (en) * | 1980-06-30 | 1999-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US6900463B1 (en) | 1980-06-30 | 2005-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JPS57130081A (en) * | 1981-02-06 | 1982-08-12 | Matsushita Electric Ind Co Ltd | Liquid crystal picture display device |
JPS58116573A (ja) * | 1981-12-29 | 1983-07-11 | セイコーエプソン株式会社 | マトリックス表示装置の製造方法 |
JP2622661B2 (ja) * | 1982-04-13 | 1997-06-18 | セイコーエプソン株式会社 | 液晶表示パネル |
FR2551244B1 (fr) * | 1983-08-26 | 1985-10-11 | Thomson Csf | Procede de fabrication d'un substrat pour dispositif a commande electrique et ecran de visualisation elabore a partir d'un tel substrat |
US4727044A (en) | 1984-05-18 | 1988-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Method of making a thin film transistor with laser recrystallized source and drain |
JP2739158B2 (ja) * | 1986-11-11 | 1998-04-08 | セイコーエプソン株式会社 | 液晶表示装置 |
JPS6326632A (ja) * | 1987-06-26 | 1988-02-04 | Seiko Epson Corp | 液晶表示装置 |
JPH02230130A (ja) * | 1989-12-15 | 1990-09-12 | Semiconductor Energy Lab Co Ltd | 液晶電気光学装置 |
JPH05257163A (ja) * | 1991-08-09 | 1993-10-08 | Semiconductor Energy Lab Co Ltd | 複合半導体装置 |
JP2816421B2 (ja) * | 1992-02-07 | 1998-10-27 | 株式会社 半導体エネルギー研究所 | 液晶電気光学装置 |
JPH05235037A (ja) * | 1992-02-26 | 1993-09-10 | Seiko Epson Corp | 薄膜トランジスタの製造方法 |
JPH05243577A (ja) * | 1992-02-26 | 1993-09-21 | Seiko Epson Corp | 薄膜トランジスタの製造方法 |
JP2525708B2 (ja) * | 1992-04-27 | 1996-08-21 | セイコーエプソン株式会社 | 薄膜トランジスタの製造方法 |
JP2525707B2 (ja) * | 1992-04-27 | 1996-08-21 | セイコーエプソン株式会社 | 半導体集積回路 |
JP2621807B2 (ja) * | 1994-09-05 | 1997-06-18 | セイコーエプソン株式会社 | 薄膜トランジスタ |
JP2747657B2 (ja) * | 1995-02-13 | 1998-05-06 | セイコーエプソン株式会社 | 液晶表示体装置 |
-
1978
- 1978-05-23 JP JP6132978A patent/JPS54152894A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS54152894A (en) | 1979-12-01 |
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